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Class Information
Number: 117/204
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Apparatus > With means for treating single-crystal (e.g., heat treating)
Description: Subject matter in which the apparatus further includes means for treating a single-crystal*, and said means provides that the single-crystal* remains in the solid state and that the result is a single-crystal*.


Patents under this class:
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Patent Number Title Of Patent Date Issued
7435295 Method for producing compound single crystal and production apparatus for use therein Oct. 14, 2008
7431768 System for performing crystallization trials Oct. 7, 2008
7431769 Method for performing crystallization trials Oct. 7, 2008
7413718 Reaction apparatus for producing silicon Aug. 19, 2008
7396411 Apparatus for manufacturing single crystal Jul. 8, 2008
7351286 One hundred millimeter single crystal silicon carbide wafer Apr. 1, 2008
7344596 System and method for crystal growing Mar. 18, 2008
7335261 Apparatus for forming a semiconductor thin film Feb. 26, 2008
7314519 Vapor-phase epitaxial apparatus and vapor phase epitaxial method Jan. 1, 2008
7105049 Method of manufacturing single crystal calcium fluoride Sep. 12, 2006
7097709 Laser annealing apparatus Aug. 29, 2006
7019266 Substantially-uniform-temperature annealing Mar. 28, 2006
6919539 Substantially-uniform-temperature annealing Jul. 19, 2005
6875275 Production apparatus for producing a crystal Apr. 5, 2005
6861144 Polycrystalline silicon and process and apparatus for producing the same Mar. 1, 2005
6841210 Multilayer structured quartz glass crucible and method for producing the same Jan. 11, 2005
6824609 Liquid phase growth method and liquid phase growth apparatus Nov. 30, 2004
6758902 Heater arrangement for crystal growth furnace Jul. 6, 2004
6743294 Continuous crystal plate growth process and apparatus Jun. 1, 2004
6645294 Rational directional solidification crystal growth system and method Nov. 11, 2003
6623708 High density protein crystal growth Sep. 23, 2003
6624390 Substantially-uniform-temperature annealing Sep. 23, 2003
6579361 Chemical vapor deposition epitaxial reactor having two reaction chambers alternatively actuated and actuating method thereof Jun. 17, 2003
6554898 Crystal puller for growing monocrystalline silicon ingots Apr. 29, 2003
6540828 Method for producing crystalline silicon Apr. 1, 2003
6503322 Electrical resistance heater and method for crystal growing apparatus Jan. 7, 2003
6472299 Method and apparatus for treating a substrate with hydrogen radicals at a temperature of less than 40 K Oct. 29, 2002
6458199 Crystallization apparatus and method using non-vacuum process Oct. 1, 2002
6447603 Process and apparatus for producing oxide single crystals Sep. 10, 2002
6413313 Apparatus for producing polycrystalline silicon sheets and production method using the same Jul. 2, 2002
6409831 Apparatus for fabricating single crystal Jun. 25, 2002
6402838 Crystal growth vessel and crystal growth method Jun. 11, 2002
6368403 Method and apparatus for purifying silicon Apr. 9, 2002
6309460 Hazardous containment for MBE maintenance Oct. 30, 2001
6274196 Apparatus and method for exchanging an atmosphere of spherical object Aug. 14, 2001
6264742 Single crystal processing by in-situ seed injection Jul. 24, 2001
6235110 Method of producing recrystallized-material-member, and apparatus and heating method therefor May. 22, 2001
6171396 Growing system for uniformly growing thin film over semiconductor wafer through rotation Jan. 9, 2001
6171395 Process and heating device for melting semiconductor material Jan. 9, 2001
6153007 Method of manufacturing a single crystal and apparatus for manufacturing single crystal Nov. 28, 2000
6129045 Apparatus and method for exchanging an atmosphere of spherical object Oct. 10, 2000
6074479 Silicon single crystal wafer annealing method and equipment, and silicon single crystal wafer and manufacturing method related thereto Jun. 13, 2000
6071339 Continuous crystal plate growth process and apparatus Jun. 6, 2000
6019842 Method and apparatus for loading raw material into a quartz crucible Feb. 1, 2000
5997640 Device and method for liquefying and crystallizing substances Dec. 7, 1999
5989340 Process and device for sublimation growing of silicon carbide monocrystals Nov. 23, 1999
5989337 Method of growing single crystal Nov. 23, 1999
5972109 Growth of bulk single crystals of aluminum nitride Oct. 26, 1999
5972107 Method for purifying silicon Oct. 26, 1999
5951758 Method and apparatus for the growth of a single crystal Sep. 14, 1999

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