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Huettinger Elektronik GmbH + Co. KG Patents
Assignee:
Huettinger Elektronik GmbH + Co. KG
Address:
Freiburg, DE
No. of patents:
43
Patents:












Patent Number Title Of Patent Date Issued
RE42362 Induction heating system and method May 17, 2011
An excitation system for heating food, water, or both in airplanes uses induction heating. The system includes at least one load circuit including an inductor that is excited with a load circuit AC voltage, a load circuit alternating current, or both the load circuit AC voltage and t
8222885 Isolating a control signal source in a high frequency power supply July 17, 2012
A high frequency power supply, in particular a plasma supply device, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz with at least one switch bridge, which has two series connected switching elements, wherein one of the switching elements is co
8203398 Measuring power June 19, 2012
One aspect of the invention includes a directional coupler having a coupling factor in the forward direction determined from the equation C.sub.f=C.sub.fe.sup.j.phi..sup.Cf, a coupling factor in the reverse direction determined from the equation C.sub.r=C.sub.re.sup.j.phi..sup.Cr, an
8190969 Plasma process power delivery system and method with event-controlled data storage May 29, 2012
A plasma process power delivery system includes one or more event-ascertaining devices within the plasma process power delivery system, a controller in communication with the one or more event ascertaining devices, a first memory, a second memory, a data transmission connection, and
8154897 RF power supply April 10, 2012
An RF power supply, in particular a plasma supply device, for generating an output power greater than 500 W at an output frequency of at least 3 MHz includes at least one inverter connectable to a DC power supply, which inverter comprises at least one switching element and an output
8133347 Vacuum plasma generator March 13, 2012
Workpieces in a vacuum chamber are treated by receiving a mains voltage from a voltage supply network; generating at least one intermediate circuit voltage; generating a first RF signal of a basic frequency, and of a first phase position, from the at least one intermediate circuit vo
8129653 Plasma supply device March 6, 2012
A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasm
8110992 Controlled plasma power supply February 7, 2012
A plasma power supply system for producing electrical power in the range between 1 kW and 100 kW for a plasma processing system and supplying the power to a plasma chamber through a power line connection, the plasma power supply system includes a power converter, a monitoring section, an
8085054 Detecting arc discharges December 27, 2011
To detect arc discharges occurring in a plasma, a parameter of the plasma process is determined, and after a first period of time following the detection of an arc discharge the parameter is again determined. In the event that after the first period of time no arc discharge is detected,
8044595 Operating a plasma process October 25, 2011
A method for operating one or more plasma processes in a plasma chamber, with at least two power supplies, the method comprising the following process steps: a. carrying out an arc detection for at least one of the power supplies; b. generating at least one signal relating to the arc
8033246 Arc suppression October 11, 2011
An arc suppression arrangement suppresses arcs in a gas discharge device that is operated with an alternating voltage from a power supply. The arc suppression arrangement includes an arc suppression device and an arc identification device that controls the arc suppression device. The arc
8018243 Measurement signal processing September 13, 2011
In order to determine amplitudes of measurement signals originating from an AC power supply and to determine the phase shift (o) between measurement signals more simply, the measurement signals are processed in measurement signal operation devices to form auxiliary signals each havin
8007641 Method of detecting arc discharges in a plasma process August 30, 2011
An arc discharge detection device is used for detecting arc discharges in a plasma process. The arc discharge detection device includes a comparator to which an instantaneous signal and a reference value are supplied. The reference value is formed by a setting means from an extreme v
7995313 Method for operating a plasma process and arc discharge detection device August 9, 2011
An arc discharge in a plasma process is detected using a method that includes detecting arc discharges by monitoring one or more characteristic values of the plasma process, and comparing at least a first characteristic value with a predefinable first threshold value (SW.sub.1). When
7981306 Supplying RF power to a plasma process July 19, 2011
Generating drive signals of at least two RF power generators which supply RF power to a plasma process, in which at least two drive signals, each driving one RF power generator, are generated in an RF generator driver. Each drive signal is generated by a respective function generator, su
7929261 Suppressing arc discharges April 19, 2011
For suppressing arc discharges in a plasma process, a method includes monitoring of at least one parameter of the plasma process, determining a temporal feature of a first countermeasure and performing the first countermeasure. The temporal feature is determined as a function of, for
7898238 Generating an output DC voltage with a boost converter having a controlled pulse-duty factor March 1, 2011
A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the se
7795817 Controlled plasma power supply September 14, 2010
A plasma power supply system for producing electrical power in the range between 1 kW and 100 kW for a plasma processing system and supplying the power to a plasma chamber through a power line connection, the plasma power supply system includes a power converter, a monitoring section, an
7782100 Driving a full bridge circuit August 24, 2010
A full bridge that produces an alternating output signal can be driven by operating switching elements of the full bridge in each period in a switching sequence that determines the order of the activation and deactivation of the switching elements. The switching elements are switched
7755451 Directional coupler July 13, 2010
An HF plasma process excitation configuration includes an HF generator that is connected to a plasma load through a directional coupler. The directional coupler includes a transmission line, a first coupling line for detecting reflected power from the plasma load, and a second coupling
7745955 RF plasma supply device June 29, 2010
The power output of an RF plasma supply device is controlled by producing at least a first and second RF power signal by means of a respective RF generator, coupling at least two RF power signals into a coupled RF power, and distributing the coupled RF power between a plasma power that
7705676 Class D amplifier arrangement April 27, 2010
