| Patent Number |
Title Of Patent |
Date Issued |
| 7382389 |
Methods and systems for thermal-based laser processing a multi-material device |
June 3, 2008 |
| A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing informati |
| 7027155 |
Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and meth |
April 11, 2006 |
| A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing informati |
| 7002137 |
Reference point talbot encoder |
February 21, 2006 |
| The disclosed optical encoder includes a scale and a sensor head. The scale includes an optical grating and an optical element. The sensor head includes a light source, a detector array, and an index detector all of which are disposed on a substrate. The scale is disposed opposite the |
| 6979798 |
Laser system and method for material processing with ultra fast lasers |
December 27, 2005 |
| Laser system and method for material processing with ultra fast lasers are provided. One aspect of the invention features the method which removes at least a portion of a target structure such as a memory link while avoiding undesirable damage to adjacent non-target structures. The metho |
| 6973104 |
Pulse control in laser systems |
December 6, 2005 |
| A pulsed laser system includes a laser pump, a laser rod, a reflector interposed between the laser pump and the laser rod, through which energy from the laser pump enters the laser rod, an output reflector through which energy is emitted from the laser rod, a switch interposed between |
| 6972268 |
Methods and systems for processing a device, methods and systems for modeling same and the devic |
December 6, 2005 |
| A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing informati |
| 6956491 |
Monitoring bearing performance |
October 18, 2005 |
| Techniques for qualifying and monitoring bearing performance and condition in a rotary servo systems (e.g., galvanometer scanner) are disclosed. A position error signal is analyzed for signal anomalies that can signify bearing damage. A DC offset ramp is applied to the position error sig |
| 6897435 |
Encoder self-callibration apparatus and method |
May 24, 2005 |
| The disclosed electronic processing apparatus calculates and applies calibrations to sensors that produce quasi-sinusoidal, quadrature signals. The apparatus includes either or both of fixed and programmable electronic circuits. The apparatus includes a circuit to calculate the phase and |
| 6875950 |
Automated laser trimming of resistors |
April 5, 2005 |
| In the laser trimming of passive circuit elements such as resistors, capacitors and inductors, various trimming parameters must be selected. To select a element is compared with a target value for the parameter to determine an offset value between the measured parameter value and the |
| 6831936 |
Pulse control in laser systems |
December 14, 2004 |
| A pulsed laser system includes a laser pump, a laser rod, a reflector interposed between the laser pump and the laser rod, through which energy from the laser pump enters the laser rod, an output reflector through which energy is emitted from the laser rod, a switch interposed between |
| 6822187 |
Robotically operated laser head |
November 23, 2004 |
| A laser cutting or welding device, the device having a laser head (10) and a robot (35), wherein the laser head is attached to the robot (35). The laser head (10) has a housing (12), a focal lens (26) disposed within the housing and a light source (18) in optical communication with the f |
| 6819438 |
Technique for fabricating high quality optical components |
November 16, 2004 |
| To determine the uniformity of an optical component, a light beam is directed to impinge on a surface of an optical component at each of multiple points. A characteristic of the light beam impinging on the optical component surface at each of the multiple points is modified so as to |
| 6809451 |
Galvanometer motor with composite rotor assembly |
October 26, 2004 |
| A limited rotation torque motor is disclosed that includes a rotor and a stator. The rotor includes a plurality of pairs of magnetic poles and the stator includes a plurality of pairs of stator coils. Each stator coils extends along a longitudinal length of the motor. |
| 6777645 |
High-speed, precision, laser-based method and system for processing material of one or more targ |
August 17, 2004 |
| A precision, laser-based method and system for high-speed, sequential processing of material of targets within a field are disclosed that control the irradiation distribution pattern of imaged spots. For each spot, a laser beam is incident on a first anamorphic optical device and a s |
| 6768100 |
Continuous position calibration for servo controlled rotary system |
July 27, 2004 |
| A continuous optical calibration system for a galvanometer scanner. The system maintains one or more fiducial position references in each axis, independent of the normal position detector circuit. An optical reference position monitor circuit triggers a calibration signal when load posit |
| 6750974 |
Method and system for 3D imaging of target regions |
June 15, 2004 |
| A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be "non-cooperative." The " |
| 6749309 |
Optical element for scanning system and method of manufacture thereof |
June 15, 2004 |
| An optical element is disclosed for use in a scanning system. The optical element comprises a carbon-based substrate having a first specific stiffness, and a titanium carbide coating having a second specific stiffness. The carbon-based substrate and the titanium carbide coating form |
| 6720567 |
Apparatus and method for focal point control for laser machining |
April 13, 2004 |
| Method and apparatus for maintaining the focal point of a laser beam used for laser machining relative to a workpiece, including an optical distance measuring sensor having a measurement beam, a mirror for combining the measurement and laser beams into a predetermined optical path having |
| 6710487 |
Rotary device with matched expansion ceramic bearings |
March 23, 2004 |
| A high precision torque motor, including a partial rotation drive suitable for use in a galvanometer scanner, where the rotor is supported within the stator and housing assembly on all ceramic ball bearings, including inner and outer races and bearing balls. The ceramic ball bearing asse |
| 6703582 |
Energy-efficient method and system for processing target material using an amplified, wavelength |
March 9, 2004 |
| An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a contro |
| 6662063 |
Method and subsystem for determining a sequence in which microstructures are to be processed at |
December 9, 2003 |
| Method and subsystem are provided for determining a sequence in which microstructures are to be processed at a laser-processing site by taking into account microstructures located near travel limits of a motor-driven stage. The method includes receiving reference data which represent |
| 6639177 |
Method and system for processing one or more microstructures of a multi-material device |
October 28, 2003 |
| A method and system for processing at least one microstructure which is part of a multi-material device containing a plurality of microstructures is provided. The at least one microstructure has a designated region for target material removal. The method includes generating a laser beam, |
| 6612015 |
Method for making a galvanometer with axial symmetry |
September 2, 2003 |
| A method of fabricating a limited-rotation motor that is characterized by axial stability of a rotor that includes a permanent-magnet armature and further characterized by a relatively small inherent axial force on the rotor. The rotor is supported by a pair of ball-bearing units and axi |
| 6593854 |
System of monitoring bearing performance |
July 15, 2003 |
| A system for qualifying and monitoring bearing performance and condition in a rotary servo system. A position error signal is analyzed for signal anomalies that can signify bearing damage. A DC offset ramp is applied to the position error signal to test whether the anomaly is angular pos |
| 6448673 |
Controlled high speed reciprocating angular motion actuator |
September 10, 2002 |
| A reciprocating rotary action actuator consisting of a rotor and stator that can be added to a bi-directional rotary motor or galvanometer scanner, where the stator has a ring magnet and a pair of soft iron pole pieces that concentrate the flux of the ring magnet into a concentric set |
| 6433449 |
Galvanometer unit |
August 13, 2002 |
| A galvanometer unit includes a limited-rotation motor with a load element such as a mirror attached to a shaft extending from the motor. In a servo loop that controls the angular position of the mirror, a position-sensor attached to the shaft provides position feedback information. The s |
| 6390684 |
Method and apparatus for reducing stress on rotating shaft bearings |
May 21, 2002 |
| In a reciprocating rotor device such as a scanning galvanometer, a bearing assembly consisting of a rheological bearing coupler interposed between the rotor shaft and the bearing support structure or housing, where the rheological bearing coupler is relatively stiff during constant-veloc |
