Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
UVTech Systems, Inc. Patents
Assignee:
UVTech Systems, Inc.
Address:
Sudbury, MA
No. of patents:
5
Patents:












Patent Number Title Of Patent Date Issued
8183500 Orthogonal beam delivery system for wafer edge processing May 22, 2012
A method and apparatus for processing substrate edges is disclosed that overcomes the limitations of conventional edge processing methods and systems used in semiconductor manufacturing. The edge processing method and apparatus of this invention includes a laser and optical system to
7270724 Scanning plasma reactor September 18, 2007
A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excit
6773683 Photocatalytic reactor system for treating flue effluents August 10, 2004
A photocatalytic reactor system consisting of a photonic energy source to remove undesirable contaminants from an effluent stream. The device includes a photonic energy source, a beam delivery system, and a reaction chamber into which the photonic energy is transmitted. The contaminated
5814156 Photoreactive surface cleaning September 29, 1998
Foreign material on a surface of a substrate is processed to form a non-solid by-product by providing a gaseous reactant in the vicinity of the foreign material and delivering a beam of radiation to aid the gaseous reactant to react with the foreign material to form the non-solid by-
5669979 Photoreactive surface processing September 23, 1997
A method of cleaning a substrate surface, the cleaning being done photoreactively without damaging the surface. A laser beam of UV radiation is delivered at an acute angle to the surface of the substrate, the beam striking the surface at a long and narrow reaction region. The beam and

 
 
  Recently Added Patents
Method of manufacturing toner
Distylium plant named `PIIDIST-I`
Organic compounds
Method and system for establishing security connection between switch equipments
Method, system and computer program product for verifying floating point divide operation results
Method and apparatus for band switching in wireless local access network
Passive charge cord release system for an electric vehicle
  Randomly Featured Patents
Electroluminescent display having dark field semiconducting layer
Eyewear
Transfer station for wireless telephone distribution system with time and space diversity transmission
Carrier management method and system having auto-rate shopping
Enhanced paint for microwave/millimeter wave radiometric detection applications and method of road marker detection
Apparatus for contacting a gas with a liquid, in particular for aerating waste water
Image recognition method using finite state networks
Apparatus for temporarily storing phone numbers and short messages
Therapy spa
Flanged prosthesis