Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
UVTech Systems, Inc. Patents
Assignee:
UVTech Systems, Inc.
Address:
Sudbury, MA
No. of patents:
5
Patents:












Patent Number Title Of Patent Date Issued
8183500 Orthogonal beam delivery system for wafer edge processing May 22, 2012
A method and apparatus for processing substrate edges is disclosed that overcomes the limitations of conventional edge processing methods and systems used in semiconductor manufacturing. The edge processing method and apparatus of this invention includes a laser and optical system to
7270724 Scanning plasma reactor September 18, 2007
A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excit
6773683 Photocatalytic reactor system for treating flue effluents August 10, 2004
A photocatalytic reactor system consisting of a photonic energy source to remove undesirable contaminants from an effluent stream. The device includes a photonic energy source, a beam delivery system, and a reaction chamber into which the photonic energy is transmitted. The contaminated
5814156 Photoreactive surface cleaning September 29, 1998
Foreign material on a surface of a substrate is processed to form a non-solid by-product by providing a gaseous reactant in the vicinity of the foreign material and delivering a beam of radiation to aid the gaseous reactant to react with the foreign material to form the non-solid by-
5669979 Photoreactive surface processing September 23, 1997
A method of cleaning a substrate surface, the cleaning being done photoreactively without damaging the surface. A laser beam of UV radiation is delivered at an acute angle to the surface of the substrate, the beam striking the surface at a long and narrow reaction region. The beam and

 
 
  Recently Added Patents
Cooler
Communication apparatus, communication method, and program for exchanging data with a target
Statistical identification of instances during reconciliation process
Compact semiconductor memory device having reduced number of contacts, methods of operating and methods of making
Liquid crystal display apparatus
Solid-state image sensing device and control method of solid-state image sensing device
Nonvolatile semiconductor memory device
  Randomly Featured Patents
Method for doping structures in FinFET devices
1,4-diaryl alkane derivatives having insecticidal and acaricidal activity
Lens arrangement for integration into a wall, a wall-integrated device incorporating the lens arrangement, and method of installing the device
Fog lamp for automobile
Feedthrough for battery, method for manufacturing same and the battery
Trader desk nosing assembly
Phloridzin-rich phenolic fraction and use thereof as a cosmetic, dietary or nutraceutical agent
Substituted decahydro-1H-pyrido[1,2-f]phenanthridines and decahydropyrrolo[1,2-f]phenanthridines
Telecommunications service creation apparatus and method
Probe card assembly and kit