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Class Information
Number: 117/92
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Forming from vapor or gaseous state (e.g., vpe, sublimation) > With decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., cvd) > Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) > Using an energy beam or field, a particle beam or field, or a plasma (e.g., ionization, pecvd, cbe, mombe, rf induction, laser)
Description: Subject matter in which the process utilizes a particle beam or an energy beam or a particle field or an energy field or a plasma.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7621998 |
Single crystalline gallium nitride thick film having reduced bending deformation |
Nov. 24, 2009 |
| 7601216 |
Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof |
Oct. 13, 2009 |
| 7601217 |
Method of fabricating an epitaxially grown layer |
Oct. 13, 2009 |
| 7560658 |
Method for forming nanoscale features |
Jul. 14, 2009 |
| 7553372 |
Method of growing semiconductor crystal |
Jun. 30, 2009 |
| 7553369 |
Method of altering the properties of a thin film and substrate implementing said method |
Jun. 30, 2009 |
| 7547360 |
Reduction of carbon inclusions in sublimation grown SiC single crystals |
Jun. 16, 2009 |
| 7514342 |
Method and apparatus for forming deposited film |
Apr. 7, 2009 |
| 7507288 |
Highly anisotropic ceramic thermal barrier coating materials and related composites |
Mar. 24, 2009 |
| 7488386 |
Atomic layer deposition methods and chemical vapor deposition methods |
Feb. 10, 2009 |
| 7485349 |
Thin film forming method |
Feb. 3, 2009 |
| 7481880 |
Mask and method for crystallizing amorphous silicon |
Jan. 27, 2009 |
| 7459025 |
Methods for transferring a layer onto a substrate |
Dec. 2, 2008 |
| 7459026 |
Light irradiation apparatus, crystallization apparatus, crystallization method and device |
Dec. 2, 2008 |
| 7442252 |
Method for producing single crystal of multi-element oxide single crystal containing bismuth as constituting element |
Oct. 28, 2008 |
| 7439197 |
Method of fabricating a capacitor |
Oct. 21, 2008 |
| 7438790 |
Electrode for electrolysis and process for producing the same |
Oct. 21, 2008 |
| 7431964 |
Method of forming a porous metal catalyst on a substrate for nanotube growth |
Oct. 7, 2008 |
| 7427556 |
Method to planarize and reduce defect density of silicon germanium |
Sep. 23, 2008 |
| 7419546 |
Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof |
Sep. 2, 2008 |
| 7416604 |
Nitride crystal, nitride crystal substrate, epilayer-containing nitride crystal substrate, semiconductor device and method of manufacturing the same |
Aug. 26, 2008 |
| 7410676 |
Chemical vapor deposition method |
Aug. 12, 2008 |
| 7404858 |
Method for epitaxial growth of silicon carbide |
Jul. 29, 2008 |
| 7402206 |
Method of synthesizing a compound of the formula M.sub.n+1AX.sub.n, film of the compound and its use |
Jul. 22, 2008 |
| 7399357 |
Atomic layer deposition using multilayers |
Jul. 15, 2008 |
| 7396409 |
Acicular silicon crystal and process for producing the same |
Jul. 8, 2008 |
| 7387678 |
GaN substrate and method of fabricating the same, nitride semiconductor device and method of fabricating the same |
Jun. 17, 2008 |
| 7374617 |
Atomic layer deposition methods and chemical vapor deposition methods |
May. 20, 2008 |
| 7361221 |
Light irradiation apparatus, crystallization apparatus, crystallization method, semiconductor device and light modulation element |
Apr. 22, 2008 |
| 7341628 |
Method to reduce crystal defects particularly in group III-nitride layers and substrates |
Mar. 11, 2008 |
| 7338582 |
Method for manufacturing manganese oxide nanostructure and oxygen reduction electrode using said manganese oxide nanostructure |
Mar. 4, 2008 |
| 7332030 |
Method of treating a part in order to alter at least one of the properties thereof |
Feb. 19, 2008 |
| 7291218 |
Method of fabricating orientation film for liquid crystal display device |
Nov. 6, 2007 |
| 7288153 |
Method of fabricating orientation film for crystal display device |
Oct. 30, 2007 |
| 7255746 |
Nitrogen sources for molecular beam epitaxy |
Aug. 14, 2007 |
| 7238232 |
Growth of textured gallium nitride thin films on polycrystalline substrates |
Jul. 3, 2007 |
| 7235131 |
Method for forming a single crystalline film |
Jun. 26, 2007 |
| 7235130 |
Apparatus and method for diamond production |
Jun. 26, 2007 |
| 7229500 |
Methods and devices for high throughput crystallization |
Jun. 12, 2007 |
| 7229501 |
Silicon epitaxial wafer and process for manufacturing the same |
Jun. 12, 2007 |
| 7223306 |
Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device |
May. 29, 2007 |
| 7217324 |
Method and device for producing an electronic GaAs detector for x-ray detection for imaging |
May. 15, 2007 |
| 7215456 |
Method for patterning self-assembled colloidal photonic crystals and method for fabricating 3-dimensional photonic crystal waveguides of an inverted-opal structure using the patterning method |
May. 8, 2007 |
| 7194801 |
Thin-film battery having ultra-thin electrolyte and associated method |
Mar. 27, 2007 |
| 7189287 |
Atomic layer deposition using electron bombardment |
Mar. 13, 2007 |
| 7182811 |
Semiconductor light emitting device and method for producing the same |
Feb. 27, 2007 |
| 7150789 |
Atomic layer deposition methods |
Dec. 19, 2006 |
| 7141115 |
Method of producing silicon-germanium-on-insulator material using unstrained Ge-containing source layers |
Nov. 28, 2006 |
| 7141116 |
Method for manufacturing a silicon structure |
Nov. 28, 2006 |
| 7135071 |
Fractal structure and method of forming it |
Nov. 14, 2006 |
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