| Patent Number |
Title Of Patent |
Date Issued |
| 7424096 |
Systems and methods for tape advancement in laser produced plasma equipment |
September 9, 2008 |
| Disclosed herein are systems and methods for advancing tape/ribbon through a targeting area where laser ablation of the tape occurs in laser produced plasma equipment. Disclosed systems include a first positioning surface perpendicular to further positioning devices, where all of the |
| 7006540 |
Method and system for providing a pulse laser |
February 28, 2006 |
| The present application describes a system and method for providing a pulse laser may include a first reflector, a second reflector, a lasing module and a fast optical valve. The first reflector and the second reflector may form an optical cavity. The lasing module may be disposed at |
| 6999491 |
High intensity and high power solid state laser amplifying system and method |
February 14, 2006 |
| Systems and methods are provided for achieving high power and high intensity laser amplification. In a four-pass optical amplifying system, a linear polarized optical beam is directed by various optical elements four times through an optical amplifier. The optical amplifier is transv |
| 6977383 |
Method and apparatus for generating a membrane target for laser produced plasma |
December 20, 2005 |
| A method and apparatus for generating membrane targets for a laser induced plasma is disclosed herein. Membranes are advantageous targets for laser induced plasma because they are very thin and can be readily illuminated by high-power coherent light, such as a laser, and converted into p |
| 6717101 |
Method and apparatus for laser ablation of a target material |
April 6, 2004 |
| A method and apparatus for laser cutting a target material is disclosed. The method includes the steps of generating laser pulses from a laser system and applying the laser pulses to the target material so that the laser pulses cut through the material. The laser pulses have an appro |
| 6624431 |
High collection angle short wavelength radiation collimator and focusing optic |
September 23, 2003 |
| The present invention provides a high gain collimator producing generally uniform intensity profiles for use in lithography and other applications. A focusing optic is also provided. The collimator includes a reflector and guide channel. The guide channel preferably includes polycapillar |
| 6472295 |
Method and apparatus for laser ablation of a target material |
October 29, 2002 |
| A method and apparatus for laser cutting a target material is disclosed. The method includes the steps of generating laser pulses from a laser system and applying the laser pulses to the target material so that the laser pulses cut through the material. The laser pulses have an appro |
| 6389101 |
Parallel x-ray nanotomography |
May 14, 2002 |
| A parallel nanotomography imaging system is provided having an x-ray source, which is preferably a laser-based x-ray source that generates x-rays that are collected using a collector optic and are received in a composite objective assembly. The composite objective assembly includes p |
| 6307913 |
Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation |
October 23, 2001 |
| A shaped plasma discharge system is provided in which a shaped radiation source emits radiation at a desired frequency and in a desired shape. In one embodiment, a laser source provides an output beam at a desired intensity level to shaping optics. The shaping optics alters the output |
| 6016324 |
Short pulse laser system |
January 18, 2000 |
| A laser system which generates short duration pulses, such as under five nanoseconds at an energy level of up to a few milli-Joules per pulse (mJ/p) with near diffraction limited beam quality. A laser crystal is pumped (excited) by diode lasers. A resonator having at least two mirror |
