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Zeiss; Car Patents |
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Assignee: Zeiss; Car
Address: Heidenheim (Brenz), DE
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6717722 |
Catadioptric optical system and exposure apparatus having the same |
April 6, 2004 |
| A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second |
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