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Class Information
Number: 118/50
Name: Coating apparatus > With vacuum or fluid pressure chamber
Description: Coating apparatus combined with a chamber or housing in contact with at least a portion of the work, which chamber or housing has means for inducing a pressure therein other than atmospheric.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6007634 |
Vapor deposition apparatus |
Dec. 28, 1999 |
| 6007632 |
System and method for impregnating a moving porous substrate with active materials to produce battery electrodes |
Dec. 28, 1999 |
| 5997642 |
Method and apparatus for misted deposition of integrated circuit quality thin films |
Dec. 7, 1999 |
| 5993556 |
Vacuum treatment system for depositing thin coatings |
Nov. 30, 1999 |
| 5993547 |
Edge rinse mechanism for removing a peripheral portion of a resist film formed on a wafer |
Nov. 30, 1999 |
| 5993546 |
Apparatus for forming a solid thin film from a layer of liquid material without void |
Nov. 30, 1999 |
| 5976256 |
Film coating apparatus |
Nov. 2, 1999 |
| 5976249 |
Varnishing head |
Nov. 2, 1999 |
| 5972435 |
Method for forming film by plasma polymerization and apparatus for forming film by plasma polymerization |
Oct. 26, 1999 |
| 5973295 |
Heated tool positioned in the X,Y, and 2-directions for depositing fine lines on a substrate |
Oct. 26, 1999 |
| 5962085 |
Misted precursor deposition apparatus and method with improved mist and mist flow |
Oct. 5, 1999 |
| 5958134 |
Process equipment with simultaneous or sequential deposition and etching capabilities |
Sep. 28, 1999 |
| 5939151 |
Method and apparatus for reactive plasma atomization |
Aug. 17, 1999 |
| 5928390 |
Vertical processing apparatus |
Jul. 27, 1999 |
| 5888302 |
Suction system for use in a method of lining the internal surface of a pipe |
Mar. 30, 1999 |
| 5869139 |
Apparatus and method for plating pin grid array packaging modules |
Feb. 9, 1999 |
| 5866210 |
Method for coating a substrate |
Feb. 2, 1999 |
| 5863842 |
Vacuum exhausting apparatus, semiconductor manufacturing apparatus, and vacuum processing method |
Jan. 26, 1999 |
| 5851592 |
Apparatus and method for applying coating materials to individual sheet members |
Dec. 22, 1998 |
| 5843231 |
Apparatus for bubble stripping and coating a fiber |
Dec. 1, 1998 |
| 5840125 |
Rapid thermal heating apparatus including a substrate support and an external drive to rotate the same |
Nov. 24, 1998 |
| 5820947 |
Plasma processing method and apparatus |
Oct. 13, 1998 |
| 5817366 |
Method for manufacturing organic electroluminescent element and apparatus therefor |
Oct. 6, 1998 |
| 5788769 |
Evaporator boat for an apparatus for coating substrates |
Aug. 4, 1998 |
| 5770267 |
Method and apparatus for smoothing substrate surfaces |
Jun. 23, 1998 |
| 5755881 |
Apparatus for removing material from a coated moving web and coating apparatus using such apparatus |
May. 26, 1998 |
| 5738917 |
Process for in-situ deposition of a Ti/TiN/Ti aluminum underlayer |
Apr. 14, 1998 |
| 5721012 |
Method for continuously coating particulate material |
Feb. 24, 1998 |
| 5720811 |
Apparatus for the wet-paint spray painting of articles |
Feb. 24, 1998 |
| 5707451 |
Method and apparatus for cleaning a throttle valve |
Jan. 13, 1998 |
| 5707687 |
Rotary-cup coating apparatus and method of coating object with such rotary-cup coating apparatus |
Jan. 13, 1998 |
| 5700322 |
Continuous hot melt adhesive applicator |
Dec. 23, 1997 |
| 5693145 |
Apparatus of formation of chemically amplified resist pattern |
Dec. 2, 1997 |
| 5686146 |
Method of and apparatus for injecting treating-liquid into wood material and porous inorganic material, and method for destroying ray parenchyma cell walls and aspirated pit pair |
Nov. 11, 1997 |
| 5676757 |
Decompression container |
Oct. 14, 1997 |
| 5670218 |
Method for forming ferroelectric thin film and apparatus therefor |
Sep. 23, 1997 |
| 5665444 |
Tube-shaped film having its inner peripheral surface treated, method for treating inner peripheral surface of tube-shaped film and apparatus therefor |
Sep. 9, 1997 |
| 5658382 |
Arrangement for painting an extended object continuously in its longitudinal direction |
Aug. 19, 1997 |
| 5656092 |
Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter |
Aug. 12, 1997 |
| 5651868 |
Method and apparatus for coating thin film data storage disks |
Jul. 29, 1997 |
| 5652022 |
Method and apparatus for the production of metal-free areas during metal vapor deposition |
Jul. 29, 1997 |
| 5648175 |
Chemical vapor deposition reactor system and integrated circuit |
Jul. 15, 1997 |
| 5641358 |
Modular parylene deposition apparatus having vapor deposition chamber extension |
Jun. 24, 1997 |
| 5618587 |
Vacuum rig apparatus |
Apr. 8, 1997 |
| 5618584 |
Method and apparatus for damping a paper web |
Apr. 8, 1997 |
| 5614265 |
In-line coating of steel tubing |
Mar. 25, 1997 |
| 5611858 |
Apparatus for transporting discoidal substrates in a vacuum coating apparatus |
Mar. 18, 1997 |
| 5608943 |
Apparatus for removing process liquid |
Mar. 11, 1997 |
| 5597624 |
Method and apparatus for coating dielectrics |
Jan. 28, 1997 |
| 5597609 |
Process and apparatus for the continuous or semi-continuous coating of eyeglass lenses |
Jan. 28, 1997 |
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