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Class Information
Number: 118/69
Name: Coating apparatus > With heat exchange, drying, or non-coating gas or vapor treatment of work > Cooling
Description: Coating apparatus having means to lower the temperature of the work or the coating on the work.


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
7575639 Apparatus and method for processing sheet materials Aug. 18, 2009
7563323 Substrate treating apparatus Jul. 21, 2009
7547361 Method and apparatus for fabrication of polymer-coated fibers Jun. 16, 2009
7541067 Method and apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cells Jun. 2, 2009
7541299 Method and apparatus for thermally processing microelectronic workpieces Jun. 2, 2009
7520936 Hardening processing apparatus, hardening processing method, and coating film forming apparatus Apr. 21, 2009
7517407 Cooling system and method for a paper coating device in a papermaking apparatus Apr. 14, 2009
7326298 Wire insulating line Feb. 5, 2008
7267497 Coating and developing system and coating and developing method Sep. 11, 2007
7220316 Wire material plating equipment May. 22, 2007
7208066 Substrate processing apparatus and substrate processing method Apr. 24, 2007
7166200 Method and apparatus for an improved upper electrode plate in a plasma processing system Jan. 23, 2007
7083681 Method for forming coating film on internal surface of elongated tube and unit for forming the same Aug. 1, 2006
7067010 Indexing spray machine Jun. 27, 2006
7029531 Rewetting installation for a material web Apr. 18, 2006
7011863 Substrate processing apparatus and substrate processing method Mar. 14, 2006
6969538 Method for heat processing of substrate Nov. 29, 2005
6913675 Film forming apparatus, substrate for forming oxide thin film, and production method thereof Jul. 5, 2005
6908512 Temperature-controlled substrate holder for processing in fluids Jun. 21, 2005
6841004 Optical fiber coating device having cooler Jan. 11, 2005
6827973 Substrate processing method Dec. 7, 2004
6786974 Insulating film forming method and insulating film forming apparatus Sep. 7, 2004
6758903 Apparatus for coating metal strip Jul. 6, 2004
6730165 Polymer impregnation process May. 4, 2004
6699329 Coating and curing system Mar. 2, 2004
6699328 Device for the temperature equalisation of coating media Mar. 2, 2004
6673155 Apparatus for forming coating film and apparatus for curing the coating film Jan. 6, 2004
6635580 Apparatus and method for controlling wafer temperature in a plasma etcher Oct. 21, 2003
6627261 Spray-coating method and spray-coater Sep. 30, 2003
6593045 Substrate processing apparatus and method Jul. 15, 2003
6554899 Paper coating apparatus Apr. 29, 2003
6555178 Process and apparatus for nickel plating and nickel-plated product Apr. 29, 2003
6544338 Inverted hot plate cure module Apr. 8, 2003
6537374 Method and system for cooling strip material Mar. 25, 2003
6524389 Substrate processing apparatus Feb. 25, 2003
6514340 Lubricant coat forming apparatus Feb. 4, 2003
6508920 Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device Jan. 21, 2003
6475279 Substrate processing apparatus and substrate processing method Nov. 5, 2002
6464789 Substrate processing apparatus Oct. 15, 2002
6460375 Ice coating method for controlling the formation of an ice-coating on the exterior of a hollow glass article Oct. 8, 2002
6391112 Heat-exchanging workholder for a vacuum unit May. 21, 2002
6382128 Apparatus for manufacturing an adjustable covering for architectural openings May. 7, 2002
6375743 Method for improved chamber bake-out and cool-down Apr. 23, 2002
6374769 Fluid material application system employing tube-in-hose heat exchanger Apr. 23, 2002
6377870 Device and method for delivering various transparent substrates into a high-precision measuring instrument Apr. 23, 2002
6364949 300 mm CVD chamber design for metal-organic thin film deposition Apr. 2, 2002
6350316 Apparatus for forming coating film Feb. 26, 2002
6332724 Substrate processing apparatus Dec. 25, 2001
6312518 Apparatus for forming a photoresist film in a semiconductor device and method of forming a photoresist film using the same Nov. 6, 2001
6306214 Molten metal immersion bath for wire fabrication Oct. 23, 2001

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