| Patent Number |
Title Of Patent |
Date Issued |
| 6893749 |
SiC-formed material |
May 17, 2005 |
| A nitrogen-doped n-type SiC-formed material consisting of high purity .beta.-type crystals, which exhibits low resistivity and low light transmittance and is suitably used as a substrate for semiconductor fabricating devices, and a method of manufacturing the SiC-formed material by w |
| 6444974 |
Method for transferring a dummy wafer |
September 3, 2002 |
| Dummy wafers of SiC having low light transmission properties to light from the light source of a photo-sensor are used, and when wafers undergoes a heat treatment, the dummy wafers are transferred from a wafer cassette to a wafer boat in which the number of dummy wafers and a state of |
| 6426133 |
Graphite material coated with silicon carbide |
July 30, 2002 |
| A graphite material coated with silicon carbide which exhibits superior physical impact resistance and can be manufactured at low cost. The material includes a graphite substrate coated with a silicon carbide film with a thickness of 30-50 .mu.m, wherein a mixed layer of graphite and |
| 6383333 |
Protective member for inner surface of chamber and plasma processing apparatus |
May 7, 2002 |
| An inner wall protection member used to protect the inner wall of a chamber of a plasma treatment apparatus which can be used stably for a long period of time by specifying properties of glass-like carbon materials, and a plasma treatment apparatus provided with the protection member. Th |
| 6300226 |
Formed SIC product and manufacturing method thereof |
October 9, 2001 |
| A formed SiC product having a low degree of light transmittance useful in a variety of heat resistant components such as equalizing rings, dummy wafers, and other components employed in semiconductor manufacturing facilities, and the manufacturing method thereof. The product is a CVD |
| 6197870 |
Hard-type high-structure carbon black and rubber composition comprising same |
March 6, 2001 |
| A hard-type high-structure carbon black capable of providing the rubber comprising the carbon black with a high modulus, superior abrasion resistance, and gripping performance, exhibiting high abrasion resistance corresponding to the modulus, and suitable for tire treads, and a rubber |
| 5993770 |
Silicon carbide fabrication |
November 30, 1999 |
| An SiC film having an excellent strength and thermal characteristics. The SiC film is prepared by a CVD process (i.e. CVD-SiC fabrication) and has a thermal conductivity along the direction of the SiC crystal growth between 100 and 300 W/m.multidot.K, and an average grain diameter of the |
| 5993596 |
Plasma-etching electrode plate |
November 30, 1999 |
| A plasma-etching electrode plate of glassy carbon is characterized by a thickness greater than 4.5 mm and a thermal conductivity greater than 5 W/m.multidot.K at 300K. Due to these characteristic properties, it has a uniform surface temperature distribution and permits etching on large |
| 5882807 |
Jig for heat treatment and process for fabricating the jig |
March 16, 1999 |
| A jig used for heat treatment made from an SiC-coated silicon carbide material, wherein the SiC film is coated by the CVD method on a silicon carbide matrix in which silicon has been impregnated and wherein there are no pores with a diameter of 2 .mu.m or larger in the outer layer of the |
| 5853523 |
Plasma-etching electrode plate |
December 29, 1998 |
| A plasma-etching electrode plate in the form of flat glassy carbon plate is characterized by a flatness with a warp smaller than 0.3 mm. This flatness permits the electrode plate to have a uniform surface temperature distribution which contributes to uniform etching on semiconductor wafe |
| 5525276 |
Method for manufacturing high strength isotropic graphite piston components |
June 11, 1996 |
| A method for manufacturing a high strength isotropic graphite including a kneading step to mix an aggregate consisting of carbonaceous fine powder with a pitch binder a molding step to mold the raw material prepared by re-pulverizing the kneaded mixture using rubber press method and a |
