| Patent Number |
Title Of Patent |
Date Issued |
| D513307 |
Joint member for fluid control apparatus |
December 27, 2005 |
|
| 7595087 |
Process of forming platinum coating catalyst layer in moisture-generating reactor |
September 29, 2009 |
| A barrier film which has uniform thickness and excellent adhesiveness to the base material and superbly functions to protect a platinum film can be formed on the inner wall surface of a moisture-generating reactor at ease and at a low cost. The moisture-generating reactor in which hydrog |
| 7594517 |
Gas supply facility of a chamber and a method for an internal pressure control of the chamber fo |
September 29, 2009 |
| The present invention prevents substantial reduction of flow rate control accuracy in a small flow quantity range, achieves accurate flow rate control over the entire range of flow rate control, and also allows control of a wide pressure range of a chamber with accurate flow rate con |
| 7553459 |
Apparatus and reactor for generating and feeding high purity moisture |
June 30, 2009 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7497482 |
Pipe joint |
March 3, 2009 |
| A pipe joint comprises a first joint member of synthetic resin having an annular recessed portion in an end face thereof, and a second joint member of synthetic resin having an annular ridge on an end face thereof. The ridge is fitted in the opening of the recessed portion, with a sy |
| 7472887 |
Valve for vacuum exhaustion system |
January 6, 2009 |
| The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum exhaustion time short, and also which can prevent t |
| 7416165 |
Diaphragm valve for the vacuum exhaustion system |
August 26, 2008 |
| A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body |
| 7368092 |
Apparatus and reactor for generating and feeding high purity moisture |
May 6, 2008 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7367241 |
Differential pressure type flowmeter and differential pressure type flow controller |
May 6, 2008 |
| A differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P.sub.1 on the upstream side of an orifice, a detector to detect a fluid pressure P.sub.2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream si |
| 7363810 |
Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device usin |
April 29, 2008 |
| A corrosion resistant thermal type mass flow rate sensor, and a fluid supply device employing the sensor are provided thus allowing enhanced corrosion resistance of the thermal type mass flow rate sensor, improve responsiveness, to be achieved particle-free, and to prevent unevenness |
| 7303176 |
Controller |
December 4, 2007 |
| Force amplifying means 5 comprises a tapered member 41 extending vertically downward from the lower end of an operating rod 3, a disk member 42 provided at the upper end of a valve stem 16, and front and rear pivotal members 43, 44 arranged between the two members 41, 42 and opposed |
| 7278441 |
Fluid controller |
October 9, 2007 |
| A fluid control device 1 has an upper space S1 formed between and defined by the upper surface of a piston 10 and the lower surface of top wall 8a of an upper casing 8, and a lower space S2 formed between and defined by the lower surface of the piston 10 and the upper surface of bottom w |
| 7278437 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing |
October 9, 2007 |
| A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2 |
| 7258845 |
Apparatus and reactor for generating and feeding high purity moisture |
August 21, 2007 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7219533 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and s |
May 22, 2007 |
| A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the c |
| 7217564 |
Cytotoxic assay and new established cell line of sturgeon origin |
May 15, 2007 |
| An object of the present invention is to provide a cytotoxic assay using a new established fish cell line. The invention attained according to the object is a cytotoxic assay, wherein an evaluation of toxicity of a specimen is performed on the basis of its toxicity to an established cell |
| 7185543 |
Ultra-precision micro-differential pressure measuring device and ultra-precision differential pr |
March 6, 2007 |
| The ultra-precision micro-differential pressure measuring device comprises a device body 1 having an inner space part therein, a pressure receiving plate 3 which is installed inside the inner space of the device body 1 and divides the said inner space hermetically into a lower space 7 an |
| 7175157 |
Fluid controller |
February 13, 2007 |
| A fluid controller, wherein the recessed port (25) of a body (22) is formed of larger diameter part (25a) near an opening and a small diameter part (25c) continued to the lower part of the large diameter part (25a) through a step part (25b). A flow passage forming disk (26) is fitted to |
| 7159839 |
Control device |
January 9, 2007 |
| Booster means 11 for transmitting a force acting on a piston 10 to a valve stem 9 on amplification comprises pivotal members 25 each supported by casings 7, 8 so as to hold an outer end and an inner end thereof in contact with an outer peripheral portion of the piston 10 and a flange |
| 7152629 |
Fluid control device |
December 26, 2006 |
| Line interconnecting means 50 comprises lower channel blocks 51 each having a line interconnecting channel 54 and arranged in an upper stage of lines B1, B2, B3 to be interconnected, at the same position with respect to the direction of the lines, and a plurality of upper channel blo |
| 7150444 |
Valve with an integral orifice |
December 19, 2006 |
| A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by |
| 7150287 |
Safety valve |
December 19, 2006 |
| A safety valve comprises a main body, fixed body, meltable body, movable body, biasing member, movable plug and plug holding means. The fixed body has a small passageway communicating with the interior of a container, and an upper large passageway. The movable plug has a small portion |
| 7140647 |
Fluid coupling |
November 28, 2006 |
| Two coupling members are provided in respective butting end faces thereof with annular recessed portions surrounding respective fluid channels thereof and having annular projections each formed in a bottom face of the recessed portion. A gasket comprises a sealing portion having an o |
| 7132230 |
Cytotoxic assay and new established cell line of sturgeon origin |
November 7, 2006 |
| An object of the present invention is to provide a cytotoxic assay using a new established fish cell line. The invention attained according to the object is a cytotoxic assay, wherein an evaluation of toxicity of a specimen is performed on the basis of its toxicity to an established cell |
| 7103990 |
Rotary silicon wafer cleaning apparatus |
September 12, 2006 |
