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Semiconductor Manufacturing International Patents
Assignee:
Semiconductor Manufacturing International
Address:
Shanghai) Corporation (Shanghai, CN
No. of patents:
84
Patents:


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Patent Number Title Of Patent Date Issued
7625796 Semiconductor device with amorphous silicon MONOS memory cell structure and method for manufactu December 1, 2009
A semiconductor device with an amorphous silicon (a-Si) metal-oxide-nitride-oxide-semiconductor (MONOS) memory cell structure. The device includes a substrate, a dielectric layer overlying the substrate, and one or more source or drain regions embedded in the dielectric layer with a
7619435 Method and system for derivation of breakdown voltage for MOS integrated circuit devices November 17, 2009
A method and system for multi-point (e.g., double-point) GOI test that can efficiently judge failure modes by testing only two points. We can measure leakage currents at only two voltages, which are the cut points of mode A-B and B-C, instead of the whole ramped voltages to save time
7615475 Method for fabricating landing polysilicon contact structures for semiconductor devices November 10, 2009
A method for forming an integrated circuit device, e.g., memory, logic. The method includes providing a semiconductor substrate (e.g., silicon wafer) comprising a surface region and forming a polysilicon layer overlying the surface region. Preferably, the polysilicon layer is doped w
7612980 Method and structure for electrostatic discharge protection of photomasks November 3, 2009
A mask for manufacturing integrated circuits and use of the mask. The mask has a mask substrate. The mask also has an active mask region within a first portion of the mask substrate. The active region is adapted to accumulate a pre-determined level of static electricity. The mask also
7611945 Method and resulting structure for fabricating DRAM capacitor structure November 3, 2009
A method for forming a capacitor structure for a dynamic random access memory device. The method includes forming a device layer overlying a semiconductor substrate, e.g., silicon wafer. The method includes forming a first interlayer dielectric overlying the device layer and forming a
7605470 Dummy patterns and method of manufacture for mechanical strength of low K dielectric materials i October 20, 2009
A method for fabricating a semiconductor device. The method includes providing a semiconductor substrate including a surface region. The method forms a first interlayer dielectric overlying the surface region and forms an interconnect layer overlying the first interlayer dielectric l
7598179 Techniques for removal of photolithographic films October 6, 2009
Techniques for removal of photolithographic films used in the manufacture of semiconductor devices are provided. A substrate support member of a first processing chamber includes at least three retractable pins capable of elevating a wafer from a surface of the substrate support member.
7595205 Using reverse arrangement for trend test in statistical process control for manufacture of semic September 29, 2009
A method for manufacturing semiconductor devices or other types of devices and/or entities. The method includes providing a process (e.g., etching, deposition, implantation) associated with a manufacture of a semiconductor device/ The method includes collecting a plurality informatio
7591659 Method and structure for second spacer formation for strained silicon MOS transistors September 22, 2009
A method for forming a CMOS semiconductor wafer. The method includes providing a semiconductor substrate (e.g., silicon wafer) and forming a dielectric layer (e.g., silicon dioxide, silicon oxynitride) overlying the semiconductor substrate. The method includes forming a gate layer ov
7582522 Method and device for CMOS image sensing with separate source formation September 1, 2009
A method and device for image sensing. The method includes forming a first well and a second well in a substrate, forming a gate oxide layer on the substrate, and depositing a first gate region and a second gate region on the gate oxide layer. The first gate region is associated with the
7582517 Method for making split dual gate field effect transistor September 1, 2009
A method for making a semiconductor device with at least two gate regions. The method includes providing a substrate region including a surface. Additionally, the method includes forming a source region in the substrate region by at least implanting a first plurality of ions into the
7579271 Method for forming low dielectric constant fluorine-doped layers August 25, 2009
A method for forming a semiconductor device is provided. In one embodiment, the method includes providing a semiconductor substrate with a surface region. The surface region includes one or more layers overlying the semiconductor substrate. In addition, the method includes depositing
7573285 Multiple point gate oxide integrity test method and system for the manufacture of semiconductor August 11, 2009
A method for testing a semiconductor wafer using an in-line process control, e.g., within one or more manufacturing processes in a wafer fabrication facility and/or test/sort operation. The method includes transferring a semiconductor wafer to a test station. The method includes appl
7569487 Method for atomic layer deposition of materials using a pre-treatment for semiconductor devices August 4, 2009
A method for forming atomic layer deposition. The method includes placing a semiconductor substrate (e.g., wafer, LCD panel) including an upper surface in a chamber. The upper surface includes one or more carbon bearing species and a native oxide layer. The method includes introducing
7557031 Etch back with aluminum CMP for LCOS devices July 7, 2009
A method for manufacturing an LCOS device includes forming an interlayer dielectric layer overlying a surface region of a substrate. The interlayer dielectric layer is patterned to form a plurality of recessed regions. Each of the recessed regions corresponds to a pixel element for a
7557000 Etching method and structure using a hard mask for strained silicon MOS transistors July 7, 2009
A method for forming an strained silicon integrated circuit device. The method includes providing a semiconductor substrate and forming a dielectric layer overlying the semiconductor substrate. The method also includes forming a gate layer overlying the dielectric layer and forming a
