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Class Information
Number: 117/218
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Apparatus > For crystallization from liquid or supercritical state > Seed pulling > Including details of means providing product movement (e.g., shaft guides, servo means)
Description: Subject matter in which an element or means for providing movement of the single-crystal* product (such as pulling or rotating linkages, a pulling carriage or guide, shaft guides, servo means, or a differential gear) is described in some detail.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7588638 |
Single crystal pulling apparatus |
Sep. 15, 2009 |
| 7455731 |
Polycrystalline silicon rod and method for processing the same |
Nov. 25, 2008 |
| 7427325 |
Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby |
Sep. 23, 2008 |
| 7419545 |
Method for producing silicon carbide (SiC) single crystal and silicon carbide (SiC) single crystal obtained by such method |
Sep. 2, 2008 |
| 7413609 |
Semiconductor single crystal manufacturing apparatus |
Aug. 19, 2008 |
| 7390361 |
Semiconductor single crystal manufacturing apparatus and graphite crucible |
Jun. 24, 2008 |
| 7384480 |
Apparatus for manufacturing semiconductor single crystal |
Jun. 10, 2008 |
| 7374614 |
Method for manufacturing single crystal semiconductor |
May. 20, 2008 |
| 7344595 |
Method and apparatus for purification of crystal material and for making crystals therefrom and use of crystals obtained thereby |
Mar. 18, 2008 |
| 7323053 |
Pulling-down apparatus and container therefor |
Jan. 29, 2008 |
| 7314522 |
Apparatus and method for producing single crystal |
Jan. 1, 2008 |
| 7314523 |
Manufacturing equipment of SiC single crystal and method for manufacturing SiC single crystal |
Jan. 1, 2008 |
| 7306676 |
Apparatus for manufacturing semiconductor single crystal |
Dec. 11, 2007 |
| 7294203 |
Heat shielding member of silicon single crystal pulling system |
Nov. 13, 2007 |
| 7291225 |
Heat shield and crystal growth equipment |
Nov. 6, 2007 |
| 7282095 |
Silicon single crystal pulling method |
Oct. 16, 2007 |
| 7244309 |
Apparatus for pulling single crystal by CZ method |
Jul. 17, 2007 |
| 7232489 |
Crucible or related object holder and method of manufacture |
Jun. 19, 2007 |
| 7201801 |
Heater for manufacturing a crystal |
Apr. 10, 2007 |
| 7195671 |
Thermal shield |
Mar. 27, 2007 |
| 7160386 |
Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingot |
Jan. 9, 2007 |
| 7125450 |
Process for preparing single crystal silicon using crucible rotation to control temperature gradient |
Oct. 24, 2006 |
| 7077905 |
Apparatus for pulling a single crystal |
Jul. 18, 2006 |
| 7063743 |
Apparatus and method for pulling single crystal |
Jun. 20, 2006 |
| 7060133 |
Single crystal pulling apparatus for a metal fluoride |
Jun. 13, 2006 |
| 6989059 |
Process for producing single crystal of compound semiconductor and crystal growing apparatus |
Jan. 24, 2006 |
| 6984264 |
Single crystal pulling device and method and superconducting magnet |
Jan. 10, 2006 |
| 6977010 |
Apparatus for pulling single crystal by CZ method |
Dec. 20, 2005 |
| 6899759 |
Single crystal production method |
May. 31, 2005 |
| 6899760 |
Silicon single crystal growing furnace supplemented with low melting point dopant feeding instrument and the low melting point dopant feeding method thereof |
May. 31, 2005 |
| 6896732 |
Source material feeder apparatus for industrial crystal growth systems |
May. 24, 2005 |
| 6875269 |
System for increasing charge size for single crystal silicon production |
Apr. 5, 2005 |
| 6860940 |
Automated macromolecular crystallization screening |
Mar. 1, 2005 |
| 6835247 |
Rod replenishment system for use in single crystal silicon production |
Dec. 28, 2004 |
| 6821344 |
Czochralski pullers including heat shield housings having sloping top and bottom |
Nov. 23, 2004 |
| 6797062 |
Heat shield assembly for a crystal puller |
Sep. 28, 2004 |
| 6767400 |
Crystal growth method |
Jul. 27, 2004 |
| 6764547 |
Crystal growth apparatus |
Jul. 20, 2004 |
| 6764548 |
Apparatus and method for producing silicon semiconductor single crystal |
Jul. 20, 2004 |
| 6758901 |
Crystal support |
Jul. 6, 2004 |
| 6755910 |
Method for pulling single crystal |
Jun. 29, 2004 |
| 6740160 |
Crystal growing apparatus |
May. 25, 2004 |
| 6676753 |
Czochralski pullers for manufacturing monocrystalline silicon ingots, including heat shield having sloped portions |
Jan. 13, 2004 |
| 6673148 |
Method of using a magnetic field furnace to manufacture semiconductor substrates |
Jan. 6, 2004 |
| 6663710 |
Method for continuously pulling up crystal |
Dec. 16, 2003 |
| 6652645 |
Process for preparing a silicon melt |
Nov. 25, 2003 |
| 6648967 |
Crystal-pulling apparatus for pulling and growing a monocrystalline silicon ingot, and method therefor |
Nov. 18, 2003 |
| 6645296 |
Crystal holding apparatus |
Nov. 11, 2003 |
| 6632280 |
Apparatus for growing single crystal, method for producing single crystal utilizing the apparatus and single crystal |
Oct. 14, 2003 |
| 6579363 |
Semiconductor single crystal pulling apparatus |
Jun. 17, 2003 |
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