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Class Information
Number: 117/214
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Apparatus > For crystallization from liquid or supercritical state > Seed pulling > Including details of precursor replenishment
Description: Subject matter in which precursor* replenishment means are described in some detail.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7591895 |
Method and apparatus for producing crystals |
Sep. 22, 2009 |
| 7524371 |
Method for manufacturing defect-free silicon single crystal |
Apr. 28, 2009 |
| 7465351 |
Melter assembly and method for charging a crystal forming apparatus with molten source material |
Dec. 16, 2008 |
| 7368011 |
Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal |
May. 6, 2008 |
| 7335257 |
Apparatus for and method of manufacturing a single crystal rod |
Feb. 26, 2008 |
| 7326297 |
Device for the production of crystal rods having a defined cross-section and column-shaped polycrystallization structure by means of floating-zone continuous crystallization |
Feb. 5, 2008 |
| 7323047 |
Method for manufacturing granular silicon crystal |
Jan. 29, 2008 |
| 7311772 |
Apparatus and method for supplying raw material in Czochralski method |
Dec. 25, 2007 |
| 7172656 |
Device and method for measuring position of liquid surface or melt in single-crystal-growing apparatus |
Feb. 6, 2007 |
| 7060133 |
Single crystal pulling apparatus for a metal fluoride |
Jun. 13, 2006 |
| 7052547 |
Apparatus for supplying raw material |
May. 30, 2006 |
| 7001456 |
Apparatus and method for supplying Crystalline materials in czochralski method |
Feb. 21, 2006 |
| 6984263 |
Shallow melt apparatus for semicontinuous czochralski crystal growth |
Jan. 10, 2006 |
| 6916371 |
Apparatus for growing stoichiometric lithium niobate and lithium tantalate single crystals and method of growing the same |
Jul. 12, 2005 |
| 6908509 |
CZ raw material supply method |
Jun. 21, 2005 |
| 6899760 |
Silicon single crystal growing furnace supplemented with low melting point dopant feeding instrument and the low melting point dopant feeding method thereof |
May. 31, 2005 |
| 6896732 |
Source material feeder apparatus for industrial crystal growth systems |
May. 24, 2005 |
| 6805746 |
Method for supplying CZ material |
Oct. 19, 2004 |
| 6702892 |
Production device for high-quality silicon single crystals |
Mar. 9, 2004 |
| 6660082 |
Method and apparatus for doping a melt with a dopant |
Dec. 9, 2003 |
| 6562132 |
EFG crystal growth apparatus and method |
May. 13, 2003 |
| 6423137 |
Single crystal material supplying apparatus and single crystal material supplying method |
Jul. 23, 2002 |
| 6361597 |
Single crystal material auxiliary melting apparatus and single crystal material melting method |
Mar. 26, 2002 |
| 6231669 |
Crystal pulling unit |
May. 15, 2001 |
| 6200383 |
Melt depth control for semiconductor materials grown from a melt |
Mar. 13, 2001 |
| 6179914 |
Dopant delivery system and method |
Jan. 30, 2001 |
| 6106617 |
Apparatus for feeding raw material into a quartz crucible |
Aug. 22, 2000 |
| 6077345 |
Silicon crystal growth melt level control system and method |
Jun. 20, 2000 |
| 6059876 |
Method and apparatus for growing crystals |
May. 9, 2000 |
| 6036775 |
Single crystal-growing method and apparatus |
Mar. 14, 2000 |
| 6027563 |
Method and apparatus for the oriented solidification of molten silicon to form an ingot in a bottomless crystallization chamber |
Feb. 22, 2000 |
| 6019838 |
Crystal growing apparatus with melt-doping facility |
Feb. 1, 2000 |
| 6019842 |
Method and apparatus for loading raw material into a quartz crucible |
Feb. 1, 2000 |
| 6007621 |
Apparatus for feeding raw material into a quartz crucible and method of feeding the same |
Dec. 28, 1999 |
| 5976245 |
Czochralski crystal growing system |
Nov. 2, 1999 |
| 5961720 |
Single crystal-growing apparatus |
Oct. 5, 1999 |
| 5958133 |
Material handling system for growing high-purity crystals |
Sep. 28, 1999 |
| 5925147 |
Process for producing single crystals |
Jul. 20, 1999 |
| 5900055 |
Method of manufacturing silicon monocrystal by continuously charged Czochralski method |
May. 4, 1999 |
| 5891245 |
Single crystal pulling method and apparatus for its implementation |
Apr. 6, 1999 |
| 5888293 |
Material supplied for fabricating single-crystal semiconductor |
Mar. 30, 1999 |
| 5876496 |
Method for feeding a granular raw material and feeding apparatus |
Mar. 2, 1999 |
| 5873938 |
Single crystal pulling apparatus |
Feb. 23, 1999 |
| 5871581 |
Single crystal pulling apparatus |
Feb. 16, 1999 |
| 5868835 |
Apparatus for recharging of silicon granules in a czochralski single crystal growing operation |
Feb. 9, 1999 |
| 5820649 |
Method of and apparatus for continuously producing a solid material |
Oct. 13, 1998 |
| 5779792 |
Single crystal pulling apparatus |
Jul. 14, 1998 |
| 5587016 |
Controlled feeding Czochralski apparatus |
Dec. 24, 1996 |
| 5580171 |
Solids mixing, storing and conveying system for use with a furnace for single crystal silicon production |
Dec. 3, 1996 |
| 5492078 |
Process for the controlled feeding of a melting crucible with particles during the drawing of crystals by the czochralski method |
Feb. 20, 1996 |
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