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Lam Resarch Corporation Patents |
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Assignee: Lam Resarch Corporation
Address: Fremont, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5708250 |
Voltage controller for electrostatic chuck of vacuum plasma processors |
January 13, 1998 |
| An r.f. excited vacuum plasma processor has a workpiece held in place by a monopolar or bipolar electrostatic chuck having an electrode that develops peak r.f. voltages over a wide amplitude range. A chuck DC power supply source is connected to the chuck. An r.f. peak detecting circuit c |
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