| Patent Number |
Title Of Patent |
Date Issued |
| 7432681 |
Scanner system |
October 7, 2008 |
| A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commande |
| 7372632 |
Apparatus and methods for the inspection of microvias in printed circuit boards |
May 13, 2008 |
| An imaging method and imaging system for inspecting features located at a known inter-feature pitch on portions of a target surface. The system includes a lens array having a plurality of lenses wherein the lenses of the lens array have an inter-lens pitch and an inter-field of view pitc |
| 7372478 |
Pattern exposure method and pattern exposure apparatus |
May 13, 2008 |
| A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two di |
| 7364838 |
Gray level imaging masks, optical imaging apparatus for gray level imaging masks and methods for |
April 29, 2008 |
| A grayscale mask for imaging operations, including a substrate layer and a mask layer having a plurality of apertures forming a mask pattern to form a grayscale image. Each edge of each aperture includes a plurality segments forming a serrated edge, resulting in mixed edge diffraction. |
| 7336816 |
Method and apparatus for measuring shape of bumps |
February 26, 2008 |
| The present invention provides a bump shape measuring apparatus comprising an illumination optical system which illuminates bumps arranged on a board with illumination light of a low tilt angle to a surface of the board; a detection optical system where reflected light from the bumps is |
| 7321114 |
Apparatus and method for beam drift compensation |
January 22, 2008 |
| An apparatus and method for maintaining a desired position of a collimated light beam are provided. An optical system includes one or more passive optical elements movably positioned in the beam path. Beam position is responsive to movement of at least one of the passive optical elements |
| 7270270 |
Optical scanner control method, optical scanner and laser machining apparatus |
September 18, 2007 |
| A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the pr |
| 7252462 |
Spindle unit having pressure foot |
August 7, 2007 |
| A spindle unit having a pressure foot whose machining efficiency may be improved even when compressed air is used as means for pressing the pressure foot. The spindle unit having the pressure foot includes a rotor shaft provided within a base rotatably and movably along an axis, a co |
| 7249485 |
Substrate processing apparatus |
July 31, 2007 |
| Substrate processing apparatus for processing holes accurately positioned in an long film, comprising: work supporting devices for supporting the work; clamping devices for clamping the work onto the work supporting devices; first movement devices for moving the work supporting devices i |
| 7205501 |
Laser machining method and laser machining apparatus |
April 17, 2007 |
| A laser machining method and a laser machining apparatus superior in hole position accuracy and hole quality. An outgoing beam outputted as short pulses is shaped by a pulse shaping unit so as to form a #1 branch beam. The #1 branch beam is supplied to a portion to be machined, so as to |
| 7160649 |
Gray level imaging masks, optical imaging apparatus for gray level imaging masks and methods for |
January 9, 2007 |
| A grayscale mask for imaging operations, including a substrate layer and a mask layer having a plurality of apertures forming a mask pattern to form a grayscale image. Each edge of each aperture includes a plurality segments forming a serrated edge, resulting in mixed edge diffraction. |
| 7134817 |
Printed board machining apparatus |
November 14, 2006 |
| There is provided a printed board machining apparatus that is capable of improving machining efficiency without hampering machining accuracy. The printed board machining apparatus includes a pressure foot which is provided with a port whose one end is opened at a lower surface of the |
| 7132622 |
Laser machining apparatus and laser machining method |
November 7, 2006 |
| There is provided a laser machining apparatus, and a laser machining method using the same. The laser machining apparatus has a body portion having a plurality of laser irradiating sections and work mounting sections, a supplying stocker for supplying workpieces, and a discharging st |
| 7130715 |
Machining method and machining apparatus |
October 31, 2006 |
| In a machining method and a machining apparatus, prior to machining, an NC control unit makes an X-axis drive unit move a table based on examination conditions specified in advance. Thus, the NC control unit obtains a stabilization time required from the command-reach time of a poisoning |
| 7098423 |
Laser machining apparatus |
August 29, 2006 |
| There is provided a printed board machining apparatus having fewer restrictions in terms of the length of printed boards to be machined, that can be readily controlled in positioning a sheet-like workpiece and that is capable of improving the machining efficiency. Plural sets of opti |
| 7075724 |
Compensator optics to improve the stability of beam delivery systems that utilize beam shaping t |
July 11, 2006 |
| A compensator/remapper and method for compensation and remapping of a laser beam for control and correction of laser pointing and thermal drift instability in a laser beam delivery system including a laser generating a laser beam and a plurality of optical elements for directing, shaping |
| 7070380 |
Machining apparatus |
July 4, 2006 |
| In a laser beam machining apparatus, a work supply station is disposed on one side of a laser beam machining apparatus body, and a work holding station is disposed on the other side of the laser beam machining apparatus body. Each of the work supply station and the work holding stati |
| 7023598 |
Optical scanner and laser machining apparatus |
April 4, 2006 |
| An optical scanner which can realize target trajectory tracking machining at a high speed and with a high accuracy. In a servo control circuit controlling the operation of an X-axis scanner for positioning a mirror and the operation of a Y-axis scanner for positioning another mirror, |
