| Patent Number |
Title Of Patent |
Date Issued |
| 7374335 |
In situ optical surface temperature measuring techniques and devices |
May 20, 2008 |
| A luminescent temperature sensor comprising (i) an object having a recess, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temper |
| 7080940 |
In situ optical surface temperature measuring techniques and devices |
July 25, 2006 |
| A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the contact toward the obj |
| 7042581 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects |
May 9, 2006 |
| A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over an angle that depends on the extend of the illumination angle. An emissivity measurement is made for the surface, and |
| 6934040 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects |
August 23, 2005 |
| A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over an angle that depends on the extend of the illumination angle. An emissivity measurement is made for the surface, and, |
| 6654132 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects |
November 25, 2003 |
| A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over an angle that depends on the extend of the illumination angle. An emissivity measurement is made for the surface, and, |
| 6572265 |
In situ optical surface temperature measuring techniques and devices |
June 3, 2003 |
| A temperature sensor utilizing optical temperature measuring techniques is constructed to make firm contact with a surface whose temperature is being measured, an example application being the monitoring of semiconductor wafers or flat panel displays while being processed. A cap is mount |
| 6570662 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects |
May 27, 2003 |
| A characteristic of a surface is measured by illuminating the surface with optical radiation over a wide angle and receiving radiation reflected from the surface over a wide angle. An emissivity measurement can then be made for the surface, and, alternatively, if a reflectivity measureme |
| 6426232 |
Optical techniques of measuring endpoint during the processing of material layers in an opticall |
July 30, 2002 |
| In a process of selectively removing material from an exposed layer carried by a substrate, a technique for determining endpoint by monitoring the intensity of a radiation beam that is passed through the substrate an any intervening layers to be reflected off the layer being processed. T |
| 6406641 |
Liquid etch endpoint detection and process metrology |
June 18, 2002 |
| A semiconductor process endpoint detection system uses a relatively wide wavelength range of light to reflect off a semiconductor wafer being processed. Relatively narrow wavelength ranges can be monitored within this wide reflected wavelength range in order to produce an endpoint of |
| 6222632 |
Polarization interferometer spectrometer with rotatable birefringent element |
April 24, 2001 |
| An instrument for determining spectral content of an input light. The instrument has a rotating optical element that separates an input light into two partial beams and thereby introduces a variable OPD between the partial beams. The instrument then records an interferogram as a function |
| 6110752 |
Optical techniques of measuring endpoint during the processing of material layers in an opticall |
August 29, 2000 |
| In a process of selectively removing material from an exposed layer carried by a substrate, a technique for determining endpoint by monitoring the intensity of a radiation beam that is passed through the substrate and any intervening layers to be reflected off the layer being processed. |
| 6077452 |
Optical techniques of measuring endpoint during the processing of material layers in an opticall |
June 20, 2000 |
| In a process of selectively removing material from an exposed layer carried by a substrate, a technique for determining endpoint by monitoring the intensity of a radiation beam that is passed through the substrate and any intervening layers to be reflected off the layer being processed. |
| 6028669 |
Signal processing for in situ monitoring of the formation or removal of a transparent layer |
February 22, 2000 |
| The deposition material on, or removal of material from, an article, such as on an exposed surface of an intermediate integrated circuit structure, is optically monitored. The processes that are so monitored include the formation of a dielectric layer on a semiconductor wafer, and the re |
| 6010538 |
In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via |
January 4, 2000 |
| In an apparatus for removing material from an article, such as an exposed surface of an intermediate integrated circuit structure, by planarizing, polishing, etching or the like, a sensor is mechanically coupled to a moving carrier of the article for directing through the article to its |
| 5946082 |
Interference removal |
August 31, 1999 |
| An improved method for minimizing interferences from random noise and correlated fluctuations which obscure electrical signals converted from optical emissions. In particular, an improved method for the removal of interferences from optical emission signals during endpoint determination |
| 5897610 |
Electro optical board assembly for measuring the temperature of an object surface from infra red |
April 27, 1999 |
| An automatic gain control technique integrates samples of an incoming analog signal a controlled amount of time so that the magnitudes of the samples lie within the desired input window of an analog-to-digital converter or other signal processing device. The values of the samples are |
| 5891352 |
Optical techniques of measuring endpoint during the processing of material layers in an opticall |
April 6, 1999 |
| In a process of selectively removing material from an exposed layer carried by a substrate, a technique for determining endpoint by monitoring the intensity of a radiation beam that is passed through the substrate and any intervening layers to be reflected off the layer being processed. |
| 5786886 |
Interference removal |
July 28, 1998 |
