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Class Information
Number: 118/52
Name: Coating apparatus > With means to centrifuge work
Description: Coating apparatus combined with means to rotate the base at such speed that centrifugal force affects the coating.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7404681 |
Coating methods and apparatus for coating |
Jul. 29, 2008 |
| 7404979 |
Spin coating apparatus and a method for coating implantable devices |
Jul. 29, 2008 |
| 7396562 |
Optical information-recording medium manufacturing method and manufacturing apparatus |
Jul. 8, 2008 |
| 7396412 |
Coat/develop module with shared dispense |
Jul. 8, 2008 |
| 7393414 |
Methods and systems for processing a microelectronic topography |
Jul. 1, 2008 |
| 7381269 |
System and method to supply chemical during semiconductor device fabrication |
Jun. 3, 2008 |
| 7364771 |
Method and apparatus for production of fluorine-containing polyimide film |
Apr. 29, 2008 |
| 7357840 |
Solvent bath and drain |
Apr. 15, 2008 |
| 7351288 |
Shock absorbing fluidic actuator |
Apr. 1, 2008 |
| 7351293 |
Method and device for rotating a wafer |
Apr. 1, 2008 |
| 7344600 |
Substrate treatment apparatus |
Mar. 18, 2008 |
| 7332198 |
Plating apparatus and plating method |
Feb. 19, 2008 |
| 7326437 |
Method and system for coating polymer solution on a substrate in a solvent saturated chamber |
Feb. 5, 2008 |
| 7322756 |
Coating and developing apparatus and coating and developing method |
Jan. 29, 2008 |
| 7323060 |
Substrate treating apparatus |
Jan. 29, 2008 |
| 7318867 |
Producing cover layers in optical discs |
Jan. 15, 2008 |
| 7316515 |
Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing |
Jan. 8, 2008 |
| 7311779 |
Heating apparatus to heat wafers using water and plate with turbolators |
Dec. 25, 2007 |
| 7311781 |
Substrate rotation type treatment apparatus |
Dec. 25, 2007 |
| 7303633 |
Apparatus for producing optical information recording medium |
Dec. 4, 2007 |
| 7290948 |
Substrate processing apparatus and substrate processing method |
Nov. 6, 2007 |
| 7291227 |
Processing equipment |
Nov. 6, 2007 |
| 7287919 |
Developing process and apparatus |
Oct. 30, 2007 |
| 7288154 |
Apparatus for optical disc spin-coating and method of coating optical disc |
Oct. 30, 2007 |
| 7281869 |
Coating and developing system and coating and developing method |
Oct. 16, 2007 |
| 7282459 |
Ejection method and optical device manufacturing method for arranging nozzles in agreement with sections subject to ejection |
Oct. 16, 2007 |
| 7276119 |
Method and apparatus for producing cover layers in Blu-ray discs |
Oct. 2, 2007 |
| 7276118 |
Spin-coating apparatus for use in manufacturing semiconductor devices |
Oct. 2, 2007 |
| 7276097 |
Load-lock system, exposure processing system, and device manufacturing method |
Oct. 2, 2007 |
| 7267129 |
Device and process for liquid treatment of wafer-shaped articles |
Sep. 11, 2007 |
| 7267497 |
Coating and developing system and coating and developing method |
Sep. 11, 2007 |
| 7255747 |
Coat/develop module with independent stations |
Aug. 14, 2007 |
| 7244665 |
Wafer edge ring structures and methods of formation |
Jul. 17, 2007 |
| 7241342 |
Non-dripping nozzle apparatus |
Jul. 10, 2007 |
| 7238239 |
Liquid coating device with barometric pressure compensation |
Jul. 3, 2007 |
| 7226637 |
Manufacturing method for multilayer fluorescent information carriers |
Jun. 5, 2007 |
| 7223308 |
Apparatus to improve wafer temperature uniformity for face-up wet processing |
May. 29, 2007 |
| 7217325 |
System for processing a workpiece |
May. 15, 2007 |
| 7198674 |
Device for surface coating of small parts |
Apr. 3, 2007 |
| 7179504 |
Substrate processing method and substrate processing system |
Feb. 20, 2007 |
| 7172674 |
Device for liquid treatment of wafer-shaped articles |
Feb. 6, 2007 |
| 7153364 |
Re-circulation and reuse of dummy-dispensed resist |
Dec. 26, 2006 |
| 7147893 |
Method of and apparatus for forming transparent layer on disc substrate, and disc therefrom |
Dec. 12, 2006 |
| 7144459 |
Centrifugal swing arm spray processor |
Dec. 5, 2006 |
| 7128943 |
Methods for fabricating lenses at the end of optical fibers in the far field of the fiber aperture |
Oct. 31, 2006 |
| 7122084 |
Device for liquid treatment of disk-shaped objects |
Oct. 17, 2006 |
| 7101588 |
Apparatus and method for applying liquid material to form a resin layer |
Sep. 5, 2006 |
| 7090892 |
Method and apparatus for the removal of excess coating material from a honeycomb body |
Aug. 15, 2006 |
| 7077585 |
Developing method and apparatus for performing development processing properly and a solution processing method enabling enhanced uniformity in the processing |
Jul. 18, 2006 |
| 7078355 |
Method and system of coating polymer solution on surface of a substrate |
Jul. 18, 2006 |
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