| Patent Number |
Title Of Patent |
Date Issued |
| 4676008 |
Cage-type wafer carrier and method |
June 30, 1987 |
| A cage-type wafer carrier is provided which can be loaded and unloaded with semiconductor wafers by means of an automatic wafer transfer machine. No large slots are required in the bottom section of the cage-type carrier for allowing elevator lifts to pass therethrough to engage the wafe |
| 4653636 |
Wafer carrier and method |
March 31, 1987 |
| A quartz wafer boat or carrier includes three slotted parallel members, each member including a plurality of grooves aligned with corresponding slots in the other members, for carrying semiconductor wavers in precise spaced parallel relationship to each other. The bottom member is locate |
| 4573851 |
Semiconductor wafer transfer apparatus and method |
March 4, 1986 |
| An apparatus for transferring wafers between carriers with different wafer spacings and different wafer capacities includes an elevator with two sets of wafer supporting grooves that extend through a carrier to lift wafers from it to a temporary holding region whereat the first and secon |
| 4566839 |
Semiconductor wafer diffusion boat and method |
January 28, 1986 |
| A quartz diffusion boat for carrying semiconductor wafers during very high temperature semiconductor manufacturing operations includes first and second quartz rails having first and second sets of wafer supporting grooves, respectively. Each wafer supporting groove of the first set i |
| 3949891 |
Semiconductor wafer transfer device |
April 13, 1976 |
| A device for permitting the simultaneous transfer of a plurality of silicon wafers from one wafer carrier to another, and particularly for permitting a mass transfer between carriers having different wafer spacings. The device comprises two rectangular frames with a portion of the upper |