| An improved method for minimizing interferences from random noise and correlated fluctuations which obscure electrical signals converted from optical emissions. In particular, an improved method for the removal of interferences from optical emission signals during endpoint determination |
| 5769540 |
Non-contact optical techniques for measuring surface conditions |
June 23, 1998 |
| Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measuring the combined intensities (53) |
| 5717608 |
Electro-optical board assembly for measuring the temperature of an object surface from infra-red |
February 10, 1998 |
| An automatic gain control technique integrates samples of an incoming analog signal a controlled amount of time so that the magnitudes of the samples lie within the desired input window of an analog-to-digital converter or other signal processing device. The values of the samples are |
| 5695660 |
Optical techniques of measuring endpoint during the processing of material layers in an opticall |
December 9, 1997 |
| In a process of selectively removing material from an exposed layer carried by a substrate, a technique for determining endpoint by monitoring the intensity of a radiation beam that is passed through the substrate and any intervening layers to be reflected off the layer being processed. |
| 5600147 |
Temperature measuring system having improved signal processing and multiple optical sensors |
February 4, 1997 |
| A single channel electronic system for measuring a parameter, such as temperature, by a single sensor or multiple sensors that each include luminescent material. A parameter dependent characteristic, such as decay time, of the sensor's luminescence radiation emitted in response to ap |
| 5499733 |
Optical techniques of measuring endpoint during the processing of material layers in an opticall |
March 19, 1996 |
| In a process of selectively removing material from an exposed layer carried by a substrate, a technique for determining endpoint by monitoring the intensity of a radiation beam that is passed through the substrate and any intervening layers to be reflected off the layer being processed. |
| 5490728 |
Non-contact optical techniques for measuring surface conditions |
February 13, 1996 |
| Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measuring the combined intensities (53) |
| 5470155 |
Apparatus and method for measuring temperatures at a plurality of locations using luminescent-ty |
November 28, 1995 |
| A system for measuring a parameter, such as temperature, by multiple sensors that include luminescent material. A parameter dependent characteristic, such as decay time, of each sensor's luminescence radiation emitted in response to appropriate excitation, such as in the form of a pu |
| 5464284 |
Autocalibrating non-contact temperature measuring technique employing dual recessed heat flow se |
November 7, 1995 |
| A non-contact temperature measuring system and a dual-reference body structure employed therein is described, wherein a moving object whose temperature is to be determined, is passed by first and second reference bodies having a same form factor with respect to the moving object. Each |
| 5414266 |
Measuring system employing a luminescent sensor and methods of designing the system |
May 9, 1995 |
| A system for measuring a parameter, such as temperature, includes a sensor of that parameter, such as a luminescent material based sensor at an end of an optical fiber, and an electro-optic module connected to the sensor, such as through the optical fiber, in order to measure changes in |
| 5364186 |
Apparatus and method for monitoring a temperature using a thermally fused composite ceramic blac |
November 15, 1994 |
| A blackbody high temperature probe is formed by thermally fusing a coating of composite ceramic material on the tip of a high temperature lightpipe or fiber. The ceramic coating replaces conventional sputtered metallic thin films to form a blackbody optical cavity. The ingredients of the |
| 5362969 |
Processing endpoint detecting technique and detector structure using multiple radiation sources |
November 8, 1994 |
| A detector structure and technique for non-contact monitoring of a process being performed on a surface, such as in semiconductor wafer integrated circuit processing and flat panel display substrate processing, in order to determine when the process has reached endpoint. In one embodimen |
| 5351268 |
Modular luminescence-based measuring system using fast digital signal processing |
September 27, 1994 |
| A luminescence-based integrated optical and electronic system for measuring temperature or some other parameter from the decay time of a luminescent sensor is disclosed. A high bandwidth, low noise amplifier applies a detected decaying luminescent signal to a digital system that acquires |
| 5318362 |
Non-contact techniques for measuring temperature of radiation-heated objects |
June 7, 1994 |
| A non-contact pyrometric technique is provided for measuring the temperature and/or emissivity of an object that is being heated by electromagnetic radiation within the optical range. The measurement is made at short wavelengths for the best results. The measurement may be made at wa |
| 5310260 |
Non-contact optical techniques for measuring surface conditions |
May 10, 1994 |
| Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measuring the combined intensities (53) |
| 5308447 |
Endpoint and uniformity determinations in material layer processing through monitoring multiple |
May 3, 1994 |
| Techniques of monitoring and controlling removal or forming of layers of material, such as employed in the manufacture of flat panel displays and integrated circuit wafers. Examples of material removal include the development of a photoresist layer and etching of layers of other material |
| 5304809 |
Luminescent decay time measurements by use of a CCD camera |
April 19, 1994 |
| A video camera of a type using an array of charge coupled devices (CCDs) is utilized to measure a condition, such as temperature, by imaging onto the camera a luminescent signal which contains information of the signal's decay time. The luminescent decay time is measured by comparing, su |
| 5294200 |
