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m.cndot.FSI Ltd. Patents |
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Assignee: m.cndot.FSI Ltd.
Address: Tokyo, JP
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6874516 |
Substrate cleaning apparatus |
April 5, 2005 |
| A substrate cleaning apparatus comprises an outer shell constructed such that the outer shell is selectively openable or hermetically closable to form a sealed space, an inner shell enclosed within the outer shell and having a holding member for holding a substrate, and a dispenser unit |
| 6767124 |
Slurry mixing feeder and slurry mixing and feeding method |
July 27, 2004 |
| A mixing feeder is disclosed for a slurry that contains liquids at a desired mixing ratio. The liquids include at least a dispersion of fine abrasive particles and a solution of an additive. The slurry mixing feeder has suction ports for sucking the liquids from a reservoir; a discharge |
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