| Patent Number |
Title Of Patent |
Date Issued |
| 6077026 |
Programmable substrate support for a substrate positioning system |
June 20, 2000 |
| A programmable substrate support including a first substrate support that mates with a second substrate support to enable automatic switching between different types of substrates. The first substrate support is configured to support a first type of substrate and to mount to a substr |
| 5853214 |
Aligner for a substrate carrier |
December 29, 1998 |
| A substrate aligner for a substrate carrier or cassette including an engagement assembly for moving and maintaining one or more substrates into an aligned position when closed, and an actuator assembly for opening and closing the engagement assembly. In one embodiment, the engagement |
| 5834915 |
Sustrate housing and docking system |
November 10, 1998 |
| A modular, transportable housing for storing substrates, such as semi-conductor wafers and masks, and for maintaining such substrates in a substantially clean environment. Substrates are supported within the housing by a plurality of combs which maintain the substrates in spaced rela |
| 5823361 |
Substrate support apparatus for a substrate housing |
October 20, 1998 |
| A substrate support apparatus for supporting one or more substrates in a substrate carrier for achieving a minimum amount of sagging of the substrates. A first support rod is positioned to support one side of each substrate along a first support contact line and a second support rod is |
| 5785186 |
Substrate housing and docking system |
July 28, 1998 |
| A modular, transportable for storing substrates, such as semi-conductor wafers and masks, and for maintaining such substrates in a substantially clean environment. Substrates are supported within the housing by a plurality of combs which maintain the substrates in spaced relationship |
| 5664926 |
Stage assembly for a substrate processing system |
September 9, 1997 |
| A stage assembly for a substrate processing system including a cassette support assembly for receiving and supporting a cassette and an actuation and support assembly for supporting and moving the cassette and cassette support assembly between a loading position and a processing position |
