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OEM Group Inc. Patents
Assignee:
OEM Group Inc.
Address:
Gilbert, AZ
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
7955870 Dry etch stop process for eliminating electrical shorting in MRAM device structures June 7, 2011
The present invention relates generally to semiconductor fabrication and particularly to fabricating magnetic tunnel junction devices. In particular, this invention relates to a method for using the dielectric layer in tunnel junctions as an etch stop layer to eliminate electrical sh

 
 
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