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Class Information
Number: 117/202
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Apparatus > With means for measuring, testing, or sensing > With responsive control means
Description: Subject matter which includes means for controlling a specified parameter or condition in response to the measured, tested, or sensed condition or parameter.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7597758 |
Chemical precursor ampoule for vapor deposition processes |
Oct. 6, 2009 |
| 7582162 |
Semiconductor device and semiconductor device production system |
Sep. 1, 2009 |
| RE40871 |
Method of producing plasma display panel with protective layer of an alkaline earth oxide |
Aug. 18, 2009 |
| 7572335 |
Crystallization apparatus and crystallization method |
Aug. 11, 2009 |
| 7540921 |
Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus |
Jun. 2, 2009 |
| 7537657 |
Silicon wafer and process for producing it |
May. 26, 2009 |
| 7524374 |
Method and apparatus for generating a precursor for a semiconductor processing system |
Apr. 28, 2009 |
| 7513949 |
Method and apparatus for producing semiconductor device |
Apr. 7, 2009 |
| 7470326 |
Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal |
Dec. 30, 2008 |
| 7462237 |
Systems and methods for generating images of crystals |
Dec. 9, 2008 |
| 7445674 |
Crystallization apparatus, crystallization method, device, optical modulation element, and display apparatus |
Nov. 4, 2008 |
| 7431764 |
Method for pulling up single crystal |
Oct. 7, 2008 |
| 7431768 |
System for performing crystallization trials |
Oct. 7, 2008 |
| 7416708 |
Method of measuring protein solubility, process for producing crystal and apparatus therefor |
Aug. 26, 2008 |
| 7413605 |
Method for manufacturing silicon single crystal |
Aug. 19, 2008 |
| 7402207 |
Method and apparatus for controlling the thickness of a selective epitaxial growth layer |
Jul. 22, 2008 |
| 7344596 |
System and method for crystal growing |
Mar. 18, 2008 |
| 7335261 |
Apparatus for forming a semiconductor thin film |
Feb. 26, 2008 |
| 7332029 |
Crystal forming apparatus and method for using same |
Feb. 19, 2008 |
| 7332032 |
Precursor mixtures for use in preparing layers on substrates |
Feb. 19, 2008 |
| 7326292 |
Quality evaluation method for single crystal ingot |
Feb. 5, 2008 |
| 7318865 |
Crystallization apparatus and method; manufacturing method of electronic device, electronic device, and optical modulation element |
Jan. 15, 2008 |
| 7318866 |
Systems and methods for inducing crystallization of thin films using multiple optical paths |
Jan. 15, 2008 |
| 7314519 |
Vapor-phase epitaxial apparatus and vapor phase epitaxial method |
Jan. 1, 2008 |
| 7300520 |
Crystallization reagent matrices and related methods and kits |
Nov. 27, 2007 |
| 7294197 |
Formation of a silicon sheet by cold surface casting |
Nov. 13, 2007 |
| 7285168 |
Method and apparatus for the measurement, orientation and fixation of at least one single crystal |
Oct. 23, 2007 |
| 7282094 |
Method of simulation with respect to density distribution and size distribution of void defect within single crystal and oxygen precipitation nucleus within single crystal |
Oct. 16, 2007 |
| 7270709 |
Method and apparatus of generating PDMAT precursor |
Sep. 18, 2007 |
| 7244306 |
Method for measuring point defect distribution of silicon single crystal ingot |
Jul. 17, 2007 |
| 7217319 |
Crystallization apparatus and crystallization method |
May. 15, 2007 |
| 7214270 |
Crystallization apparatus, crystallization method, device and phase modulation element |
May. 8, 2007 |
| 7211145 |
Substrate processing apparatus and substrate processing method |
May. 1, 2007 |
| 7195670 |
High throughput screening of crystallization of materials |
Mar. 27, 2007 |
| 7125452 |
Process for calibrating the temperature control unit of an oven and oven for carrying out this process |
Oct. 24, 2006 |
| 7105048 |
Laser irradiation apparatus |
Sep. 12, 2006 |
| 7101436 |
Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit |
Sep. 5, 2006 |
| 7097709 |
Laser annealing apparatus |
Aug. 29, 2006 |
| 7074271 |
Method of identifying defect distribution in silicon single crystal ingot |
Jul. 11, 2006 |
| 7052545 |
High throughput screening of crystallization of materials |
May. 30, 2006 |
| 7033439 |
Apparatus for fabricating a III-V nitride film and a method for fabricating the same |
Apr. 25, 2006 |
| 7025828 |
Screening for optimal yield in the crystallization of multicomponent systems |
Apr. 11, 2006 |
| 7022191 |
Method of crystallizing amorphous silicon layer and crystallizing apparatus thereof |
Apr. 4, 2006 |
| 7022184 |
Atomic layer CVD |
Apr. 4, 2006 |
| 7014705 |
Microfluidic device with diffusion between adjacent lumens |
Mar. 21, 2006 |
| 7014706 |
Crystal forming apparatus and method for using same |
Mar. 21, 2006 |
| 7011709 |
Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, thin film transistor, and display |
Mar. 14, 2006 |
| 7001462 |
Method for making an oriented optical fluoride crystal blank |
Feb. 21, 2006 |
| 6994749 |
Microfluidic device for parallel delivery and mixing of fluids |
Feb. 7, 2006 |
| 6962624 |
Method and device for depositing in particular organic layers using organic vapor phase deposition |
Nov. 8, 2005 |
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