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Class Information
Number: 118/50.1
Name: Coating apparatus > With vacuum or fluid pressure chamber > With means to apply electrical and/or radiant energy to work and/or coating material
Description: Apparatus combined with means to treat the work and/or coating material with electrical and/or radiant energy.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8669496 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Mar. 11, 2014
8658947 Rapid conductive cooling using a secondary process plane Feb. 25, 2014
8624165 Heat treatment apparatus for heating substrate by irradiating substrate with flashes of light Jan. 7, 2014
8618442 Nozzle housing assembly Dec. 31, 2013
8618446 Substrate support with substrate heater and symmetric RF return Dec. 31, 2013
8584612 UV lamp assembly of degas chamber having rotary shutters Nov. 19, 2013
8552346 Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber Oct. 8, 2013
8528497 Drop discharge apparatus, method for forming pattern and method for manufacturing semiconductor device Sep. 10, 2013
8513574 Heat treatment apparatus emitting flash of light Aug. 20, 2013
8475596 Apparatus to process coating material using flame nozzle and evaporation deposition device having same Jul. 2, 2013
8415770 Apparatus and methods for uniform metal plating Apr. 9, 2013
8393289 Laser assisted nano deposition Mar. 12, 2013
8357878 UV LED based lamp for compact UV curing lamp assemblies Jan. 22, 2013
8346068 Substrate rotating and oscillating apparatus for rapid thermal process Jan. 1, 2013
8294068 Rapid thermal processing lamphead with improved cooling Oct. 23, 2012
8227729 Rapid conductive cooling using a secondary process plane Jul. 24, 2012
8222570 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Jul. 17, 2012
8217313 Heating apparatus and heating method Jul. 10, 2012
8183502 Mounting table structure and heat treatment apparatus May. 22, 2012
8176869 Spray applicating process and production assembly for manufacturing a pallet May. 15, 2012
8158911 Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member Apr. 17, 2012
8138451 Heating device for heating semiconductor wafers in thermal processing chambers Mar. 20, 2012
8129663 Vacuum heating apparatus Mar. 6, 2012
8117985 Laser cladding device with an improved nozzle Feb. 21, 2012
8115141 Heating element Feb. 14, 2012
8110780 Photoirradiation type heat treatment apparatus Feb. 7, 2012
8089031 Heating apparatus for heating objects to be heated, heating method for heating the objects to be heated, and storage medium in which computer-readable program is stored Jan. 3, 2012
8082876 Manufacturing method of OLED display and apparatus for manufacturing the OLED display Dec. 27, 2011
8080767 Thermal processing apparatus and thermal processing method for object to be processed Dec. 20, 2011
8076615 Substrate processing apparatus and method of manufacturing semiconductor device Dec. 13, 2011
8028646 Coating medical devices Oct. 4, 2011
7985945 Method for reducing stray light in a rapid thermal processing chamber by polarization Jul. 26, 2011
7973266 Heat treatment apparatus which emits flash of light Jul. 5, 2011
7960254 Manufacturing method for epitaxial wafer Jun. 14, 2011
7952054 Heating element May. 31, 2011
7879400 Substrate processing apparatus, method of manufacturing a semiconductor device, and method of forming a thin film on metal surface Feb. 1, 2011
7847218 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Dec. 7, 2010
7812286 Rapid conductive cooling using a secondary process plane Oct. 12, 2010
7785419 Epitaxial apparatus Aug. 31, 2010
7778533 Semiconductor thermal process control Aug. 17, 2010
7758928 Functionalisation of particles Jul. 20, 2010
7745762 Optimizing the thermal budget during a pulsed heating process Jun. 29, 2010
7737385 Selective reflectivity process chamber with customized wavelength response and method Jun. 15, 2010
7732739 Substrate heat treatment apparatus and substrate transfer tray used in substrate heat treatment Jun. 8, 2010
7723649 Vacuum thermal annealer May. 25, 2010
7718926 Film deposition apparatus, film deposition method, monitoring program for film deposition apparatus, and recording medium thereof May. 18, 2010
7683291 Substrate processing method and manufacturing method of semiconductor device Mar. 23, 2010
7643736 Apparatus and method for manufacturing semiconductor devices Jan. 5, 2010
7616872 Temperature measurement and heat-treating methods and systems Nov. 10, 2009
7612346 Non-axisymmetric charged-particle beam system Nov. 3, 2009

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