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Class Information
Number: 118/696
Name: Coating apparatus > Program, cyclic, or time control
Description: Apparatus having a regulating means which is provided with (a) means for operating the apparatus in response to a set of coded instructions, (b) means for regulating the sequence of operational steps performed in or by the apparatus, or (c) means for determining the time at which an operation occurs or length of time taken to perform such an operation.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7431584 |
Heat processing apparatus and heat processing method |
Oct. 7, 2008 |
| 7422768 |
Film forming method, film forming apparatus, method of manufacturing device, and apparatus for manufacturing device |
Sep. 9, 2008 |
| 7410541 |
Roll coater assembly system |
Aug. 12, 2008 |
| 7399364 |
Hermetic cap layers formed on low-.kappa. films by plasma enhanced chemical vapor deposition |
Jul. 15, 2008 |
| 7390365 |
Developing method, substrate treating method, and substrate treating apparatus |
Jun. 24, 2008 |
| 7387684 |
Single-dose spray system for application of liquids onto the human body |
Jun. 17, 2008 |
| 7353379 |
Methods for configuring a plasma cluster tool |
Apr. 1, 2008 |
| 7347900 |
Chemical vapor deposition apparatus and method |
Mar. 25, 2008 |
| 7341629 |
Method, system and apparatus for scraping a roll surface in a molten metal coating process |
Mar. 11, 2008 |
| 7335266 |
Method of forming a controlled and uniform lightly phosphorous doped silicon film |
Feb. 26, 2008 |
| 7309395 |
System for forming composite polymer dielectric film |
Dec. 18, 2007 |
| 7297211 |
Single-dose spray system for application of liquids onto the human body |
Nov. 20, 2007 |
| 7294205 |
Method for reducing the intrinsic stress of high density plasma films |
Nov. 13, 2007 |
| 7279046 |
Method and apparatus for aligning patterns on a substrate |
Oct. 9, 2007 |
| 7258894 |
Apparatus and method for dispensing liquid crystal material |
Aug. 21, 2007 |
| 7217336 |
Directed gas injection apparatus for semiconductor processing |
May. 15, 2007 |
| 7205240 |
HDP-CVD multistep gapfill process |
Apr. 17, 2007 |
| 7203565 |
Temperature abnormality detection method and semiconductor manufacturing apparatus |
Apr. 10, 2007 |
| 7198676 |
Device manufacturing apparatus and method, and driving method for device manufacturing apparatus |
Apr. 3, 2007 |
| 7192486 |
Clog-resistant gas delivery system |
Mar. 20, 2007 |
| 7113253 |
Method, apparatus and computer product for substrate processing |
Sep. 26, 2006 |
| 7108751 |
Method and apparatus for determining consumable lifetime |
Sep. 19, 2006 |
| 7052552 |
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD |
May. 30, 2006 |
| 7008124 |
Method and device for processing substrate |
Mar. 7, 2006 |
| 7001645 |
Magnetic coating, coating method with same and coating apparatus therefor |
Feb. 21, 2006 |
| 6966949 |
Apparatus and method for drying under reduced pressure, and coating film forming apparatus |
Nov. 22, 2005 |
| 6960416 |
Method and apparatus for controlling etch processes during fabrication of semiconductor devices |
Nov. 1, 2005 |
| 6960264 |
Process for fabricating films of uniform properties on semiconductor devices |
Nov. 1, 2005 |
| 6949142 |
Device for controlling a surface treatment installation in automotive industry |
Sep. 27, 2005 |
| 6924088 |
Method and system for realtime CD microloading control |
Aug. 2, 2005 |
| 6916380 |
System for depositing a layered film |
Jul. 12, 2005 |
| 6905549 |
Vertical type semiconductor device producing apparatus |
Jun. 14, 2005 |
| 6899763 |
Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes |
May. 31, 2005 |
| 6875281 |
Method and system for coating and developing |
Apr. 5, 2005 |
| 6837938 |
Apparatus associatable with a deposition chamber to enhance uniformity of properties of material layers formed on semiconductor substrates therein |
Jan. 4, 2005 |
| 6833030 |
Liquid delivery system having safe unit and operating method thereof |
Dec. 21, 2004 |
| 6827784 |
Corrugating method and means |
Dec. 7, 2004 |
| 6821550 |
Apparatus and method for applying process solution |
Nov. 23, 2004 |
| 6821347 |
Apparatus and method for depositing materials onto microelectronic workpieces |
Nov. 23, 2004 |
| 6811806 |
Apparatus and method for spray coating sheet material |
Nov. 2, 2004 |
| 6777352 |
Variable flow deposition apparatus and method in semiconductor substrate processing |
Aug. 17, 2004 |
| 6761769 |
Apparatus for applying viscous material |
Jul. 13, 2004 |
| 6758908 |
Solvent prewet and method and apparatus to dispense the solvent prewet |
Jul. 6, 2004 |
| 6753272 |
High-performance energy transfer method for thermal processing applications |
Jun. 22, 2004 |
| 6740195 |
Detection of nontransient processing anomalies in vacuum manufacturing process |
May. 25, 2004 |
| 6716478 |
Coating film forming apparatus and coating film forming method |
Apr. 6, 2004 |
| 6692573 |
Automated pitch button dispensing station and method |
Feb. 17, 2004 |
| 6649019 |
Apparatus for conditioning the atmosphere in a vacuum chamber |
Nov. 18, 2003 |
| 6626996 |
Pizza sauce dispensing devices and methods |
Sep. 30, 2003 |
| 6620246 |
Process controller for coating fasteners |
Sep. 16, 2003 |
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