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Park; Jea-Gun Patents |
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Assignee: Park; Jea-Gun
Address: Seongnam, KR
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7338882 |
Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same |
March 4, 2008 |
| A method of fabricating a nano silicon on insulator (SOI) wafer having an excellent thickness evenness without performing a chemical mechanical polishing (CMP) and a wafer fabricated by the same are provided. The provided method includes preparing a bond wafer and a base wafer, and f |
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