| Patent Number |
Title Of Patent |
Date Issued |
| 7623238 |
System for and method of reducing change caused by motor vibrations in ellipsometers, polarimete |
November 24, 2009 |
| A system and method which reduces change in locus of a beam of electromagnetic radiation which otherwise result from vibrations caused by operation of a motor which controls the rotation of an element which affects the beam. |
| 7623237 |
Sample investigating system |
November 24, 2009 |
| A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incide |
| 7619752 |
Sample orientation system and method |
November 17, 2009 |
| System and method for orienting the tilt and vertical position of samples in ellipsometer and the like systems. |
| 7567345 |
Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagn |
July 28, 2009 |
| A reflectometer, ellipsometer, polarimeter or the like system with aperture, focusing means, sample and optionally detector planes oriented so that the Scheimpflug condition is substantially met on incident and/or, optionally, reflection sides of a sample. In addition beneficial aper |
| 7554662 |
Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for invest |
June 30, 2009 |
| Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having a hole therethrough with a non-unity aspect ratio. |
| 7535566 |
Beam chromatic shifting and directing means |
May 19, 2009 |
| An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a first range of wavelengths, (eg. the Visible wavelengths), and simultaneously relatively |
| 7522279 |
System for and method of investigating the exact same point on a sample substrate with multiple |
April 21, 2009 |
| Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount. |
| 7518725 |
Temperature controlled lens |
April 14, 2009 |
| Quasi-achromatic multi-element lens(es), the elements of which are mounted with respect to one another in a temperature controlled mounting system, and the application thereof in focusing, (and/or colliminating), a spectroscopic electromagnetic beam into a very small, chromatically r |
| 7505134 |
Automated ellipsometer and the like systems |
March 17, 2009 |
| Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems. |
| 7492455 |
Discrete polarization state spectroscopic ellipsometer system and method of use |
February 17, 2009 |
| A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no |
| 7489400 |
System and method of applying xenon arc-lamps to provide 193 nm wavelengths |
February 10, 2009 |
| Application of Xenon arc-lamps to provide UV/deep UV wavelengths in spectrophotometer, reflectometer, ellipsometer, polarimeter or the like systems. |
| 7483148 |
Ellipsometric investigation of very thin films |
January 27, 2009 |
| Use of spectroscopic data obtained by investigation of a witness sample having a relatively thick dielectric on a surface thereof during deposition of a thin film onto the witness sample and onto a process sample having no, or a relatively thin dielectric on its surface, in character |
| 7477388 |
Sample masking in ellipsometer and the like systems including detection of substrate backside re |
January 13, 2009 |
| A system and method of preventing substrate backside reflected components in a beam of electromagnetic radiation caused to reflect from the surface of a sample in an ellipsometer or polarimeter system, involving placing a mask adjacent to the surface of the sample which allows electromag |
| 7468794 |
Rotating compensator ellipsometer system with spatial filter equivalent |
December 23, 2008 |
| Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low in |
| 7460230 |
Deviation angle self compensating substantially achromatic retarder |
December 2, 2008 |
| A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromag |
| 7450231 |
Deviation angle self compensating substantially achromatic retarder |
November 11, 2008 |
| A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromag |
| 7426030 |
Reduced gas flow purging system in reflectometer, ellipsometer, polarimeter and the like systems |
September 16, 2008 |
| Reflectometer, ellipsometer, polarimeter or the like system, which functionally comprise means for providing gas confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and NIR wavelengths of electromagnetic radiation is caused to be |
| 7385698 |
System and method of selectively monitoring sample front and backside reflections in ellipsomete |
June 10, 2008 |
| A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector means for independently intercepting electromagnetic radiation reflected from a sample frontside or backside, and methodology for pursuing less correlated determination of refractive ind |
| 7385697 |
Sample analysis methodology utilizing electromagnetic radiation |
June 10, 2008 |
| Simultaneous use of wavelengths in at least two ranges selected from RADIO, MICRO, FIR, IR, NIR-VIS-NUV, UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions. |
| 7349092 |
System for reducing stress induced effects during determination of fluid optical constants |
March 25, 2008 |
| A system for determination of optical constants of liquids, including provision for reducing stress induced effects while obtaining data. |
| 7345762 |
Control of beam spot size in ellipsometer and the like systems |
March 18, 2008 |
| Disclosed are system for and method of analyzing substantially the exact same spot size on a sample system with at least two wavelengths for which the focal lengths do not vary more than within an acceptable amount. |
| 7336361 |
Spectroscopic ellipsometer and polarimeter systems |
February 26, 2008 |
| A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, |
| 7333198 |
Sample orientation system and method |
February 19, 2008 |
| Disclosed are systems and methodology for orienting the vertical position, and tilt, of samples, as applied in ellipsometer and the like systems. |
| 7327456 |
Spectrophotometer, ellipsometer, polarimeter and the like systems |
February 5, 2008 |
| Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use. |
| 7317530 |
Combined spatial filter and relay systems |
January 8, 2008 |
| Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems. |
| 7317529 |
Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagn |
January 8, 2008 |
| Systems and methods for providing and enhancing electromagnetic radiation beam radial energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation emitted by a source thereof in a common direction, for achromatically reducing spot size on a sa |
| 7307724 |
Method of reducing the effect of noise in determining the value of a dependent variable |
December 11, 2007 |
