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Class Information
Number: 118/500
Name: Coating apparatus > Work holders, or handling devices
Description: Coating apparatus having means, per se, to grasp or manipulate the work.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6203617 |
Conveying unit and substrate processing unit |
Mar. 20, 2001 |
| 6203622 |
Wafer support system |
Mar. 20, 2001 |
| 6203661 |
Brim and gas escape for non-contact wafer holder |
Mar. 20, 2001 |
| 6200388 |
Substrate support for a thermal processing chamber |
Mar. 13, 2001 |
| 6197115 |
Robot based sealant dispenser |
Mar. 6, 2001 |
| 6197372 |
Coating and developing apparatus, complex apparatus and processing method in coating and developing apparatus |
Mar. 6, 2001 |
| 6193801 |
Apparatus for coating lenticular articles |
Feb. 27, 2001 |
| 6190460 |
Apparatus for low pressure chemical vapor depostion |
Feb. 20, 2001 |
| 6186092 |
Apparatus and method for aligning and controlling edge deposition on a substrate |
Feb. 13, 2001 |
| 6183813 |
Method of staining a semiconductor wafer with a semiconductor treatment chemical |
Feb. 6, 2001 |
| 6179915 |
On track coater unit cup set |
Jan. 30, 2001 |
| 6176931 |
Wafer clamp ring for use in an ionized physical vapor deposition apparatus |
Jan. 23, 2001 |
| 6177129 |
Process for handling workpieces and apparatus therefor |
Jan. 23, 2001 |
| 6174370 |
Semiconductor wafer chucking device and method for stripping semiconductor wafer |
Jan. 16, 2001 |
| 6171400 |
Vertical semiconductor wafer carrier |
Jan. 9, 2001 |
| 6171402 |
Thermal conditioning apparatus |
Jan. 9, 2001 |
| 6171462 |
Device for holding lenses, especially for eye glasses to be coated in a vacuum coating or sputtering machine |
Jan. 9, 2001 |
| 6168665 |
Substrate processing apparatus |
Jan. 2, 2001 |
| 6165266 |
Machine for varnishing easy-to-open covers |
Dec. 26, 2000 |
| 6165267 |
Spin coating apparatus |
Dec. 26, 2000 |
| 6165268 |
Wafer carrier adapter and method for use thereof |
Dec. 26, 2000 |
| 6167194 |
Guard ring of a heating device of the light irradiation type |
Dec. 26, 2000 |
| 6162336 |
Clamping ring design to reduce wafer sticking problem in metal deposition |
Dec. 19, 2000 |
| 6163648 |
Heating device of the light irradiation type and holding device therefor |
Dec. 19, 2000 |
| 6158596 |
Substrate holder, and system and method for cleaning and drying same |
Dec. 12, 2000 |
| 6155436 |
Arc inhibiting wafer holder assembly |
Dec. 5, 2000 |
| 6156121 |
Wafer boat and film formation method |
Dec. 5, 2000 |
| 6156124 |
Wafer transfer station for a chemical mechanical polisher |
Dec. 5, 2000 |
| 6149727 |
Substrate processing apparatus |
Nov. 21, 2000 |
| 6146464 |
Susceptor for deposition apparatus |
Nov. 14, 2000 |
| 6143143 |
Masking means and cleaning techniques for surfaces of substrates |
Nov. 7, 2000 |
| 6143147 |
Wafer holding assembly and wafer processing apparatus having said assembly |
Nov. 7, 2000 |
| 6139682 |
Processing apparatus for manufacturing semiconductors |
Oct. 31, 2000 |
| 6136166 |
Apparatus for producing a uniform magnetic field over a large surface area of a wafer |
Oct. 24, 2000 |
| 6133121 |
Apparatus for supporting semiconductor wafers and semiconductor wafer processing method using supporting apparatus |
Oct. 17, 2000 |
| 6129041 |
Apparatus for masking fastener holes in a wheel |
Oct. 10, 2000 |
| 6129047 |
Susceptor for vapor-phase growth apparatus |
Oct. 10, 2000 |
| 6125554 |
Method and apparatus for drying flat objects |
Oct. 3, 2000 |
| 6120609 |
Self-aligning lift mechanism |
Sep. 19, 2000 |
| 6120834 |
Apparatus for forming film and method for forming film |
Sep. 19, 2000 |
| 6117238 |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
Sep. 12, 2000 |
| 6113693 |
Universal fixture for holding printed circuit boards during processing |
Sep. 5, 2000 |
| 6113694 |
Substrate treatment apparatus |
Sep. 5, 2000 |
| 6113702 |
Wafer support system |
Sep. 5, 2000 |
| 6110286 |
Vertical processing unit |
Aug. 29, 2000 |
| 6106682 |
Thin-film processing electromagnet for low-skew magnetic orientation |
Aug. 22, 2000 |
| 6103012 |
Coating press |
Aug. 15, 2000 |
| 6099645 |
Vertical semiconductor wafer carrier with slats |
Aug. 8, 2000 |
| 6099652 |
Apparatus and method for depositing a substance with temperature control |
Aug. 8, 2000 |
| 6099686 |
Wet processing system |
Aug. 8, 2000 |
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