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Class Information
Number: 117/913
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Graphoepitaxy or surface modification to enhance epitaxy
Description: A collection of art which discloses modifying the surface of an epitaxy* substrate* to enhance or improve the growth or the product.


Patents under this class:
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Patent Number Title Of Patent Date Issued
6958093 Free-standing (Al, Ga, In)N and parting method for forming same Oct. 25, 2005
6752868 Layer-by-layer assembly of photonic crystals Jun. 22, 2004
6656271 Method of manufacturing semiconductor wafer method of using and utilizing the same Dec. 2, 2003
6270573 Silicon carbide substrate, and method for producing the substrate, and semiconductor device utilizing the substrate Aug. 7, 2001
6165265 Method of deposition of a single-crystal silicon region Dec. 26, 2000
6146457 Thermal mismatch compensation to produce free standing substrates by epitaxial deposition Nov. 14, 2000
6110278 Methods for and products of growth of single-crystal on arrayed nucleation sites (SCANS) defined in nucleation unfriendly substrates Aug. 29, 2000
6103019 Advanced technique to grow single crystal films on amorphous and/or non-single crystal surfaces Aug. 15, 2000
6096129 Method of and apparatus for producing single-crystalline diamond of large size Aug. 1, 2000
6036773 Method for growing Group III atomic layer Mar. 14, 2000
5948162 Method for forming SOI structure Sep. 7, 1999
5919305 Elimination of thermal mismatch defects in epitaxially deposited films through the separation of the substrate from the film at the growth temperature Jul. 6, 1999
5865888 Semiconductor device epitaxial layer lateral growth rate control method using CBr.sub.4 Feb. 2, 1999
5861058 Composite structure and method for the production thereof Jan. 19, 1999
5817174 Semiconductor substrate and method of treating semiconductor substrate Oct. 6, 1998
5746826 Method and apparatus for forming microstructure body May. 5, 1998
5741360 Method of growing a crystal of a compound semiconductor at a low temperature Apr. 21, 1998
5738720 Method of manufacturing microstructure pattern of molecular material high orientation aggregate with the aid of difference of growth rate by substrate material Apr. 14, 1998
5718761 Method of forming crystalline compound semiconductor film Feb. 17, 1998
5676752 Method of producing sheets of crystalline material and devices made therefrom Oct. 14, 1997
5656539 Method of fabricating a semiconductor laser Aug. 12, 1997
5632812 Diamond electronic device and process for producing the same May. 27, 1997
5591666 Semiconductor device and method of fabrication Jan. 7, 1997
5588994 Method of producing sheets of crystalline material and devices made therefrom Dec. 31, 1996
5582641 Crystal article and method for forming same Dec. 10, 1996
5531182 Method of making a semiconductor thin-film Jul. 2, 1996
5518953 Method for manufacturing semiconductor device having grown layer on insulating layer May. 21, 1996
5482002 Microprobe, preparation thereof and electronic device by use of said microprobe Jan. 9, 1996
5447117 Crystal article, method for producing the same and semiconductor device utilizing the same Sep. 5, 1995
5445108 Process and apparatus for the crystallization of a melt Aug. 29, 1995
5427055 Method for controlling roughness on surface of monocrystal Jun. 27, 1995
5425808 Process for selective formation of III-IV group compound film Jun. 20, 1995
5422302 Method for producing a three-dimensional semiconductor device Jun. 6, 1995
5373803 Method of epitaxial growth of semiconductor Dec. 20, 1994
5363799 Method for growth of crystal Nov. 15, 1994
5363800 Process for the controlled growth of single-crystal films of silicon carbide polytypes on silicon carbide wafers Nov. 15, 1994
5364815 Crystal articles and method for forming the same Nov. 15, 1994
5326721 Method of fabricating high-dielectric constant oxides on semiconductors using a GE buffer layer Jul. 5, 1994
5318661 Process for growing crystalline thin film Jun. 7, 1994
5310696 Chemical method for the modification of a substrate surface to accomplish heteroepitaxial crystal growth May. 10, 1994
5228948 Method for fabricating recrystallized semiconductor film Jul. 20, 1993
5219769 Method for forming Schottky diode Jun. 15, 1993
5205900 Method of monitoring surface roughness of crystal, and crystal growth equipment Apr. 27, 1993
5198070 Joining diamond bodies Mar. 30, 1993
5196366 Method of manufacturing electric devices Mar. 23, 1993
5118365 II-IV group compound crystal article and process for producing same Jun. 2, 1992
5098850 Process for producing substrate for selective crystal growth, selective crystal growth process and process for producing solar battery by use of them Mar. 24, 1992
5087296 Solar battery and process for preparing same Feb. 11, 1992
5075238 Detector interface device Dec. 24, 1991
5039626 Method for heteroepitaxial growth of a two-dimensional material on a three-dimensional material Aug. 13, 1991

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