7554366 CMOS driving circuit June 30, 2009
A CMOS driving circuit, wherein an output buffer stage with a transistor switch is added to the final buffer stage of a conventional CMOS driving circuit to drive a power transistor. The output buffer stage has two input terminals for DC input voltage, and uses the high voltage of a
7547595 Integration scheme method and structure for transistors using strained silicon June 16, 2009
A method for forming CMOS integrated circuits. The method forms a blanket layer of silicon dioxide overlying an entirety of the surface region of a first well region and a second well region provided on a semiconductor substrate. The blanket layer of silicon dioxide is overlying the hard
7545201 System and method for switching between high voltage and low voltage June 9, 2009
A system and method for providing a voltage. The system includes a first transistor including a first gate, a first terminal, and a second terminal. The first terminal is configured to receive a first predetermined voltage, and the first gate is configured to receive a first control
7541827 BGA package holder device and method for testing of BGA packages June 2, 2009
An apparatus for supporting BGA packages for one or more testing processes is disclosed. The apparatus includes a substrate member. The substrate member has a plurality of contact pads, with each of the contact pads being spatially disposed around a peripheral region of the substrate. Th
7534711 System and method for direct etching May 19, 2009
System and method for direct etching. According to an embodiment, the present invention provides a method for manufacturing an integrated circuit device. The method includes a step for providing a substrate having a contact region, which is provided between a first word line and a se
7527993 Method and structure for fabricating smooth mirrors for liquid crystal on silicon devices May 5, 2009
A method for fabricating a liquid crystal on silicon display device. The method includes providing a substrate, e.g., silicon wafer. The method includes forming a transistor layer overlying the substrate. Preferably, the transistor layer has a plurality of MOS devices therein. The method
7521955 Method and system for device characterization with array and decoder April 21, 2009
A system and method for testing devices. The system includes a plurality of pads and a decoder coupled to a plurality of devices. The decoder is configured to receive a plurality of selection signals from the plurality of pads and select a device from the plurality of devices based on at
7507656 Method and structure for low k interlayer dielectric layer March 24, 2009
An integrated circuit interconnect structure. The structure includes a substrate and a layer of transistor elements overlying the substrate. A first interlayer dielectric layer is formed overlying the layer of transistor elements. An etch stop layer is formed overlying the first inte
7504269 Method for treatment of samples for auger electronic spectrometer (AES) in the manufacture of in March 17, 2009
A method for analyzing a sample for the manufacture of integrated circuits, e.g. MOS transistors, application specific integrated circuits, memory devices, microprocessors, system on a chip. The method includes providing an integrated circuit chip, which has a surface area with at le
7501643 Method for controlling charge amount of ion beam and a wafer applied in the method March 10, 2009
A method of controlling charge amount of an ion beam, includes providing a semiconductor wafer; forming an insulation layer on the surface of the wafer, with gaps between parts of the insulation layer dividing the surface of the wafer into an open region and a narrow and long region;
7491952 Method for controlling charge amount of ion beam and a wafer applied in the method February 17, 2009
A method of controlling charge amount of an ion beam includes: providing a semiconductor wafer; forming insulation layer on the surface of the wafer, with gaps between the insulation layer dividing the surface of the wafer into an open region and a narrow and long region; implanting an i
7473595 Method for decreasing PN junction leakage current of dynamic random access memory January 6, 2009
A method for decreasing a PN junction leakage current of a dynamic random access memory (DRAM), including the steps of: preparing an NMOS transistor formed on a P-type silicon substrate and comprising a drain; forming an insulation oxide layer on the P-type silicon substrate; etching
7468283 Method and resulting structure for fabricating test key structures in DRAM structures December 23, 2008
A method for fabricating test structures on a wafer for integrated circuits. The method includes providing a semiconductor substrate, e.g., silicon wafer. The method includes forming a plurality of integrated circuit chip structures on the semiconductor substrate and forming a plural
7462556 Method of forming low stress multi-layer metallurgical structures and high reliable lead free so December 9, 2008
Techniques for manufacturing a bond pad structure are provide. A method includes providing a substrate. A metal pad and passivation layer are formed over the substrate. The passivation layer includes an opening to expose a portion of the metal pad. A first film is deposited at least
7462497 Method and system for derivation of breakdown voltage for MOS integrated circuit devices December 9, 2008
A method and system for multi-point (e.g., double-point) GOI test that can efficiently judge failure modes by testing only two points. We can measure leakage currents at only two voltages, which are the cut points of mode A-B and B-C, instead of the whole ramped voltages to save time
7456067 Method with high gapfill capability for semiconductor devices November 25, 2008
A method of performing an STI gapfill process for semiconductor devices is provided. In a specific embodiment of the invention, the method includes forming an stop layer overlying a substrate. In addition, the method includes forming a trench within the substrate, with the trench having
7451553 Clean room safety shoe article with removal steel toe housing and method for treating the shoe November 18, 2008
A clean room shoe article, e.g., shoe, boot, safety shoe, safety boot. The article has a sole region. The article has an upper particle free polymer material having a toe region and an ankle region. The upper particle free polymer material is coupled to the sole region. The upper particl
