| |
 |
|
Class Information
Number: 117/217
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Apparatus > For crystallization from liquid or supercritical state > Seed pulling > Including heating or cooling details (e.g., shield configuration)
Description: Subject matter in which temperature affecting element or means (such as RF susceptor, radiation shield or reflector, cooling coils, or heating element) is described in some detail.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7588638 |
Single crystal pulling apparatus |
Sep. 15, 2009 |
| 7572334 |
Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application |
Aug. 11, 2009 |
| 7491270 |
Heat shield member and single crystal pulling device |
Feb. 17, 2009 |
| 7427327 |
Silica glass crucible with barium-doped inner wall |
Sep. 23, 2008 |
| 7427325 |
Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby |
Sep. 23, 2008 |
| 7423242 |
Oven for non-metal melting |
Sep. 9, 2008 |
| 7419545 |
Method for producing silicon carbide (SiC) single crystal and silicon carbide (SiC) single crystal obtained by such method |
Sep. 2, 2008 |
| 7416603 |
High quality single crystal and method of growing the same |
Aug. 26, 2008 |
| 7413609 |
Semiconductor single crystal manufacturing apparatus |
Aug. 19, 2008 |
| 7390361 |
Semiconductor single crystal manufacturing apparatus and graphite crucible |
Jun. 24, 2008 |
| 7387680 |
Method and apparatus for the production of silicon carbide crystals |
Jun. 17, 2008 |
| 7384480 |
Apparatus for manufacturing semiconductor single crystal |
Jun. 10, 2008 |
| 7374614 |
Method for manufacturing single crystal semiconductor |
May. 20, 2008 |
| 7371283 |
Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby |
May. 13, 2008 |
| 7344597 |
Vapor-phase growth apparatus |
Mar. 18, 2008 |
| 7335256 |
Silicon single crystal, and process for producing it |
Feb. 26, 2008 |
| 7326395 |
Method for producing a single crystal and silicon single crystal wafer |
Feb. 5, 2008 |
| 7314523 |
Manufacturing equipment of SiC single crystal and method for manufacturing SiC single crystal |
Jan. 1, 2008 |
| 7314522 |
Apparatus and method for producing single crystal |
Jan. 1, 2008 |
| 7306676 |
Apparatus for manufacturing semiconductor single crystal |
Dec. 11, 2007 |
| 7294203 |
Heat shielding member of silicon single crystal pulling system |
Nov. 13, 2007 |
| 7291222 |
Systems and methods for measuring and reducing dust in granular material |
Nov. 6, 2007 |
| 7291225 |
Heat shield and crystal growth equipment |
Nov. 6, 2007 |
| 7282095 |
Silicon single crystal pulling method |
Oct. 16, 2007 |
| 7244309 |
Apparatus for pulling single crystal by CZ method |
Jul. 17, 2007 |
| 7232489 |
Crucible or related object holder and method of manufacture |
Jun. 19, 2007 |
| 7211501 |
Method and apparatus for laser annealing |
May. 1, 2007 |
| 7201801 |
Heater for manufacturing a crystal |
Apr. 10, 2007 |
| 7195671 |
Thermal shield |
Mar. 27, 2007 |
| 7077905 |
Apparatus for pulling a single crystal |
Jul. 18, 2006 |
| 7067007 |
Process and device for growing single crystals |
Jun. 27, 2006 |
| 7063743 |
Apparatus and method for pulling single crystal |
Jun. 20, 2006 |
| 7060133 |
Single crystal pulling apparatus for a metal fluoride |
Jun. 13, 2006 |
| 6989059 |
Process for producing single crystal of compound semiconductor and crystal growing apparatus |
Jan. 24, 2006 |
| 6977010 |
Apparatus for pulling single crystal by CZ method |
Dec. 20, 2005 |
| 6942733 |
Fluid sealing system for a crystal puller |
Sep. 13, 2005 |
| 6899758 |
Method and apparatus for growing single crystal |
May. 31, 2005 |
| 6899759 |
Single crystal production method |
May. 31, 2005 |
| 6899760 |
Silicon single crystal growing furnace supplemented with low melting point dopant feeding instrument and the low melting point dopant feeding method thereof |
May. 31, 2005 |
| 6875269 |
System for increasing charge size for single crystal silicon production |
Apr. 5, 2005 |
| 6869478 |
Method for producing silicon single crystal having no flaw |
Mar. 22, 2005 |
| 6860940 |
Automated macromolecular crystallization screening |
Mar. 1, 2005 |
| 6858076 |
Method and apparatus for manufacturing single-crystal ingot |
Feb. 22, 2005 |
| 6843849 |
Method and apparatus for growing high quality single crystal |
Jan. 18, 2005 |
| 6835247 |
Rod replenishment system for use in single crystal silicon production |
Dec. 28, 2004 |
| 6821344 |
Czochralski pullers including heat shield housings having sloping top and bottom |
Nov. 23, 2004 |
| 6805746 |
Method for supplying CZ material |
Oct. 19, 2004 |
| 6797062 |
Heat shield assembly for a crystal puller |
Sep. 28, 2004 |
| 6767400 |
Crystal growth method |
Jul. 27, 2004 |
| 6764547 |
Crystal growth apparatus |
Jul. 20, 2004 |
|
|
|
