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Class Information
Number: 118/708
Name: Coating apparatus > Condition responsive control
Description: Apparatus wherein a work sensing means is provided which is contacted and moved by work moving therepast and wherein any movement imparted to the sensing means is transmitted directly to and causes the movement of some other element of the apparatus.










Sub-classes under this class:

Class Number Class Name Patents
118/709 Responsive to diameter of wound material spool 4
118/710 Valve actuator 48


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8677933 Film forming apparatus forming a coating film using spiral coating while adjusting sound wave projected onto the coating film Mar. 25, 2014
8671875 Liquid processing apparatus, liquid processing method and storage medium Mar. 18, 2014
8671879 Systems and methods for plasma processing of microfeature workpieces Mar. 18, 2014
8662009 Adhesive application apparatus Mar. 4, 2014
8636938 Modular fabrication systems and methods Jan. 28, 2014
8608900 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Dec. 17, 2013
8590480 Cable maintenance apparatus Nov. 26, 2013
8459202 Substrate processing apparatus Jun. 11, 2013
8455039 Photoresist-coating apparatus and photoresist-coating method using the same Jun. 4, 2013
8444767 Coating device May. 21, 2013
8382904 Gas feed installation for machines depositing a barrier layer on containers Feb. 26, 2013
8381676 Method and system for coating a medical device using optical drop volume verification Feb. 26, 2013
8372480 Coater/developer, method of coating and developing resist film, and computer readable storing medium Feb. 12, 2013
8347812 Device and method for cleaning cables Jan. 8, 2013
8277867 Microdrop ablumenal coating system and method Oct. 2, 2012
8267039 Coating apparatus and method of applying coating liquid Sep. 18, 2012
8247741 Dynamic system for variable heating or cooling of linearly conveyed substrates Aug. 21, 2012
8220411 Liquid applying apparatus, method of controlling the same, and ink jet printing apparatus Jul. 17, 2012
8221580 Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops Jul. 17, 2012
8197900 Coating method and coating apparatus Jun. 12, 2012
8196545 Device and method for manufacturing a semiconductor wafer Jun. 12, 2012
8174782 Methods for depositing lubricant onto disks and systems thereof May. 8, 2012
8171879 Maintenance system, substrate processing apparatus, remote operation unit and communication method May. 8, 2012
8153183 Adjustable platform assembly for digital manufacturing system Apr. 10, 2012
8122848 Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices Feb. 28, 2012
8092639 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Jan. 10, 2012
8091505 Secondary battery, method and device for testing the negative electrode, and method and device for producing negative electrode thereof Jan. 10, 2012
8075941 Method and arrangement in coating line Dec. 13, 2011
8020512 Pattern formation device Sep. 20, 2011
8015940 Coater/developer, method of coating and developing resist film, and computer readable storing medium Sep. 13, 2011
8011319 Method for oxidizing a layer, and associated holding devices for a substrate Sep. 6, 2011
8002463 Method and device for determining the temperature of a substrate Aug. 23, 2011
7980198 Doping apparatus, doping method, and method for fabricating thin film transistor Jul. 19, 2011
7960278 Method of film deposition Jun. 14, 2011
7954451 Closed loop adhesive registration system Jun. 7, 2011
7953512 Substrate processing system, control method for substrate processing apparatus and program stored on medium May. 31, 2011
7947215 Heat treatment apparatus, heat treatment method, and recording medium storing computer program carrying out the same May. 24, 2011
7939003 Modular fabrication systems and methods May. 10, 2011
7921800 System and method for coating a fire-resistant material on a substrate Apr. 12, 2011
7896967 Gas supply system, substrate processing apparatus and gas supply method Mar. 1, 2011
7823536 Automatic waxing apparatus and method Nov. 2, 2010
7803720 Coating process and equipment for reduced resist consumption Sep. 28, 2010
7789038 Ejection inspection device, liquid droplet ejection apparatus, method of manufacturing electro-optic device, electro-optic device, and electronic apparatus Sep. 7, 2010
7763309 Method of controlling chemical solution applying apparatus, chemical solution applying apparatus, and method of manufacturing semiconductor device Jul. 27, 2010
7713354 Film forming method, film forming system and recording medium May. 11, 2010
7673582 Apparatus and method for removing an edge bead of a spin-coated layer Mar. 9, 2010
7665415 Substrate processing apparatus Feb. 23, 2010
7638001 Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices Dec. 29, 2009
7608150 Coating apparatus and operating method thereof Oct. 27, 2009
7604832 Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus Oct. 20, 2009

1 2 3 4 5










 
 
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