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Lambda Physik GmbH Patents
Assignee:
Lambda Physik GmbH
Address:
Goettingen, DE
No. of patents:
11
Patents:




Patent Number Title Of Patent Date Issued
6226307 Magnetic switch controlled power supply isolator and thyristor commutating circuit May 1, 2001
An isolation means used in conjunction with supplying energy to a laser, which isolates a power supply from the pulser circuit, and commutates a switch which activates the discharge of energy to the laser.
6219368 Beam delivery system for molecular fluorine (F2) laser April 17, 2001
A method and apparatus are provided for delivering a laser beam from a laser, such as an F.sub.2 laser, to a target through a sealed enclosure. The enclosure is evacuated and back-filled with an inert gas repeatedly for a number of times sufficient to adequately deplete any air, water,
6198761 Coaxial laser pulser with solid dielectrics March 6, 2001
A pulser with solid dielectrics including a pulse compressor and pulse transformer apparatus, which is able to produce short bursts of electrical energy at high voltage utilizing a coaxial structure. Both the transformer and the compressor utilize ferromagnetic cores having an inner and
6172329 Ablated laser feature shape reproduction control January 9, 2001
This invention concerns a process useful for increasing the accuracy of the shape of a laser ablated feature formed on a substrate, especially where the substrate is a polymeric article. The process includes irradiating the polymeric article with laser light that has passed through a ret
6160832 Method and apparatus for wavelength calibration December 12, 2000
A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunab
6160831 Wavelength calibration tool for narrow band excimer lasers December 12, 2000
An excimer laser system having a precisely calibratable absolute emission wavelength is provided wherein at least one source of reference light is used. The reference light may be a laser such as a HeNe laser or a cathode lamp such as a hollow Pt, As, C, or Fe cathode lamp. The reference
6157662 F.sub.2 (157nm) laser employing neon as the buffer gas December 5, 2000
An F.sub.2 -laser has a discharge chamber containing a laser gas mixture including fluorine as a laser active component and neon as a buffer gas. The gas mixture is surrounded by a resonator and supplied with a pulsed discharge by a pair of electrodes connected to a power supply circuit.
6081542 Optically pumped laser with multi-facet gain medium June 27, 2000
A solid state laser system that includes a resonant cavity, a gain medium disposed the resonant cavity and a plurality of optical pump sources. The resonant cavity is defined by an output coupler, a high reflector, and a plurality of retro-reflecting optical elements. The gain medium has
6002697 Diode pumped laser with frequency conversion into UV and DUV range December 14, 1999
A solid state laser is provided including a rare earth-doped YAG, YLF, YVO, GSGG, YALO or GdVO oscillator crystal, at least one laser diode pumping source, a Q-switch short pulse generator, a frequency doubling stage and frequency quadrupling or quintupling stages. The frequency quadrupl
5676866 Apparatus for laser machining with a plurality of beams October 14, 1997
An apparatus for laser machining by creating a plurality of discrete and separate beams which are sent to a deflecting device including a support and a plurality of individual elements that act independently and are individually controlled to machine different points on the workpiece
4534034 Discharge-pumped laser August 6, 1985
A discharge-pumped laser with a discharge tube (1) that contains a mixture (2) of gases, that has gas inlets (4) in the vicinity of its windows (3), that has a gas outlet (7), and that is connected by lines (10, 11) and by a circulating pump (8) to a purification device that is an electr

 
 
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