| 7016117 |
Radially non-symmetric beam forming elements for correction of energy profile distortion due to |
March 21, 2006 |
| A radially non-symmetric beamforming element for transforming the input energy profile of an input laser beam subject to lateral shift that is variable in radial direction and magnitude into a desired output energy profile of an output laser beam. The beam forming element includes an |
| 7006134 |
Pen type input device with camera |
February 28, 2006 |
| A pen type input device with a camera has improved usability as a result in improved construction of the device. The pen type input device with the camera is adapted for use in detecting both of a horizontally elongated object and a vertically elongated object. On the other hand, mea |
| 6992450 |
Active mass damper |
January 31, 2006 |
| The invention provides an active mass damper by use of which a machining apparatus can be downsized. The active mass damper includes a support unit for supporting a weight movably and horizontally, a motor for driving the weight, and a controller for controlling the motor. A torque c |
| 6909735 |
System and method for generating and controlling multiple independently steerable laser beam for |
June 21, 2005 |
| A laser process system with multiple, independently steerable laser beamlets and including a laser and beam shaper for generating a shaped source beam, a splitter stage for generating a plurality of beamlets from the shaped source beam, a beamlet controller including an independently |
| 6884962 |
Beam or wave front |
April 26, 2005 |
| An improved beam for use in ablating a surface to be processed. The improved beam front has a profile with a plurality of undulation and the plurality of undulations define a plurality of annular peaks and annular valleys. An intensity of each annular peak is about 10 percent greater |
| 6853489 |
Correction of angular deviation and radial drift of laser beams |
February 8, 2005 |
| A laser correction element for the correction of angular deviation due to pointing instability and radial displacement due to thermal drift, including one or more of an angular deviation non-symmetric optical element for redirecting a beam axis of a laser beam through a first correct |
| 6849824 |
Multibeam laser drilling apparatus |
February 1, 2005 |
| Provided is a multi-beam laser drilling apparatus for drilling a workpiece, simultaneously at two positions while telecentric errors are suppressed, in which a conventional optical system in which galvanometer mirrors are used for a first laser beam, and a galvanometer-mirror system is l |
| 6804269 |
Laser beam delivery system with trepanning module |
October 12, 2004 |
| A laser beam delivery system for supplying a laser beam to a computer generated hologram which shapes and divides the supplied laser beam into a plurality of pseudo flat top laser beams. The plurality of pseudo flat top laser beams are then passed through collimated optics which alter th |
| 6703603 |
Controller for optical scanner |
March 9, 2004 |
| A controller for an optical scanner includes a mirror angle detecting unit for detecting an angle of a mirror, a rotation shaft angle detecting unit for detecting an angle of the shaft, a current detecting unit for detecting a current supplied to a motor, and a torsional vibration st |
| 6694627 |
Printed circuit board processing machine |
February 24, 2004 |
| A printed circuit board processing machine has: a table that can travel in a X-direction carrying a printed circuit board thereon; a cross rail arranged so as to straddle the table; a plurality of sliders supported for independently movement in a Y-direction by the cross rail; a pluralit |
| 6627850 |
Consumable electrode type arc welding method and device therefor |
September 30, 2003 |
| The welding method according to the present invention is adapted to carry out a welding operation by feeding a welding wire to a material to be welded, and generating an arc between the material to be welded and welding wire, in which the welding is done with the welding wire feeding |
| 6531677 |
Method and apparatus for drilling printed wiring boards |
March 11, 2003 |
| An improved method and apparatus for drilling blind via holes to connect between upper conductive layers and lower conductive layers of printed wiring boards with laser lights. The resin layer contacting the targeted conductive layer is drilled to remain the residual layer with laser |
| 6521866 |
Laser beam machining and laser beam machine |
February 18, 2003 |
| Beam distributing/shaping units 21a and 21b the number of which is the same as the number of heads 7a and 7b are disposed in series with each other on an optical path of a laser beam 2 radiated from a laser oscillator 1. Then, the beam distributing/shaping units 21a and 21b are operated |
| 6479788 |
Method and apparatus of making a hole in a printed circuit board |
November 12, 2002 |
| The invention provides a method and an apparatus of making a hole in a printed circuit board, which improve the quality of a hole shape and the processing speed. In accordance with the invention, a control apparatus controls a laser oscillator and a galvano mirrors so as to form a hole |
| 6217265 |
Printed circuit board drilling machine and its maintenance method |
April 17, 2001 |
| A printed circuit board drilling machine, with a well-designed outer shape, providing excellent operability and maintainability, which sequentially makes a number of holes in at least one printed circuit board, placed on a table 22 moved in an XY plane, by using a drill driven by a spind |
| 6043453 |
Apparatus for laser processing with a mechanical cutter |
March 28, 2000 |
| The apparatus is for spot-facing for exposing an inner-layer conductor embedded in an insulator of a printed circuit board. The spot-facing removes the entire insulator by a mechanical cutter, except a remaining part thereof, to a position just above the inner-layer conductor. The re |
