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Class Information
Number: 118/50
Name: Coating apparatus > With vacuum or fluid pressure chamber
Description: Coating apparatus combined with a chamber or housing in contact with at least a portion of the work, which chamber or housing has means for inducing a pressure therein other than atmospheric.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6858088 |
Method and apparatus for treating substrates |
Feb. 22, 2005 |
| 6846360 |
Apparatus and method for bubble-free application of a resin to a substrate |
Jan. 25, 2005 |
| 6843809 |
Vacuum/purge operation of loadlock chamber and method of transferring a wafer using said operation |
Jan. 18, 2005 |
| 6843852 |
Apparatus and method for electroless spray deposition |
Jan. 18, 2005 |
| 6830619 |
Method and apparatus for controlling a temperature of a microelectronic substrate |
Dec. 14, 2004 |
| 6828235 |
Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatus |
Dec. 7, 2004 |
| 6824616 |
Substrate processing method and substrate processing system |
Nov. 30, 2004 |
| 6824615 |
Resonant sensor for dip |
Nov. 30, 2004 |
| 6802903 |
Apparatus for applying adhesive to tubing |
Oct. 12, 2004 |
| 6783797 |
Device for collectively filling blind cavities |
Aug. 31, 2004 |
| 6783598 |
Moisture barrier sealing of fiber optic coils |
Aug. 31, 2004 |
| 6780245 |
Method and apparatus of producing thin film of metal or metal compound |
Aug. 24, 2004 |
| 6773510 |
Substrate processing unit |
Aug. 10, 2004 |
| 6761769 |
Apparatus for applying viscous material |
Jul. 13, 2004 |
| 6749906 |
Thermal physical vapor deposition apparatus with detachable vapor source(s) and method |
Jun. 15, 2004 |
| 6749900 |
Method and apparatus for low-pressure pulsed coating |
Jun. 15, 2004 |
| 6743478 |
Curtain coater and method for curtain coating |
Jun. 1, 2004 |
| 6730171 |
Nozzle apparatus having a scraper for the application of the foam treatment of tissue webs |
May. 4, 2004 |
| 6727194 |
Wafer batch processing system and method |
Apr. 27, 2004 |
| 6719844 |
Deposition method, deposition apparatus, and pressure-reduction drying apparatus |
Apr. 13, 2004 |
| 6708873 |
Apparatus and method for filling high aspect ratio via holes in electronic substrates |
Mar. 23, 2004 |
| 6695914 |
System for processing a workpiece |
Feb. 24, 2004 |
| 6694914 |
Air unit for the removal of particulate material |
Feb. 24, 2004 |
| 6688365 |
Method for transferring of organic material from a donor to form a layer in an OLED device |
Feb. 10, 2004 |
| 6673151 |
Substrate processing apparatus |
Jan. 6, 2004 |
| 6660088 |
Pressure infiltrating apparatus for infiltrating fiber bundle with metal |
Dec. 9, 2003 |
| 6656279 |
Apparatus for the spray treatment of printed circuit boards |
Dec. 2, 2003 |
| 6656281 |
Substrate processing apparatus and substrate processing method |
Dec. 2, 2003 |
| 6620252 |
Metallization module for cathode-ray tube (CRT) applications |
Sep. 16, 2003 |
| 6620251 |
Substrate processing method and substrate processing apparatus |
Sep. 16, 2003 |
| 6620247 |
Thin polycrystalline silicon film forming apparatus |
Sep. 16, 2003 |
| 6616758 |
Method and apparatus for spin coating |
Sep. 9, 2003 |
| 6613386 |
Apparatus and method for direct or indirect application of a liquid or pasty medium onto a traveling material web |
Sep. 2, 2003 |
| 6613148 |
Method and apparatus for applying highly viscous liquid to substrate |
Sep. 2, 2003 |
| 6599364 |
Applicator |
Jul. 29, 2003 |
| 6599366 |
Substrate processing unit and processing method |
Jul. 29, 2003 |
| 6589338 |
Device for processing substrate |
Jul. 8, 2003 |
| 6589339 |
Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film |
Jul. 8, 2003 |
| 6576296 |
Web coating method and apparatus for continuous coating over splices |
Jun. 10, 2003 |
| 6573201 |
Method and apparatus for protection of substrate surface |
Jun. 3, 2003 |
| 6565656 |
Coating processing apparatus |
May. 20, 2003 |
| 6561796 |
Method of semiconductor wafer heating to prevent bowing |
May. 13, 2003 |
| 6544590 |
Liquid coating method, apparatus and film-forming method for producing the same employing excess coating removing unit having absorbent fabric on porous structure |
Apr. 8, 2003 |
| 6544338 |
Inverted hot plate cure module |
Apr. 8, 2003 |
| 6544336 |
Apparatus for a high efficiency spray system |
Apr. 8, 2003 |
| 6530340 |
Apparatus for manufacturing planar spin-on films |
Mar. 11, 2003 |
| 6527860 |
Substrate processing apparatus |
Mar. 4, 2003 |
| 6524388 |
Coating apparatus with a rotatable backing rolling and method thereof |
Feb. 25, 2003 |
| 6514348 |
Substrate processing apparatus |
Feb. 4, 2003 |
| 6503079 |
Substrate processing apparatus and method for manufacturing semiconductor device |
Jan. 7, 2003 |
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