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V-Automation Inc. Patents |
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Assignee: V-Automation Inc.
Address: Southlake, TX
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7044732 |
Rolling process cover |
May 16, 2006 |
| A cover for the opening of a process tube of a furnace used in semiconductor manufacturing is comprised of a substantially continuous sheet of metal so that it may be rolled opened and closed while being against the opening of the process tube by a guide frame. The roller on which th | |
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