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Class Information
Number: 118/50.1
Name: Coating apparatus > With vacuum or fluid pressure chamber > With means to apply electrical and/or radiant energy to work and/or coating material
Description: Apparatus combined with means to treat the work and/or coating material with electrical and/or radiant energy.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6288367 Method and apparatus for performing thermal reflow operations under high gravity conditions Sep. 11, 2001
6284051 Cooled window Sep. 4, 2001
6281511 Apparatus for forming materials Aug. 28, 2001
6262393 Epitaxial growth furnace Jul. 17, 2001
6237525 Apparatus for coating a paper or board web May. 29, 2001
6225602 Vertical furnace for the treatment of semiconductor substrates May. 1, 2001
6216631 Robotic manipulation system utilizing patterned granular motion Apr. 17, 2001
6203619 Multiple station apparatus for liquid source fabrication of thin films Mar. 20, 2001
6203858 Method and system for coating a web Mar. 20, 2001
6188044 High-performance energy transfer system and method for thermal processing applications Feb. 13, 2001
6179031 Process for the adhesion of a flat plastic substrate in the form of a circular disk to a like second substrate for a digital video disc and apparatus for implementation of the process Jan. 30, 2001
6159873 Method for producing semiconductor device and production apparatus of semiconductor device Dec. 12, 2000
6126752 Semiconductor device having capacitor and manufacturing apparatus thereof Oct. 3, 2000
6121581 Semiconductor processing system Sep. 19, 2000
6117771 Method for depositing cobalt Sep. 12, 2000
6116184 Method and apparatus for misted liquid source deposition of thin film with reduced mist particle size Sep. 12, 2000
6106663 Semiconductor process chamber electrode Aug. 22, 2000
6098637 In situ cleaning of the surface inside a vacuum processing chamber Aug. 8, 2000
6096998 Method and apparatus for performing thermal reflow operations under high gravity conditions Aug. 1, 2000
6093911 Vacuum heating furnace with tapered portion Jul. 25, 2000
6090210 Multi-zone gas flow control in a process chamber Jul. 18, 2000
6068728 Laser texturing with reverse lens focusing system May. 30, 2000
6064800 Apparatus for uniform gas and radiant heat dispersion for solid state fabrication processes May. 16, 2000
6043450 Method to compensate for non-uniform film growth during chemical vapor deposition Mar. 28, 2000
6039806 Precision thickness optical coating system and method of operation thereof Mar. 21, 2000
6035100 Reflector cover for a semiconductor processing chamber Mar. 7, 2000
6021738 Carriage electrode contact system used in coating objects by vacuum deposit Feb. 8, 2000
6018616 Thermal cycling module and process using radiant heat Jan. 25, 2000
6007633 Single-substrate-processing apparatus in semiconductor processing system Dec. 28, 1999
6005225 Thermal processing apparatus Dec. 21, 1999
6002109 System and method for thermal processing of a semiconductor substrate Dec. 14, 1999
5997642 Method and apparatus for misted deposition of integrated circuit quality thin films Dec. 7, 1999
5989654 Method for manufacturing an optical information recording medium Nov. 23, 1999
5962085 Misted precursor deposition apparatus and method with improved mist and mist flow Oct. 5, 1999
5948168 Distributed microwave plasma reactor for semiconductor processing Sep. 7, 1999
5895594 Method and device for heating carrier bodies Apr. 20, 1999
5878191 Heat treatment apparatus for semiconductor wafers Mar. 2, 1999
5870526 Inflatable elastomeric element for rapid thermal processing (RTP) system Feb. 9, 1999
5863327 Apparatus for forming materials Jan. 26, 1999
5861060 Supply tank for electrostatic spraying system Jan. 19, 1999
5861609 Method and apparatus for rapid thermal processing Jan. 19, 1999
5850071 Substrate heating equipment for use in a semiconductor fabricating apparatus Dec. 15, 1998
5840125 Rapid thermal heating apparatus including a substrate support and an external drive to rotate the same Nov. 24, 1998
5833752 Manifold system Nov. 10, 1998
5833820 Electroplating apparatus Nov. 10, 1998
5803973 Apparatus for coating a substrate by chemical vapor deposition Sep. 8, 1998
5798139 Apparatus for and method of manufacturing plastic container coated with carbon film Aug. 25, 1998
5779802 Thin film deposition chamber with ECR-plasma source Jul. 14, 1998
5759334 Plasma processing apparatus Jun. 2, 1998
5755888 Method and apparatus of forming thin films May. 26, 1998

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