Resources Contact Us Home
UVTech Systems, Inc. Patents
UVTech Systems, Inc.
Sudbury, MA
No. of patents:

Patent Number Title Of Patent Date Issued
8183500 Orthogonal beam delivery system for wafer edge processing May 22, 2012
A method and apparatus for processing substrate edges is disclosed that overcomes the limitations of conventional edge processing methods and systems used in semiconductor manufacturing. The edge processing method and apparatus of this invention includes a laser and optical system to
7270724 Scanning plasma reactor September 18, 2007
A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excit
6773683 Photocatalytic reactor system for treating flue effluents August 10, 2004
A photocatalytic reactor system consisting of a photonic energy source to remove undesirable contaminants from an effluent stream. The device includes a photonic energy source, a beam delivery system, and a reaction chamber into which the photonic energy is transmitted. The contaminated
5814156 Photoreactive surface cleaning September 29, 1998
Foreign material on a surface of a substrate is processed to form a non-solid by-product by providing a gaseous reactant in the vicinity of the foreign material and delivering a beam of radiation to aid the gaseous reactant to react with the foreign material to form the non-solid by-
5669979 Photoreactive surface processing September 23, 1997
A method of cleaning a substrate surface, the cleaning being done photoreactively without damaging the surface. A laser beam of UV radiation is delivered at an acute angle to the surface of the substrate, the beam striking the surface at a long and narrow reaction region. The beam and

  Recently Added Patents
Method of estimating remaining constant current/constant voltage charging time
Accessory sleeve
Communication terminal device, and recording medium
Variety corn line NPAA2720
Substrate processing apparatus and display method of substrate processing apparatus
Profiled rail for advertising/display units
Polypeptide microparticles
  Randomly Featured Patents
Ventilated cooking appliance unit
Extrusion puller mounting
Modular connector with suppression of conducted and radiated emissions
Developer supplying apparatus
Continuous corrugated waveguide and method of producing the same
Nanohybrid polymers for ophthalmic applications
Portable ophthalmic apparatus and ophthalmic system
Human telomerase catalytic subunit variants
Process for the dehydration of bis-maleamic acids
Brake mechanism for a rope pulley of a leash that can be mechanically wound and unwound for leading animals