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Welltech Semiconductor Inc. Patents
Assignee:
Welltech Semiconductor Inc.
Address:
Chu Pei, Hsin Chu Hsien, TW
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
7333022 Safety monitoring mechanism of a wafer fabrication platform February 19, 2008
A safety monitoring mechanism of a wafer fabrication platform is disclosed. The mechanism comprises a vibration sensor mounted at the loading apparatus of the wafer fabrication platform for detecting vibration generated during the operation of the loading apparatus; a determination m

 
 
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