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I C Sensors Patents |
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Assignee: I C Sensors
Address: Milpitas, CA
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5253510 |
Self-testable micro-accelerometer |
October 19, 1993 |
| An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference be |
| 5209118 |
Semiconductor transducer or actuator utilizing corrugated supports |
May 11, 1993 |
| A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-ba |
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