| A method of reducing the effect of systematic and/or random noise during determination of dependent variable values, (eg. pseudo "n" and "k" and/or ellipsometric PSI and DELTA or mathematical equivalent vs. wavelength or angle of incidence), involving selecting a mathematical functio |
| 7304792 |
System for sequentially providing aberation corrected electromagnetic radiation to a spot on a s |
December 4, 2007 |
| A system for sequentially providing electromagnetic radiation to a spot on a sample at different angles of incidence, and after reflection therefrom into a detector. The system includes a plurality of spherical mirrors, and a refractive element for correcting aberration. |
| 7304737 |
Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiatio |
December 4, 2007 |
| Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete po |
| 7301631 |
Control of uncertain angle of incidence of beam from Arc lamp |
November 27, 2007 |
| A system for stabilizing the angle of incidence a beam of electromagnetic radiation from a vertically oriented Arc lamp onto a horizontally oriented sample surface. |
| 7283234 |
Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal |
October 16, 2007 |
| Improved methodology for monitoring deposition or removal of material to or from a process and/or wittness substrate which demonstrates a negative e1 at some wavelength. The method involves detection of changes in P-polarized electromagnetism ellipsometric DELTA at SPR Resonance Angl |
| 7280194 |
Accurate determination of refractive indices of solid, fluid and liquid materials |
October 9, 2007 |
| Systems and methodology for determining not only precise and repeatable results, but accurate values of the refractive index of solids, fluids and liquids. |
| 7274450 |
Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems |
September 25, 2007 |
| A sample sequestering system which allows access to a subspace in a chamber encompassed generally enclosed space, for use in entering and removing a sample when the subspace is opened to atmosphere. Sufficient purge gas is flowed from within the generally enclosed space into the subs |
| 7268876 |
General virtual interface algorithm for in-situ spectroscopic ellipsometric data analysis |
September 11, 2007 |
| A method of characterizing the outermost material on an article manufactured by deposition or removal of material from its surface, which requires no prior knowledge of the composition of the article. |
| 7265839 |
Horizontal attenuated total reflection system |
September 4, 2007 |
| Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use. |
| 7265838 |
Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellip |
September 4, 2007 |
| Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam i |
| 7265835 |
System for implementing variable retarder capability in ellipsometer, polarimeter or the like sy |
September 4, 2007 |
| A system for implementing Berek-type variable retarder plate tipping capability in two orthogonal directions via tipping about a single axis, in combination with a means for rotating the orientation of the axis, having application in ellipsometer and polarimeter and the like systems. |
| 7253900 |
Ellipsometer or polarimeter and the like system with multiple detector element detector in envir |
August 7, 2007 |
| A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured |
| 7245376 |
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter |
July 17, 2007 |
| Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems. |
| 7239391 |
Method of analysis of multiple layer samples |
July 3, 2007 |
| Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, wherein an acquired data se |
| 7230699 |
Sample orientation system and method |
June 12, 2007 |
| Disclosed is a system comprising a stage with "X", "Y" and "Z" translation and "X", "Y" and optionally "Z" axes rotation capability, in combination with interrogation and monitoring means which act in functional combination to orient the surface of a sample so as to set an intended o |
| 7215424 |
Broadband ellipsometer or polarimeter system including at least one multiple element lens |
May 8, 2007 |
| Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively |
| 7215423 |
Control of beam spot size in ellipsometer and the like systems |
May 8, 2007 |
| System and methodology for controlling a beam spot size where it impinges onto a sample, and/or discriminant selection and analysis of data from detector elements in a two dimensional detector array which correspond to identified regions on a sample. |
| 7209234 |
Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness |
April 24, 2007 |
| A combined ellipsometer and oscillator system applied to a chamber for containing fluid, and method of decorrelated determination of thickness and optical constants of depostable materials present in a fluid. In use the ellipsometer determines the product of thickness and optical con |
| 7193710 |
Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element l |
March 20, 2007 |
| Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and |
| 7193709 |
Ellipsometric investigation of thin films |
March 20, 2007 |
| Use of differences in spectroscopic spectra resulting from multiple sample investigation, or sequential investigation of the same sample in evaluation of sample characterizing parameters such as ultra-thin film thickness. |
| 7193708 |
Time efficient method for investigating sample systems with spectroscopic electromagnetic radiat |
March 20, 2007 |
| Time efficient methodology for investigating a sample system using electromagnetic wavelengths which are not absorbed by oxygen and/or water vapor during evacuation or purging of a substantially enclosed space in which is present the sample system, followed by using wavelengths which |
| 7187443 |
Method of determining bulk refractive indicies of liquids from thin films thereof |
March 6, 2007 |
| Disclosed is a method for determination of bulk refractive indicies of flowable liquids utilizing thin films thereof on a roughened surface of a rigid or semi-rigid object. |
| 7167241 |
Dielectric function of thin metal films determined by combined transmission spectroscopic ellips |
January 23, 2007 |
| Determination of thin metal film dielectric function and layer thicknesses using simultaneous transmission spectroscopic ellipsometric (SE) and transmission intensity (T) measurements obtained in-situ to break correlation between thickness and optical constants of very thin absorbing |
| 7158231 |
Spectroscopic ellipsometer and polarimeter systems |
January 2, 2007 |
| A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, |
