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Class Information
Number: 117/86
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Forming from vapor or gaseous state (e.g., vpe, sublimation) > With a step of measuring, testing, or sensing > With responsive control
Description: Subject matter further including a step of controlling a specified parameter or condition in response to the measured, tested, or sensed condition or parameter.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7621998 |
Single crystalline gallium nitride thick film having reduced bending deformation |
Nov. 24, 2009 |
| 7604697 |
Heteroepitaxial growth method for gallium nitride |
Oct. 20, 2009 |
| 7597757 |
ZnO film with C-axis orientation |
Oct. 6, 2009 |
| 7582161 |
Atomic layer deposited titanium-doped indium oxide films |
Sep. 1, 2009 |
| 7572331 |
Method of manufacturing a wafer |
Aug. 11, 2009 |
| 7563321 |
Process for producing high quality large size silicon carbide crystals |
Jul. 21, 2009 |
| 7553368 |
Process for manufacturing a gallium rich gallium nitride film |
Jun. 30, 2009 |
| 7540918 |
Atomic layer deposition equipment and method |
Jun. 2, 2009 |
| 7524370 |
Nanostructure and manufacturing method for same |
Apr. 28, 2009 |
| 7507293 |
Photonic crystals with nanowire-based fabrication |
Mar. 24, 2009 |
| 7498060 |
Method for controlling at nanometric scale the growth of thin films of conjugated organic molecules |
Mar. 3, 2009 |
| 7497905 |
Ternary nitride-based buffer layer of a nitride-based light-emitting device and a method for manufacturing the same |
Mar. 3, 2009 |
| 7473315 |
Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate and method of producing Al.sub.xIn.sub.yGa.sub.1-x-yN mixture |
Jan. 6, 2009 |
| 7462239 |
Low temperature load and bake |
Dec. 9, 2008 |
| 7459024 |
Method of forming an N-type doped single crystal diamond |
Dec. 2, 2008 |
| 7445671 |
Formation of metal oxide nanowire networks (nanowebs) of low-melting metals |
Nov. 4, 2008 |
| 7427556 |
Method to planarize and reduce defect density of silicon germanium |
Sep. 23, 2008 |
| 7402207 |
Method and apparatus for controlling the thickness of a selective epitaxial growth layer |
Jul. 22, 2008 |
| 7399356 |
Method for preparation of ferroelectric single crystal film structure using deposition method |
Jul. 15, 2008 |
| 7396410 |
Featuring forming methods to reduce stacking fault nucleation sites |
Jul. 8, 2008 |
| 7377976 |
Method for growing thin oxide films |
May. 27, 2008 |
| 7377977 |
High-purity crystal growth |
May. 27, 2008 |
| 7368014 |
Variable temperature deposition methods |
May. 6, 2008 |
| 7338554 |
Method of synthesising and growing nanorods from a metal carbide on a substrate, substrates thus obtained and applications thereof |
Mar. 4, 2008 |
| 7332030 |
Method of treating a part in order to alter at least one of the properties thereof |
Feb. 19, 2008 |
| 7326293 |
Patterned atomic layer epitaxy |
Feb. 5, 2008 |
| 7323050 |
Method of producing lithium tantalate crystal |
Jan. 29, 2008 |
| 7316747 |
Seeded single crystal silicon carbide growth and resulting crystals |
Jan. 8, 2008 |
| 7311775 |
Method for heat-treating silicon wafer and silicon wafer |
Dec. 25, 2007 |
| 7306674 |
Nucleation of diamond films using higher diamondoids |
Dec. 11, 2007 |
| 7303628 |
Nanocrystals with linear and branched topology |
Dec. 4, 2007 |
| 7303629 |
Apparatus for pulling single crystal |
Dec. 4, 2007 |
| 7294200 |
Method for producing nitride semiconductor crystal, and nitride semiconductor wafer and nitride semiconductor device |
Nov. 13, 2007 |
| 7258741 |
System and method for producing synthetic diamond |
Aug. 21, 2007 |
| 7258742 |
Method of manufacturing potassium niobate single crystal thin film, surface acoustic wave element, frequency filter, frequency oscillator, electronic circuit, and electronic apparatus |
Aug. 21, 2007 |
| 7255743 |
Method of making synthetic gems comprising elements recovered from remains of a species of the kingdom animalia |
Aug. 14, 2007 |
| 7235129 |
Substrate having a zinc oxide nanowire array normal to its surface and fabrication method thereof |
Jun. 26, 2007 |
| 7211144 |
Pulsed nucleation deposition of tungsten layers |
May. 1, 2007 |
| 7201886 |
Single crystal diamond tool |
Apr. 10, 2007 |
| 7192483 |
Method for diamond coating substrates |
Mar. 20, 2007 |
| 7189287 |
Atomic layer deposition using electron bombardment |
Mar. 13, 2007 |
| 7179667 |
Semiconductor base material and method of manufacturing the material |
Feb. 20, 2007 |
| 7175709 |
Epitaxy layer and method of forming the same |
Feb. 13, 2007 |
| 7153362 |
System and method for real time deposition process control based on resulting product detection |
Dec. 26, 2006 |
| 7135073 |
Method and system for semiconductor crystal production with temperature management |
Nov. 14, 2006 |
| 7135071 |
Fractal structure and method of forming it |
Nov. 14, 2006 |
| 7115166 |
Systems and methods for forming strontium- and/or barium-containing layers |
Oct. 3, 2006 |
| 7112242 |
Manufacturing method for producing silicon carbide crystal using source gases |
Sep. 26, 2006 |
| 7101434 |
Fractal structure and its forming method |
Sep. 5, 2006 |
| 7094288 |
Method for producing a positively doped semiconductor with large forbidden band |
Aug. 22, 2006 |
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