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Class Information
Number: 117/103
Name: Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Forming from vapor or gaseous state (e.g., vpe, sublimation) > With decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., cvd) > Using an energy beam or field, a particle beam or field, or a plasma (e.g., ionization, pecvd, cbe, mombe, rf induction, laser)
Description: Subject matter in which the process utilizes a particle beam or an energy beam or a particle field or an energy field or a plasma during growth.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7601216 |
Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof |
Oct. 13, 2009 |
| 7601217 |
Method of fabricating an epitaxially grown layer |
Oct. 13, 2009 |
| 7591897 |
Method for the rapid synthesis of large quantities of metal oxide nanowires at low temperatures |
Sep. 22, 2009 |
| 7553372 |
Method of growing semiconductor crystal |
Jun. 30, 2009 |
| 7507288 |
Highly anisotropic ceramic thermal barrier coating materials and related composites |
Mar. 24, 2009 |
| 7504643 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Mar. 17, 2009 |
| RE40647 |
Method of producing plasma display panel with protective layer of an alkaline earth oxide |
Mar. 10, 2009 |
| 7495239 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Feb. 24, 2009 |
| 7494546 |
Method of growing insulating, semiconducting, and conducting group III-nitride thin films and coatings, and use as radiation hard coatings for electronics and optoelectronic devices |
Feb. 24, 2009 |
| 7485349 |
Thin film forming method |
Feb. 3, 2009 |
| 7481880 |
Mask and method for crystallizing amorphous silicon |
Jan. 27, 2009 |
| 7459026 |
Light irradiation apparatus, crystallization apparatus, crystallization method and device |
Dec. 2, 2008 |
| 7452420 |
Apparatus and method for diamond production |
Nov. 18, 2008 |
| 7438790 |
Electrode for electrolysis and process for producing the same |
Oct. 21, 2008 |
| 7419546 |
Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof |
Sep. 2, 2008 |
| 7402206 |
Method of synthesizing a compound of the formula M.sub.n+1AX.sub.n, film of the compound and its use |
Jul. 22, 2008 |
| 7399357 |
Atomic layer deposition using multilayers |
Jul. 15, 2008 |
| 7396409 |
Acicular silicon crystal and process for producing the same |
Jul. 8, 2008 |
| 7387679 |
Silicon carbide single crystal and method and apparatus for producing the same |
Jun. 17, 2008 |
| 7384481 |
Method of forming a rare-earth dielectric layer |
Jun. 10, 2008 |
| 7361222 |
Device and method for producing single crystals by vapor deposition |
Apr. 22, 2008 |
| 7361221 |
Light irradiation apparatus, crystallization apparatus, crystallization method, semiconductor device and light modulation element |
Apr. 22, 2008 |
| 7341628 |
Method to reduce crystal defects particularly in group III-nitride layers and substrates |
Mar. 11, 2008 |
| 7338582 |
Method for manufacturing manganese oxide nanostructure and oxygen reduction electrode using said manganese oxide nanostructure |
Mar. 4, 2008 |
| 7291218 |
Method of fabricating orientation film for liquid crystal display device |
Nov. 6, 2007 |
| 7276117 |
Method of forming semi-insulating silicon carbide single crystal |
Oct. 2, 2007 |
| 7255746 |
Nitrogen sources for molecular beam epitaxy |
Aug. 14, 2007 |
| 7235131 |
Method for forming a single crystalline film |
Jun. 26, 2007 |
| 7220315 |
Method of producing polycrystalline thin film and method of producing an oxide superconducting element |
May. 22, 2007 |
| 7182812 |
Direct synthesis of oxide nanostructures of low-melting metals |
Feb. 27, 2007 |
| 7157067 |
Tough diamonds and method of making thereof |
Jan. 2, 2007 |
| 7147714 |
Manufacturing method of silicon carbide single crystals |
Dec. 12, 2006 |
| 7090723 |
Highly anisotropic ceramic thermal barrier coating materials and related composites |
Aug. 15, 2006 |
| 7063742 |
N-type semiconductor diamond and its fabrication method |
Jun. 20, 2006 |
| 7060131 |
Epitaxy with compliant layers of group-V species |
Jun. 13, 2006 |
| 7056383 |
Tantalum based crucible |
Jun. 6, 2006 |
| 7022183 |
Semiconductor thin film and process for production thereof |
Apr. 4, 2006 |
| 7018597 |
High resistivity silicon carbide single crystal |
Mar. 28, 2006 |
| 7014708 |
Method of forming a thin film transistor by utilizing a laser crystallization process |
Mar. 21, 2006 |
| 7014710 |
Method of growing single crystal Gallium Nitride on silicon substrate |
Mar. 21, 2006 |
| 7001459 |
Spinel-structured metal oxide on a substrate and method of making same by molecular beam epitaxy |
Feb. 21, 2006 |
| 6964705 |
Method for producing semiconductor crystal |
Nov. 15, 2005 |
| 6962613 |
Low-temperature fabrication of thin-film energy-storage devices |
Nov. 8, 2005 |
| 6958094 |
Single crystal cutting method |
Oct. 25, 2005 |
| 6913649 |
System and method for forming single-crystal domains using crystal seeds |
Jul. 5, 2005 |
| 6911084 |
Low temperature epitaxial growth of quaternary wide bandgap semiconductors |
Jun. 28, 2005 |
| 6905542 |
Waveguides such as SiGeC waveguides and method of fabricating the same |
Jun. 14, 2005 |
| 6902620 |
Atomic layer deposition systems and methods |
Jun. 7, 2005 |
| 6899928 |
Dual ion beam assisted deposition of biaxially textured template layers |
May. 31, 2005 |
| 6893502 |
Apparatus and method for fabrication of photonic crystals |
May. 17, 2005 |
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