| Patent Number |
Title Of Patent |
Date Issued |
| 5824204 |
Micromachined capillary electrophoresis device |
October 20, 1998 |
| A micromachined structure for handling fluids with an applied high voltage, i.e. for electrophoresis, includes a glass or other highly insulative substrate on which are formed very small diameter capillary channels of e.g. silicon nitride. Due to the absence of a silicon substrate, this |
| 5616863 |
Side surface mounted accelerometer assembly |
April 1, 1997 |
| Micro-machined accelerometer chips have a sensitive axis perpendicular to the principle surface of the device. In an application where the desired sensing direction is in the plane of a supporting printed circuit board, the accelerometer cannot be mounted directly on the printed circuit |
| 5533412 |
Pulsed thermal flow sensor system |
July 9, 1996 |
| A precise fluid flow meter fabricated by micromachining techniques measures a wide range of fluid flow rates. Two serial portions of an enclosed channel have different cross-sectional areas, and therefore different flow velocities. The fluid carries the thermal pulse through the flow cha |
| 5503016 |
Vertically mounted accelerometer chip |
April 2, 1996 |
| Micro-machined accelerometer chips have a sensitive axis perpendicular to the principle surface of the device. In an application where the desired sensing direction is in the plane of a supporting printed circuit board, the accelerometer cannot be mounted directly on the printed circuit |
| 5445006 |
Self-testable micro-accelerometer and method |
August 29, 1995 |
| An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference be |
| 5338400 |
Micromachining process for making perfect exterior corner in an etchable substrate |
August 16, 1994 |
| A process for forming a three-dimensional structure etched in a substrate with perfect convex corners includes partitioning the structure into two features such that the exterior corners are formed by the intersection of the two features; etching the first feature; forming an etch mask o |
| 5328559 |
Groove width trimming |
July 12, 1994 |
| A method for making a groove of a precise width in a substrate material. The groove may have any cross-sectional shape. The groove is formed by initially etching the substrate material. The groove width is then measured. The measured groove width is compared to the desired groove wid |
| 5271597 |
Bimetallic diaphragm with split hinge for microactuator |
December 21, 1993 |
| A microactuator of a silicon substrate having a frame with a central circular flexible diaphragm suspended from the substrate by a hinge. The hinge is a layer of silicon dioxide of uniform thickness which is formed by etching a groove in the silicon substrate and then conformally forming |
| 5184515 |
Single diaphragm transducer with multiple sensing elements |
February 9, 1993 |
| A transducer having a plurality of sensing elements disposed in a single diaphragm wherein each of the sensing elements is spaced from every other of the sensing elements a predetermined distance so as to control interference among the sensing elements. Each of the sensing elements p |
| 5177579 |
Semiconductor transducer or actuator utilizing corrugated supports |
January 5, 1993 |
| A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-ba |
| 5116457 |
Semiconductor transducer or actuator utilizing corrugated supports |
May 26, 1992 |
| A semiconductor transducer or acutator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-ba |
| 5103667 |
Self-testable micro-accelerometer and method |
April 14, 1992 |
| An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference be |
| 5069419 |
Semiconductor microactuator |
December 3, 1991 |
| A semiconductor microactuator has a silicon semiconductor substrate having suspension means connected thereto. The suspension means has a first layer of material having a first thermal expansion coefficient and a second layer of material having a second thermal expansion different than t |
| 5064165 |
Semiconductor transducer or actuator utilizing corrugated supports |
November 12, 1991 |
| A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-ba |
| 5058435 |
Single diaphragm transducer with multiple sensing elements |
October 22, 1991 |
| A transducer having a plurality of sensing elements disposed in a single diaphragm wherein each of the sensing elements is spaced from every other of the sensing elements a predetermined distance so as to control interference among the sensing elements. Each of the sensing elements p |
