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Class Information
Number: 118/695
Name: Coating apparatus > Interfacing control of plural operations
Description: Apparatus wherein a plurality of independently driven and concurrently moving members operate on the work to be coated and means are provided to synchronize the movement for these members.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7390365 |
Developing method, substrate treating method, and substrate treating apparatus |
Jun. 24, 2008 |
| 7387684 |
Single-dose spray system for application of liquids onto the human body |
Jun. 17, 2008 |
| 7351290 |
Robotic pen |
Apr. 1, 2008 |
| 7351292 |
Assembly for processing substrates |
Apr. 1, 2008 |
| 7332037 |
Numerical jet machine for the application of a coating onto a substrate |
Feb. 19, 2008 |
| 7297211 |
Single-dose spray system for application of liquids onto the human body |
Nov. 20, 2007 |
| 7294205 |
Method for reducing the intrinsic stress of high density plasma films |
Nov. 13, 2007 |
| 7279046 |
Method and apparatus for aligning patterns on a substrate |
Oct. 9, 2007 |
| 7203565 |
Temperature abnormality detection method and semiconductor manufacturing apparatus |
Apr. 10, 2007 |
| 7141119 |
Pressure-controlling dispersion delivery system |
Nov. 28, 2006 |
| 7108751 |
Method and apparatus for determining consumable lifetime |
Sep. 19, 2006 |
| 7077875 |
Manufacturing device for buried insulating layer type single crystal silicon carbide substrate |
Jul. 18, 2006 |
| 7052552 |
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD |
May. 30, 2006 |
| 7041174 |
Grafting apparatus and method of using |
May. 9, 2006 |
| 7025830 |
Coating apparatus and method |
Apr. 11, 2006 |
| 7014884 |
Coated film forming method and apparatus therefor |
Mar. 21, 2006 |
| 6949142 |
Device for controlling a surface treatment installation in automotive industry |
Sep. 27, 2005 |
| 6841005 |
Apparatus and method for thermal spraying |
Jan. 11, 2005 |
| 6830619 |
Method and apparatus for controlling a temperature of a microelectronic substrate |
Dec. 14, 2004 |
| 6776872 |
Data processing apparatus for semiconductor processing apparatus |
Aug. 17, 2004 |
| 6749689 |
Controlled reciprocating machine and method |
Jun. 15, 2004 |
| 6726799 |
Plasma etching apparatus with focus ring and plasma etching method |
Apr. 27, 2004 |
| 6689220 |
Plasma enhanced pulsed layer deposition |
Feb. 10, 2004 |
| 6669782 |
Method and apparatus to control the formation of layers useful in integrated circuits |
Dec. 30, 2003 |
| 6656282 |
Atomic layer deposition apparatus and process using remote plasma |
Dec. 2, 2003 |
| 6656281 |
Substrate processing apparatus and substrate processing method |
Dec. 2, 2003 |
| 6638880 |
Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device |
Oct. 28, 2003 |
| 6626996 |
Pizza sauce dispensing devices and methods |
Sep. 30, 2003 |
| 6623669 |
Method and apparatus for casting lenses |
Sep. 23, 2003 |
| 6620246 |
Process controller for coating fasteners |
Sep. 16, 2003 |
| 6617258 |
Method of forming a gate insulation layer for a semiconductor device by controlling the duration of an etch process, and system for accomplishing same |
Sep. 9, 2003 |
| 6610151 |
Seed layers for interconnects and methods and apparatus for their fabrication |
Aug. 26, 2003 |
| 6610364 |
Apparatus for dispensing liquid crystal and method for controlling liquid crystal dropping amount |
Aug. 26, 2003 |
| 6605176 |
Aperture for linear control of vacuum chamber pressure |
Aug. 12, 2003 |
| 6596084 |
Pyrolytic carbon coating apparatus having feed gas actuator |
Jul. 22, 2003 |
| 6562139 |
Computer controlled apparatus for fairing and painting of marine vessel surfaces |
May. 13, 2003 |
| 6530992 |
Method of forming a film in a chamber and positioning a substitute in a chamber |
Mar. 11, 2003 |
| 6416307 |
Plastic lens systems, compositions, and methods |
Jul. 9, 2002 |
| 6409879 |
System for controlling transistor spacer width |
Jun. 25, 2002 |
| 6395092 |
Apparatus for depositing high deposition rate halogen-doped silicon oxide layer |
May. 28, 2002 |
| 6379465 |
Coating system with centralized control panel and gun mapping |
Apr. 30, 2002 |
| 6374770 |
Apparatus for improving film stability of halogen-doped silicon oxide films |
Apr. 23, 2002 |
| 6375743 |
Method for improved chamber bake-out and cool-down |
Apr. 23, 2002 |
| 6372083 |
Method of manufacturing semiconductor device and apparatus for manufacturing the same |
Apr. 16, 2002 |
| 6368880 |
Barrier applications for aluminum planarization |
Apr. 9, 2002 |
| 6360687 |
Wafer flattening system |
Mar. 26, 2002 |
| 6360685 |
Sub-atmospheric chemical vapor deposition system with dopant bypass |
Mar. 26, 2002 |
| 6322626 |
Apparatus for controlling a temperature of a microelectronics substrate |
Nov. 27, 2001 |
| 6296707 |
Apparatus for coating a surface of one or more lenses |
Oct. 2, 2001 |
| 6289843 |
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface |
Sep. 18, 2001 |
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