| Patent Number |
Title Of Patent |
Date Issued |
| 8132465 |
Sensor element placement for package stress compensation |
March 13, 2012 |
| Circuits, methods, and systems that calibrate or account for packaging and related stress components in a pressure sensor. Further examples provide an improved sensor element or device. One example provides one or more sensing elements on the diaphragm and near the diaphragm-bulk bou |
| 8082796 |
Temperature extraction from a pressure sensor |
December 27, 2011 |
| Circuits, methods, and systems to compensate pressure sensor readings for changes in temperature. An example measures temperature in a field-effect-transistor-based pressure sensor or micro-electromechanical system by measuring the device's threshold voltage. This threshold voltage i |
| 7487681 |
Pressure sensor adjustment using backside mask |
February 10, 2009 |
| Methods and apparatus for an absolute or gauge pressure sensor having a backside cavity with a substantially vertical interior sidewall. The backside cavity is formed using a DRIE etch or other MEMS micro-machining technique. The backside cavity has an opening that is cross shaped, where |
| 7111518 |
Extremely low cost pressure sensor realized using deep reactive ion etching |
September 26, 2006 |
| Methods and apparatus for an absolute or gauge pressure sensor having a backside cavity with a substantially vertical interior sidewall. The backside cavity is formed using a DRIE etch or other MEMS micro-machining technique. One embodiment provides for a diaphragm having a boss manu |
| 6467354 |
Anodically bonded, gas impervious cavity structures fabricated in silicon |
October 22, 2002 |
| Glass with metal deposited on it in a pattern which is slightly larger than the cavity area of the corresponding silicon wafer. The metal layer has a thickness such that the glass can deform sufficiently to allow bonding of the glass to the silicon. The metal is then compressively bonded |
| 6150681 |
Monolithic flow sensor and pressure sensor |
November 21, 2000 |
| A monolithic, integrated circuit sensor combining both a differential pressure sensor and a flow sensor on the same silicon chip. The integrated circuit has a diaphragm with a number of piezo-resistive elements placed on it in the normal manner for a pressure sensor. In addition, a chann |
