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Class Information
Number: 117/108
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Forming from vapor or gaseous state (e.g., vpe, sublimation) > Using an energy beam or field, a particle beam or field, or a plasma (e.g., mbe)
Description: Subject matter in which the process utilizes a particle beam or an energy beam or a particle field or an energy field or a plasma during growth.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7601216 |
Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof |
Oct. 13, 2009 |
| 7591897 |
Method for the rapid synthesis of large quantities of metal oxide nanowires at low temperatures |
Sep. 22, 2009 |
| 7556688 |
Method for achieving low defect density AlGaN single crystal boules |
Jul. 7, 2009 |
| 7553372 |
Method of growing semiconductor crystal |
Jun. 30, 2009 |
| 7553368 |
Process for manufacturing a gallium rich gallium nitride film |
Jun. 30, 2009 |
| 7544398 |
Controlled nano-doping of ultra thin films |
Jun. 9, 2009 |
| 7504643 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Mar. 17, 2009 |
| 7495239 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Feb. 24, 2009 |
| 7485349 |
Thin film forming method |
Feb. 3, 2009 |
| 7449065 |
Method for the growth of large low-defect single crystals |
Nov. 11, 2008 |
| 7435297 |
Molten-salt-based growth of group III nitrides |
Oct. 14, 2008 |
| 7419546 |
Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof |
Sep. 2, 2008 |
| 7402206 |
Method of synthesizing a compound of the formula M.sub.n+1AX.sub.n, film of the compound and its use |
Jul. 22, 2008 |
| 7399357 |
Atomic layer deposition using multilayers |
Jul. 15, 2008 |
| 7368067 |
P-type zinc oxide semiconductor film and process for preparation thereof |
May. 6, 2008 |
| 7341628 |
Method to reduce crystal defects particularly in group III-nitride layers and substrates |
Mar. 11, 2008 |
| 7338582 |
Method for manufacturing manganese oxide nanostructure and oxygen reduction electrode using said manganese oxide nanostructure |
Mar. 4, 2008 |
| 7279041 |
Atomic layer deposition methods and atomic layer deposition tools |
Oct. 9, 2007 |
| 7276121 |
Forming improved metal nitrides |
Oct. 2, 2007 |
| 7273664 |
Preparation method of a coating of gallium nitride |
Sep. 25, 2007 |
| H2193 |
Method of growing homoepitaxial silicon carbide |
Jul. 3, 2007 |
| 7189287 |
Atomic layer deposition using electron bombardment |
Mar. 13, 2007 |
| 7182812 |
Direct synthesis of oxide nanostructures of low-melting metals |
Feb. 27, 2007 |
| 7160529 |
Diamondoid-containing field emission devices |
Jan. 9, 2007 |
| 7087113 |
Textured substrate tape and devices thereof |
Aug. 8, 2006 |
| 7077904 |
Method for atomic layer deposition (ALD) of silicon oxide film |
Jul. 18, 2006 |
| 7060131 |
Epitaxy with compliant layers of group-V species |
Jun. 13, 2006 |
| 7048798 |
Silicon carbide single crystal and method and apparatus for producing the same |
May. 23, 2006 |
| 7037371 |
Method for fabricating semiconductor device |
May. 2, 2006 |
| 7022183 |
Semiconductor thin film and process for production thereof |
Apr. 4, 2006 |
| 7022182 |
Ferromagnetic p-type single-crystal zinc oxide material and manufacturing method thereof |
Apr. 4, 2006 |
| 7001459 |
Spinel-structured metal oxide on a substrate and method of making same by molecular beam epitaxy |
Feb. 21, 2006 |
| 6962624 |
Method and device for depositing in particular organic layers using organic vapor phase deposition |
Nov. 8, 2005 |
| 6953703 |
Method of making a semiconductor device with exposure of sapphire substrate to activated nitrogen |
Oct. 11, 2005 |
| 6916374 |
Atomic layer deposition methods and atomic layer deposition tools |
Jul. 12, 2005 |
| 6902620 |
Atomic layer deposition systems and methods |
Jun. 7, 2005 |
| 6899928 |
Dual ion beam assisted deposition of biaxially textured template layers |
May. 31, 2005 |
| 6896731 |
P-type single crystal zinc-oxide having low resistivity and method for preparation thereof |
May. 24, 2005 |
| 6869880 |
In situ application of etch back for improved deposition into high-aspect-ratio features |
Mar. 22, 2005 |
| 6863728 |
Apparatus for growing low defect density silicon carbide |
Mar. 8, 2005 |
| 6860943 |
Method for producing group III nitride compound semiconductor |
Mar. 1, 2005 |
| 6841003 |
Method for forming carbon nanotubes with intermediate purification steps |
Jan. 11, 2005 |
| 6841002 |
Method for forming carbon nanotubes with post-treatment step |
Jan. 11, 2005 |
| 6811611 |
Esrf source for ion plating epitaxial deposition |
Nov. 2, 2004 |
| 6800135 |
ZnO/sapphire substrate and method for manufacturing the same |
Oct. 5, 2004 |
| 6790278 |
Method for preparing low-resistant p-type SrTiO3 |
Sep. 14, 2004 |
| 6758900 |
Micro three-dimensional structure, production method therefor and production device therefor |
Jul. 6, 2004 |
| 6743292 |
Oriented conductive oxide electrodes on SiO2/Si and glass |
Jun. 1, 2004 |
| 6720260 |
Sequential electron induced chemical vapor deposition |
Apr. 13, 2004 |
| 6709989 |
Method for fabricating a semiconductor structure including a metal oxide interface with silicon |
Mar. 23, 2004 |
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