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Class Information
Number: 118/50
Name: Coating apparatus > With vacuum or fluid pressure chamber
Description: Coating apparatus combined with a chamber or housing in contact with at least a portion of the work, which chamber or housing has means for inducing a pressure therein other than atmospheric.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7452568 |
Centrifugal method for filing high aspect ratio blind micro vias with powdered materials for circuit formation |
Nov. 18, 2008 |
| 7438763 |
Coating apparatus and method having a slide bead coater and liquid drop applicator |
Oct. 21, 2008 |
| 7410542 |
Variable environment, scale-able, roll to roll system and method for manufacturing thin film electronics on flexible substrates |
Aug. 12, 2008 |
| 7399708 |
Method of treating a composite spin-on glass/anti-reflective material prior to cleaning |
Jul. 15, 2008 |
| 7393414 |
Methods and systems for processing a microelectronic topography |
Jul. 1, 2008 |
| 7384484 |
Substrate processing method, substrate processing apparatus and substrate processing system |
Jun. 10, 2008 |
| 7384662 |
Through structure of connecting line at gastight chamber, and ejection system incorporating same; method of manufacturing LCD device, organic EL device, electron emitting device, PDP device, e |
Jun. 10, 2008 |
| 7357842 |
Cluster tool architecture for processing a substrate |
Apr. 15, 2008 |
| 7341633 |
Apparatus for electroless deposition |
Mar. 11, 2008 |
| 7323054 |
Apparatus for coating a monolith support |
Jan. 29, 2008 |
| 7278831 |
Apparatus and method for control, pumping and abatement for vacuum process chambers |
Oct. 9, 2007 |
| 7258746 |
Coating apparatus for segments of cylindrical substrates |
Aug. 21, 2007 |
| 7252854 |
Method and apparatus for applying a gel |
Aug. 7, 2007 |
| 7241339 |
Method and apparatus for applying a gel |
Jul. 10, 2007 |
| 7238241 |
Method of producing high aspect ratio domes by vapor deposition |
Jul. 3, 2007 |
| 7179504 |
Substrate processing method and substrate processing system |
Feb. 20, 2007 |
| 7175710 |
Apparatus for stripping a boundary air layer from a traveling web |
Feb. 13, 2007 |
| 7160393 |
Vacuum chamber assembly |
Jan. 9, 2007 |
| 7156921 |
Method and apparatus for chemical vapor deposition capable of preventing contamination and enhancing film growth rate |
Jan. 2, 2007 |
| 7141118 |
Apparatus and method for treating and impregnating porous structures |
Nov. 28, 2006 |
| 7138014 |
Electroless deposition apparatus |
Nov. 21, 2006 |
| 7112348 |
Coating method and apparatus |
Sep. 26, 2006 |
| 7105056 |
Pneumatic handling and recoating apparatus and method of use |
Sep. 12, 2006 |
| 7101592 |
Method and apparatus for curtain coating |
Sep. 5, 2006 |
| 7101155 |
Vacuum pumping system and method of controlling the same |
Sep. 5, 2006 |
| 7101442 |
Reaction apparatus |
Sep. 5, 2006 |
| 7022189 |
Vacuum painting head and relative painting method |
Apr. 4, 2006 |
| 7018474 |
Coating apparatus |
Mar. 28, 2006 |
| 7017637 |
Thin film forming apparatus and thin film forming method |
Mar. 28, 2006 |
| 6987162 |
Method and apparatus of producing high-density polyimide (HPI) film |
Jan. 17, 2006 |
| 6966949 |
Apparatus and method for drying under reduced pressure, and coating film forming apparatus |
Nov. 22, 2005 |
| 6949474 |
Method of manufacturing a semiconductor device and a semiconductor manufacture system |
Sep. 27, 2005 |
| 6932868 |
Coating film forming apparatus |
Aug. 23, 2005 |
| 6910441 |
Pressure regulating system of plasma processing equipment |
Jun. 28, 2005 |
| 6896733 |
Coating device for an elongated workpiece |
May. 24, 2005 |
| 6893682 |
Method and device for single-or double-sided application |
May. 17, 2005 |
| 6890588 |
Method and apparatus for applying a gel |
May. 10, 2005 |
| 6887312 |
Applicator |
May. 3, 2005 |
| 6881264 |
Configuration and a method for reducing contamination with particles on a substrate in a process tool |
Apr. 19, 2005 |
| 6881266 |
Apparatus and method for coating pipes |
Apr. 19, 2005 |
| 6881268 |
Method and apparatus for forming required gas atmosphere |
Apr. 19, 2005 |
| 6860944 |
Microelectronic fabrication system components and method for processing a wafer using such components |
Mar. 1, 2005 |
| 6858088 |
Method and apparatus for treating substrates |
Feb. 22, 2005 |
| 6846360 |
Apparatus and method for bubble-free application of a resin to a substrate |
Jan. 25, 2005 |
| 6843809 |
Vacuum/purge operation of loadlock chamber and method of transferring a wafer using said operation |
Jan. 18, 2005 |
| 6843852 |
Apparatus and method for electroless spray deposition |
Jan. 18, 2005 |
| 6830619 |
Method and apparatus for controlling a temperature of a microelectronic substrate |
Dec. 14, 2004 |
| 6828235 |
Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatus |
Dec. 7, 2004 |
| 6824616 |
Substrate processing method and substrate processing system |
Nov. 30, 2004 |
| 6824615 |
Resonant sensor for dip |
Nov. 30, 2004 |
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