7447610 Method and system for reliability similarity of semiconductor devices November 4, 2008
A method and system for reliability similarity of semiconductor devices. The method includes providing a first plurality of semiconductor devices, providing a second plurality of semiconductor devices, and determining a first reliability associated with the first plurality of semiconduct
7443051 System and method for providing adaptive power supply to system on a chip October 28, 2008
A system and method for adaptively providing a power supply voltage. The system includes an input/output subsystem configured to receive a first voltage, an analog subsystem configured to receive a second voltage and coupled to the input/output subsystem, a first digital subsystem co
7439538 Multi-purpose poly edge test structure October 21, 2008
A test structure in accordance with the present invention allows for testing of both V.sub.bd TDDB, and leakage current between adjacent gate features. The test structure comprises a plurality of parallel polysilicon gate structures overlying a substrate. Traces placing alternate gat
7427552 Method for fabricating isolation structures for flash memory semiconductor devices September 23, 2008
A method for fabricating integrated circuit devices, e.g., Flash memory devices, embedded Flash memory devices. The method includes providing a semiconductor substrate, e.g., silicon, silicon on insulator, epitaxial silicon. In a specific embodiment, the semiconductor substrate has a
7425488 Method and structure using a pure silicon dioxide hardmask for gate patterning for strained sili September 16, 2008
A partially completed semiconductor integrated circuit device. The device has a semiconductor substrate and a dielectric layer overlying the semiconductor substrate. The device has a gate structure including edges and a substantially pure silicon dioxide mask structure overlying the
7424700 Method and system for selective optical pattern compensation September 9, 2008
A method and system for making a photographic mask. The method includes determining a first contact area, processing information associated with the first contact area, and determining whether a first optical compensation should be applied to the first contact area based on at least
7414450 System and method for adaptive power supply to reduce power consumption August 19, 2008
A system and method for adaptively providing a power supply voltage. The system includes an oscillator configured to receive an output voltage and generate a firs signal. The first signal is associated with a first frequency and a first period. Additionally, the system includes a fre
7403047 System and method for power-on control of input/output drivers July 22, 2008
A system and method for controlling an input/output driver. The system includes a control system configured to receive a first supply voltage and a second supply voltage and generate a control signal, and a first transistor including a first gate, a first terminal, and a second termi
7396693 Multiple point gate oxide integrity test method and system for the manufacture of semiconductor July 8, 2008
A method for testing a semiconductor wafer using an in-line process control, e.g., within one or more manufacturing processes in a wafer fabrication facility and/or test/sort operation. The method includes transferring a semiconductor wafer to a test station. The method includes appl
7381636 Planar bond pad design and method of making the same June 3, 2008
Techniques for an integrated circuit device with planar bond pads are provided. A metal layer region is formed on a substrate. The integrated circuit device also includes a passivation layer that has an opening formed around the metal layer region. The passivation layer and a top sur
7372339 Phase lock loop indicator May 13, 2008
A phase-locked loop (PLL) circuit includes a power-on-reset (POR) to reset a digital block and set an initial input voltage value VCTRL of voltage-controlled oscillator (VCO). An input divider and a feedback divider are provided to set the frequency ratio of output to input and to ra
7368989 High bandwidth apparatus and method for generating differential signals May 6, 2008
An apparatus and method for generating differential signals. The apparatus includes a first operational amplifier receiving a first signal, a second operational amplifier receiving a second signal, and a first transistor. The first transistor includes a first gate, a first terminal, and
7353124 Device and method for voltage regulator with low standby current April 1, 2008
An apparatus and method for providing a reference voltage for regulating voltage levels. The apparatus includes a first voltage generation system configured to receive a first control signal and output a calibration voltage, a voltage adjustment system configured to receive the calib
7352210 Device and method for voltage regulator with stable and fast response and low standby current April 1, 2008
An apparatus and method for regulating voltage levels. The apparatus includes a first transistor and a second transistor. The first transistor and the second transistor are each coupled to a first current source and a second current source. Additionally, the apparatus includes a third
7345500 Method and system for device characterization with array and decoder March 18, 2008
A system and method for testing devices. The system includes a plurality of pads and a decoder coupled to a plurality of devices. The decoder is configured to receive a plurality of selection signals from the plurality of pads and select a device from the plurality of devices based on at
7335566 Polysilicon gate doping method and structure for strained silicon MOS transistors February 26, 2008
A method of fabricating an integrated circuit including strained silicon bearing regions. The method forms a blanket layer of material having an initial thickness overlying a source region, a drain region, and a gate structure of an MOS device to cover an upper surface of the gate st
7335546 Method and device for CMOS image sensing with separate source formation February 26, 2008
A method and device for image sensing. The method includes forming a first well and a second well in a substrate, forming a gate oxide layer on the substrate, and depositing a first gate region and a second gate region on the gate oxide layer. The first gate region is associated with the
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