Resources Contact Us Home
UVTech Systems, Inc. Patents
UVTech Systems, Inc.
Sudbury, MA
No. of patents:

Patent Number Title Of Patent Date Issued
8183500 Orthogonal beam delivery system for wafer edge processing May 22, 2012
A method and apparatus for processing substrate edges is disclosed that overcomes the limitations of conventional edge processing methods and systems used in semiconductor manufacturing. The edge processing method and apparatus of this invention includes a laser and optical system to
7270724 Scanning plasma reactor September 18, 2007
A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant gas create an excit
6773683 Photocatalytic reactor system for treating flue effluents August 10, 2004
A photocatalytic reactor system consisting of a photonic energy source to remove undesirable contaminants from an effluent stream. The device includes a photonic energy source, a beam delivery system, and a reaction chamber into which the photonic energy is transmitted. The contaminated
5814156 Photoreactive surface cleaning September 29, 1998
Foreign material on a surface of a substrate is processed to form a non-solid by-product by providing a gaseous reactant in the vicinity of the foreign material and delivering a beam of radiation to aid the gaseous reactant to react with the foreign material to form the non-solid by-
5669979 Photoreactive surface processing September 23, 1997
A method of cleaning a substrate surface, the cleaning being done photoreactively without damaging the surface. A laser beam of UV radiation is delivered at an acute angle to the surface of the substrate, the beam striking the surface at a long and narrow reaction region. The beam and

  Recently Added Patents
Scanned image projection system employing intermediate image plane
Method for assembling a camera module, and camera module
Composite filtration membranes and methods of preparation thereof
Methods and compositions for improved F-18 labeling of proteins, peptides and other molecules
Buckle (tube)
System, method and computer program product for monitoring and controlling network connections from a supervisory operating system
Image processing apparatus and method having defective pixel detection and correction ability
  Randomly Featured Patents
Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces
Vertical launch and hovering space shuttle
Telephone system enabling operation of a telephone set by way of a portable terminal
Low loss, variable phase reflect array
Symbol time synchronization method for OFDM systems
Wing and method for reducing effects of propeller airflow on lift distribution
Identifying subsets of noise violators and contributors in package wiring
Benzoxazolinonyl and benzothiazolinonyl ethyl morpholinoacetamides
Data compressing apparatus, data restoring apparatus and data compressing/restoring system
Electric cutout having a link break fuse holder