Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
UVTech Systems, Inc. Patents
Assignee:
UVTech Systems, Inc.
Address:
Sudbury, MA
No. of patents:
5
Patents:












Patent Number Title Of Patent Date Issued
8183500 Orthogonal beam delivery system for wafer edge processing May 22, 2012
A method and apparatus for processing substrate edges is disclosed that overcomes the limitations of conventional edge processing methods and systems used in semiconductor manufacturing. The edge processing method and apparatus of this invention includes a laser and optical system to
7270724 Scanning plasma reactor September 18, 2007
A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excit
6773683 Photocatalytic reactor system for treating flue effluents August 10, 2004
A photocatalytic reactor system consisting of a photonic energy source to remove undesirable contaminants from an effluent stream. The device includes a photonic energy source, a beam delivery system, and a reaction chamber into which the photonic energy is transmitted. The contaminated
5814156 Photoreactive surface cleaning September 29, 1998
Foreign material on a surface of a substrate is processed to form a non-solid by-product by providing a gaseous reactant in the vicinity of the foreign material and delivering a beam of radiation to aid the gaseous reactant to react with the foreign material to form the non-solid by-
5669979 Photoreactive surface processing September 23, 1997
A method of cleaning a substrate surface, the cleaning being done photoreactively without damaging the surface. A laser beam of UV radiation is delivered at an acute angle to the surface of the substrate, the beam striking the surface at a long and narrow reaction region. The beam and

 
 
  Recently Added Patents
Qualification screening system and screening method thereof, qualification screening device and device under qualification screening
Vehicle display system or projection display for a motor vehicle, and calibration method
Mobile terminal and method for changing page thereof
Shape based similarity of continuous wave doppler images
Laser receiver for detecting a relative position
Method of creating exercise routes for a user and related personal navigation device
Signal transfer apparatus
  Randomly Featured Patents
Ferrule for optical fiber transmitting linearly polarized light and optical fiber connector using this ferrule
Method for producing a catalytic structure for the reduction of nitrogen oxides
Imaging apparatus and signal processing method for checking a photographed image in a multi-band camera immediately
Geometric end effector system
Time multiplexing image processing functions for noise reduction
Intellectual knockdown maze
Assemblable lamp shade and structures
Method to find a violation of a coding rule in program
Method and system for hybrid error diffusion processing of image information using adaptive white and black reference values
Artificial shingle