An amplifier arrangement for operation at supply voltages of at least 100V and at output powers of at least 1 kW includes a half-bridge formed from two switching elements connected in series, two supply voltage terminals, and an output connection between the switching elements. A bypass
7692936 Medium frequency power generator April 6, 2010
An MF power generator includes a DC current supply connected to an inverter. The inverter includes at least one switching element connected to a first-polarity current supply potential, and an output network. Each switching element is provided with a decoupling circuit for decoupling
7692389 Method and device for load matching April 6, 2010
The impedance of a variable load is matched to the output resistance of an HF generator by performing a first impedance matching for a first load impedance and by performing a second impedance matching for a second load impedance. The first impedance matching is carried out at a first
7652901 High frequency excitation system January 26, 2010
A power module is adapted to be connected to a voltage source and to supply power to a load. The power module includes a power transistor; and a gate controller for driving the power transistor. The gate controller includes a gate transformer, and an impulse generator that extends a
7640120 Method and device for detecting arcs December 29, 2009
An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to
7609740 Method and arrangement for the excitation of a gas laser arrangement October 27, 2009
For exciting a gas laser arrangement with a plurality of HF signals, at least two pulsed HF signals are generated arid at least two electrodes or pairs of electrodes of the gas laser arrangement are supplied with the pulsed HF signals, respectively. At least two of the electrodes or pair
7586210 Power delivery control and balancing between multiple loads September 8, 2009
A plasma process machine includes at least two electrodes disposed in a processing chamber and in contact with targets, an alternating current source connected to supply power to the electrodes, and a power delivery controller adapted to control power delivered by the alternating current
7586099 Vacuum plasma generator September 8, 2009
A vacuum plasma generator (VPG) includes an output connector for electrical connection of the VPG to at least one electrode of a plasma chamber. The VPG includes a mains connector for connection of the VPG to a mains power supply, a mains input filter coupled to the mains connector,
7512387 Method and control system for controlling the output power of an RF amplifier system March 31, 2009
A system for controlling a power supplied to a load from a radio frequency amplifier system includes a radio frequency signal generator adapted for generating a radio frequency signal, an amplifier to which the radio frequency signal is supplied and that amplifies the radio frequency
7509105 Radio frequency excitation arrangement including a limiting circuit March 24, 2009
Disclosed is a method for limiting the voltage applied to a component in a radio frequency path (RF path) of a radio frequency excitation system. According to the method, a radio frequency signal (RF signal) is tapped at a first random point of the RF path, and energy is withdrawn from t
7508093 Modular current supply March 24, 2009
A current supply system includes one or more, or a plurality of current supply modules that each includes an input terminal and an output terminal and that each has a maximum output power. Multiple current supply modules are electrically combined to form a current supply unit having
7477114 3DB coupler January 13, 2009
A 3 dB coupler includes at least one first and one second electric conductor that are spaced apart from each other and are capacitively and inductively coupled to each other in a coupling region. The first conductor represents the primary side of a transformer, and the second conduct
7452443 Vacuum plasma generator November 18, 2008
A vacuum plasma generator is used for treating workpieces in a vacuum chamber. The vacuum plasma generator includes a mains connection for connection to a voltage supply network, and at least one mains rectifier. The at least one mains rectifier is connected to at least one first con
7440301 High frequency excitation system October 21, 2008
A power module is adapted to be connected to a voltage source and to supply power to a load. The power module includes a switching bridge that includes a first power transistor and a second power transistor, a first gate controller for driving the first power transistor and a second gate
7408329 Power supply unit for gas discharge processes August 5, 2008
A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the se
7321227 Measuring electrical current flowing through a conductor January 22, 2008
A current measurement device for measuring an electrical current, in particular in a contactless manner, in a current-carrying conductor, using a coil arrangement having a coil conductor and a circuit connected to the coil conductor, the coil arrangement being surrounded at least in
7274266 Radio frequency excitation arrangement September 25, 2007
A method is performed for influencing the signal shape of an output signal of an RF power resonance amplifier and an RF excitation arrangement including an RF power resonance amplifier. A basic signal of a basic frequency is amplified and modulated with a modulation signal, and an ou
7262606 Method of arc detection August 28, 2007
New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the
7151422 90.degree. hybrid December 19, 2006
A 90.degree. hybrid for splitting or interconnecting radio frequency power includes four gate connections, capacitances and inductances for electric capacitive coupling and magnetic inductive coupling, an arrangement of strip conductors that are disposed approximately parallel to each ot
7151408 Method for generating a radio-frequency alternating voltage and an associated radio-frequency po December 19, 2006
A radio-frequency power amplifier system operated in a resonant mode of operation includes a uniform power source, a switching element adapted for applying power on and off at a basic frequency from the uniform power source to a resonant circuit connected to a varying-resistance load at
7151242 Induction heating system and method December 19, 2006
An excitation system for heating food, water, or both in airplanes uses induction heating. The system includes at least one load circuit including an inductor that is excited with a load circuit AC voltage, a load circuit alternating current, or both the load circuit AC voltage and t
6970042 Power control for high frequency amplifiers November 29, 2005
A method of controlling an input voltage of a high frequency amplifier includes measuring power supplied to a load, determining a first control variable for a series element disposed upstream from the high frequency amplifier based on the measured power and a given set point, and det

 
 
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