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Class Information
Number: 117/222
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Apparatus > For crystallization from liquid or supercritical state > Having means for producing a moving solid-liquid-solid zone > Including heating or cooling details
Description: Subject matter in which temperature affecting element or means (such as RF susceptor, radiation shield or reflector, cooling coils, or heating element) is described in some detail.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7427325 |
Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby |
Sep. 23, 2008 |
| 7423242 |
Oven for non-metal melting |
Sep. 9, 2008 |
| 7419545 |
Method for producing silicon carbide (SiC) single crystal and silicon carbide (SiC) single crystal obtained by such method |
Sep. 2, 2008 |
| 7413609 |
Semiconductor single crystal manufacturing apparatus |
Aug. 19, 2008 |
| 7390361 |
Semiconductor single crystal manufacturing apparatus and graphite crucible |
Jun. 24, 2008 |
| 7314522 |
Apparatus and method for producing single crystal |
Jan. 1, 2008 |
| 7306676 |
Apparatus for manufacturing semiconductor single crystal |
Dec. 11, 2007 |
| 7294203 |
Heat shielding member of silicon single crystal pulling system |
Nov. 13, 2007 |
| 7291225 |
Heat shield and crystal growth equipment |
Nov. 6, 2007 |
| 7244309 |
Apparatus for pulling single crystal by CZ method |
Jul. 17, 2007 |
| 7232489 |
Crucible or related object holder and method of manufacture |
Jun. 19, 2007 |
| 7214574 |
Heating treatment device, heating treatment method and fabrication method of semiconductor device |
May. 8, 2007 |
| 7201801 |
Heater for manufacturing a crystal |
Apr. 10, 2007 |
| 6989059 |
Process for producing single crystal of compound semiconductor and crystal growing apparatus |
Jan. 24, 2006 |
| 6875269 |
System for increasing charge size for single crystal silicon production |
Apr. 5, 2005 |
| 6860940 |
Automated macromolecular crystallization screening |
Mar. 1, 2005 |
| 6821344 |
Czochralski pullers including heat shield housings having sloping top and bottom |
Nov. 23, 2004 |
| 6800137 |
Binary and ternary crystal purification and growth method and apparatus |
Oct. 5, 2004 |
| 6797062 |
Heat shield assembly for a crystal puller |
Sep. 28, 2004 |
| 6767400 |
Crystal growth method |
Jul. 27, 2004 |
| 6764548 |
Apparatus and method for producing silicon semiconductor single crystal |
Jul. 20, 2004 |
| 6764547 |
Crystal growth apparatus |
Jul. 20, 2004 |
| 6755910 |
Method for pulling single crystal |
Jun. 29, 2004 |
| 6740160 |
Crystal growing apparatus |
May. 25, 2004 |
| 6733585 |
Apparatus for pulling single crystal by CZ method |
May. 11, 2004 |
| 6719843 |
Powder metallurgy tungsten crucible for aluminum nitride crystal growth |
Apr. 13, 2004 |
| 6712904 |
Device for producing single crystals |
Mar. 30, 2004 |
| 6676753 |
Czochralski pullers for manufacturing monocrystalline silicon ingots, including heat shield having sloped portions |
Jan. 13, 2004 |
| 6632280 |
Apparatus for growing single crystal, method for producing single crystal utilizing the apparatus and single crystal |
Oct. 14, 2003 |
| 6620998 |
Recycling heat from industrial processes to generate electricity using a thermophotovoltaic generator |
Sep. 16, 2003 |
| 6562134 |
Crystal growing device and method of manufacturing single crystal |
May. 13, 2003 |
| 6562133 |
Crucible for growing macrocrystals |
May. 13, 2003 |
| 6423136 |
Crucible for growing macrocrystals |
Jul. 23, 2002 |
| 6423585 |
Heating treatment device, heating treatment method and fabrication method of semiconductor device |
Jul. 23, 2002 |
| 6409833 |
Insulating-containing ring-shaped heat shields and support members for Czochralski pullers |
Jun. 25, 2002 |
| 6379460 |
Thermal shield device and crystal-pulling apparatus using the same |
Apr. 30, 2002 |
| 6364947 |
Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same |
Apr. 2, 2002 |
| 6338757 |
Single crystal pull-up apparatus |
Jan. 15, 2002 |
| 6334899 |
Continuous crystal plate growth apparatus |
Jan. 1, 2002 |
| 6183556 |
Insulating and warming shield for a seed crystal and seed chuck |
Feb. 6, 2001 |
| 6153011 |
Continuous crystal plate growth process and apparatus |
Nov. 28, 2000 |
| 6146459 |
Czochralski pullers for manufacturing monocrystalline silicon ingots by controlling temperature at the center and edge of an ingot-melt interface |
Nov. 14, 2000 |
| 6132507 |
Process and device for the production of a single crystal |
Oct. 17, 2000 |
| 6099641 |
Apparatus for pulling a single crystal |
Aug. 8, 2000 |
| 6093913 |
Electrical heater for crystal growth apparatus with upper sections producing increased heating power compared to lower sections |
Jul. 25, 2000 |
| 6071339 |
Continuous crystal plate growth process and apparatus |
Jun. 6, 2000 |
| 6036776 |
Method and device for manufacturing single crystals |
Mar. 14, 2000 |
| 6007625 |
Apparatus for manufacturing single crystal |
Dec. 28, 1999 |
| 5997635 |
Method for fabricating a single-crystal semiconductor |
Dec. 7, 1999 |
| 5989341 |
Single crystal producing apparatus and a single crystal producing method using same |
Nov. 23, 1999 |
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