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Memsmart Semiconductor Corp. Patents
Assignee:
Memsmart Semiconductor Corp.
Address:
Hsinchu, TW
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
7935556 Microelectromechanical system and process of making the same May 3, 2011
A micro electromechanical system and a fabrication method thereof, which has trenches formed on a substrate to prevent circuits from interfering each other, and to prevent over-etching of the substrate when releasing a microstructure.
7863063 Method for fabricating a sealed cavity microstructure January 4, 2011
A method for fabricating a sealed cavity microstructure comprises the steps of: forming an insulation layer with a micro-electro-mechanical structure on an upper surface of a silicon substrate, the micro-electro-mechanical structure includes at least one suspended structure and at le
7666702 Method for fabricating a microstructure February 23, 2010
A method for fabricating a microstructure is to form at least one insulation layer including a micro-electro-mechanical structure therein over an upper surface of a silicon substrate. The micro-electro-mechanical structure includes at least one microstructure and a metal sacrificial

 
 
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