Autocalibrating dual sensor non-contact temperature measuring device |
March 15, 1994 |
| A device for measuring the temperature of an external moving filament is disclosed. The device includes dual thermal sinks or reference bodies; each reference body has two heat flow sensors that are matched in sensitivity and are connected in series. By utilizing dual thermal referen |
| 5216625 |
Autocalibrating dual sensor non-contact temperature measuring device |
June 1, 1993 |
| A method and apparatus for measuring the temperature of an external body is disclosed. The apparatus comprises dual thermal sinks or reference bodies wherein heat flow sensors are mounted. By utilizing dual thermal reference bodies, which are at different temperatures, the method of the |
| 5190614 |
Method of endpoint detection and structure therefor |
March 2, 1993 |
| Methods and apparatus for enhancing the accuracy for detecting the endpoint of certain operations (such as etching, photoresist development or chemical reaction) in the processing of materials which results in a change in the reflectivity or refractive index of the material are provi |
| 5183338 |
Temperature measurement with combined photo-luminescent and black body sensing techniques |
February 2, 1993 |
| High temperature range black body techniques are combined with lower temperature range photoluminescent techniques to provide an optical method and apparatus for measuring temperature over a very wide range. Among the various optical probe configurations disclosed which combine the black |
| 5166080 |
Techniques for measuring the thickness of a film formed on a substrate |
November 24, 1992 |
| The thickness of a thin film on a substrate surface is determined by measuring its emissivity and temperature with a non-contact optical technique and then calculating the film thickness from these measurements. The thickness of the film can be determined by this technique in situ, w |
| 5154512 |
Non-contact techniques for measuring temperature or radiation-heated objects |
October 13, 1992 |
| A non-contact pyrometric technique is provided for measuring the temperature and/or emissivity of an object that is being heated by electromagnetic radiation within the optical range. The measurement is made at short wavelengths for the best results. The measurement may be made at wa |
| 5112137 |
Temperature measurement with combined photo-luminescent and black body sensing techniques |
May 12, 1992 |
| High temperature range black body techniques are combined with lower temperature range photoluminescent techniques to provide an optical method and apparatus for measuring temperature over a very wide range. Various optical probe configurations are disclosed which combine the black body |
| 5110216 |
Fiberoptic techniques for measuring the magnitude of local microwave fields and power |
May 5, 1992 |
| Fiberoptic sensors of various configurations are provided for measuring the magnitude of the electric or magnetic fields, and thereby the power, at local points within a relatively high-power electromagnetic heating environment such as occurs, for example, in a microwave oven or an i |
| 5109595 |
Method of making a fiberoptic sensor of a microwave field |
May 5, 1992 |
| Fiberoptic sensors of various configurations are provided for measuring the magnitude of the electric or magnetic fields, and thereby the power, at local points within a relatively high-power electromagnetic heating environment such as occurs, for example, in a microwave oven or an i |
| 5107445 |
Modular luminescence-based measuring system using fast digital signal processing |
April 21, 1992 |
| A luminescence-based integrated optical and electronic system for measuring temperature or some other parameter from the decay time of a luminescent sensor is disclosed. A high bandwidth, low noise amplifier applies a detected decaying luminescent signal to a digital system that acquires |
| 5099681 |
Knock detector using optical fiber thermometer |
March 31, 1992 |
| A knock detector for an internal combustion engine includes a pair of optical fiber thermometers that sense variations in heat flow within an engine cylinder. Each optical fiber thermometer includes a black body emitter disposed inside the cylinder which is heated by combustion gases |
| 5052214 |
Knock detector using optical fiber thermometer |
October 1, 1991 |
| A knock detector for an internal combustion engine includes an optical fiber thermometer that senses variations in heat flow within an engine cylinder. The optical fiber thermometer includes a black body emitter disposed inside the cylinder which is heated by combustion gases to prov |
| 5024532 |
Dew point measuring apparatus installation system |
June 18, 1991 |
| A dew point temperature measuring apparatus is positioned in a sample flow channel that withdraws a sample of a gaseous atmosphere within an enclosure for measuring the dew point temperature of the gaseous atmosphere from which its humidity may be determined. The dimensions of the sa |
| 4988212 |
Fiberoptic sensing of temperature and/or other physical parameters |
January 29, 1991 |
| Several specific types of optical sensors capable of measuring temperature, pressure, force, acceleration, radiation and electrical fields, fluid level, vapor pressure, and the like, are disclosed, along with an electro-optical system for detecting the optical signal developed by the |
| 4986671 |
Three-parameter optical fiber sensor and system |
January 22, 1991 |
| A single sensor is provided as part of a fiberoptic probe to measure up to three parameters, namely pressure (or force or displacement), temperature, and heat flow or fluid velocity. A solid elastomeric optical element is formed at the end of optical fiber transmission medium, and adjace |
| 4897541 |
Sensors for detecting electromagnetic parameters utilizing resonating elements |
January 30, 1990 |
| To detect a physical parameter, a resonator is connected to a body which changes in dimension when subjected to the parameter. Thus, when the body changes in dimension in response to the parameter, the resonance frequency of the resonator is modulated thereby. Such modulations are detect |
