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Zeiss SMT AG Patents |
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Assignee: Zeiss SMT AG
Address: Oberkochen, DE
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6791761 |
Optical projection lens system |
September 14, 2004 |
| An optical projection lens system for microlithography comprising in the direction of propagating radiation: a first lens group having positive refractive power, a second lens group having negative refractive power and comprising a waist (constriction) with a minimum diameter of the |
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