| Patent Number |
Title Of Patent |
Date Issued |
| 6729040 |
Apparatus and method for drying a substrate using hydrophobic and polar organic compounds |
May 4, 2004 |
| A dryer for drying a substrate includes: a bath containing a fluid; a chamber; and a delivery system supplying a polar organic compound, such as isopropyl alcohol, and a hydrophobic organic compound, such as hydrofluoroether, to the interface between the substrate and the fluid as th |
| 6625901 |
Apparatus and method for drying a thin substrate |
September 30, 2003 |
| A dryer for drying a substrate includes: a bath containing a fluid; a chamber; and an isopropyl alcohol delivery system supplying isopropyl alcohol vapor to the interface between the substrate and the fluid when the substrate is removed from the fluid of the bath into the chamber. The |
| 6625835 |
Disk cascade scrubber |
September 30, 2003 |
| A cascaded disk scrubbing system and method are provided. The cascaded disk scrubbing system includes an array of rows of brush pairs. Each row includes a plurality of counter-rotating brush pairs that are arranged horizontally and longitudinally, and configured to receive and process a |
| 6615510 |
Wafer drying apparatus and method |
September 9, 2003 |
| Liquid is removed from wafers for drying a wafer that has been wet in a liquid bath. The wafer and the bath are separated at a controlled rate as the wafer is positioned in a gas-filled volume. The controlled rate is generally not less than the maximum rate at which a meniscus will form |
| 6588043 |
Wafer cascade scrubber |
July 8, 2003 |
| A cascaded wafer scrubbing system and method are provided. The cascaded wafer scrubbing system includes an array of rows of brush pairs. Each row includes a plurality of counter-rotating brush pairs that are arranged horizontally and longitudinally, and configured to receive and process |
| 6477786 |
Apparatus for drying batches of disks |
November 12, 2002 |
| Liquid is removed from batches of substrates by apparatus and methods for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume at rates of movement selected according to the location of the |
| 6439978 |
Substrate polishing system using roll-to-roll fixed abrasive |
August 27, 2002 |
| A substrate polishing system includes two hollow drums and motors for driving the drums in a reciprocating manner. An abrasive tape wound on supply and takeup rollers is introduced, with the supply roller mounted inside one of the drums and the takeup roller mounted inside the other |
| 5875507 |
Wafer cleaning apparatus |
March 2, 1999 |
| An apparatus for cleaning a wafer oriented vertically is provided. The apparatus includes a first brush and a second brush located horizontally from the first brush. During use, a wafer is orientated vertically between the first and second brushes. The brushes are brought into contact wi |
| 5778554 |
Wafer spin dryer and method of drying a wafer |
July 14, 1998 |
| In a spin dryer for semiconductor wafers, the wafer is held beneath a platen with its active side (i.e., the side containing the components or circuitry) facing upward. One or more nozzles spray rinse water on the top surface of the wafer and the wafer is rotated to remove the excess rin |
| 5490809 |
System and method for texturing magnetic data storage disks |
February 13, 1996 |
| In the texturing unit of this invention a data storage disk is gripped between a pair of opposed, counter-rotating cylindrical abrasive mandrels, which are covered with soft, porous pads. The frictional force between the disk and the pads raises the edge of the disk against a pair of dri |
| 5486134 |
System and method for texturing magnetic data storage disks |
January 23, 1996 |
| In the texturing unit of this invention a data storage disk is gripped between a pair of opposed, counter-rotating cylindrical abrasive mandrels, which are covered with soft, porous pads. The frictional force between the disk and the pads raises the edge of the disk against a pair of dri |