| It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments.According |
| 7087158 |
Oxygen-supply-capable cooling water equipment, filtration-equipment and filtration-equipped cool |
August 8, 2006 |
| Filtration-function-equipped cooling water equipment that includes: filtration equipment connected to water-purifying, oxygen-supply-capable cooling water equipment, wherein the filtration equipment includes a filtration space for a filter, wherein the water-purifying, oxygen-supply- |
| 7085628 |
Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatu |
August 1, 2006 |
| A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided to automatically correct temperature drift of the pressure sensor and accurately detect pressure despite changes in temperature. An embodiment includes an upstream side pressure sensor bet |
| 7080658 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing |
July 25, 2006 |
| A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2 |
| 7059363 |
Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-ra |
June 13, 2006 |
| A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q.sub.1/Q.sub.2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being div |
| 7008598 |
Reactor for generating moisture |
March 7, 2006 |
| A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the d |
| 7004199 |
Fluid control apparatus |
February 28, 2006 |
| Line interconnecting means interconnecting two lines adjacent to each other laterally thereof comprises a lateral projection 64b formed on a two-way connecting block coupling 64 of the first of the lines, a recessed portion 54c formed in a two-way connecting block coupling 64 of the |
| 6964279 |
Pressure-type flow rate control apparatus |
November 15, 2005 |
| A pressure-type flow rate control apparatus controls the flow rate of fluid passing through an orifice to a target flow rate. The flow rate of a compressible fluid under non-critical conditions (sub-sonic) passing through the orifice is calculated by:Also provided is an improved pressure |
| 6938489 |
Oscillatory type pressure sensor |
September 6, 2005 |
| A high-sensitive and high accuracy vibrating type pressure sensor (1) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm (4) for |
| 6919056 |
Reactor for generating moisture |
July 19, 2005 |
| A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, and the peeling off of the platinum coat catalyst layer inside are all prevented more completely to further increase the safety of the reactor for generating moisture, and wher |
| 6871803 |
Valve with an integral orifice |
March 29, 2005 |
| A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by |
| 6868867 |
Fluid control apparatus |
March 22, 2005 |
| A connecting layer for interconnecting fluid control devices in series and in parallel comprises an upper connecting layer 4 and a lower connecting layer 5. The upper connecting layer 4 is provided by parallel rows each comprising block couplings 41, 42, 43, 44 arranged longitudinally of |
| 6848470 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow contr |
February 1, 2005 |
| A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow |
| 6820632 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow contr |
November 23, 2004 |
| A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow |
| 6786471 |
Diaphragm valve |
September 7, 2004 |
| A diaphragm valve assembly comprising a body defining a valve chamber and first and second passageways through said, a removable, annular valve seat installed in the valve chamber around of said passageways, seat holding means comprising a seat holder shaped to surround said valve seat, |
| 6779774 |
Metal diaphragm valve |
August 24, 2004 |
| A metal diaphragm valve for use inter alia in semiconductor facilities. This metal diaphragm valve is so designed as to reduce the fluid resistance of the fluid path from the valve chamber to the outflow path of the body and allows a large quantity of fluid to flow in spite of its sm |
| 6733732 |
Reactor for generating moisture |
May 11, 2004 |
| A reactor comprising a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, having a gas-diffusing member provided in an internal space of the body, and having a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed |
| 6712400 |
Coupling member for use in fluid control apparatus and method of fabricating same |
March 30, 2004 |
| A method for facilitating fabrication of a coupling member includes a first step of boring one of upwardly open, passageways, a communication passageway and an auxiliary passageway in a body block, a second step of inserting a closure member into the auxiliary passageway, a third step of |
| 6704696 |
Apparatus for and method of designing fluid control devices |
March 9, 2004 |
| A designing apparatus comprises symbol mark memory for storing fluid controllers usable in fluid control devices in terms of symbol marks representing the functions, fluid channels and contours of the controllers, and a flowchart preparing device for preparing a flowchart of a fluid |
| 6672942 |
Grinding machine for welding electrodes |
January 6, 2004 |
| A grinding machine for welding electrodes comprises a housing 1, grinder motor 2, grinding disk 3, swing plate 4, holder guide 6, electrode holder 7, electrode turning motor 8 and swing plate moving mechanism 9. The axis .phi.a of electrode A extends along a line perpendicular to the axi |
| 6648020 |
Fluid control apparatus and gas treatment system comprising same |
November 18, 2003 |
| A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward. |
| 6618922 |
Cooperating fixing jigs for aligning a plurality of lower members on a support member |
September 16, 2003 |
| First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections |
| 6615871 |
Fluid control apparatus |
September 9, 2003 |
| An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port |
| 6554020 |
Fluid control apparatus |
April 29, 2003 |
| A pair of tape heaters 11 are arranged respectively on opposite sides of at least one line and held to the corresponding coupling members by a plurality of clips 12. Each of the clips 12 comprises a pair of side walls 13 opposed to each other as spaced apart by a predetermined distance, |
| 6453707 |
Device for locking channel opening-closing handle of fluid controller |
September 24, 2002 |
| A locking device comprises a stopper support fixed to the body of a fluid controller, and a stopper nonrotatably mounted on the stopper support and engageable with a channel opening-closing handle for preventing the rotation of the handle. The stopper mounted on the support is movable |
| 6450190 |
Method of detecting abnormalities in flow rate in pressure-type flow controller |
September 17, 2002 |
| A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice--the pressure-type flow controller wherein with the up |
