| Patent Number |
Title Of Patent |
Date Issued |
| 6855557 |
Detection of base contaminants in gas samples |
February 15, 2005 |
| A detection system for detecting contaminant gases includes a converter, a detector, a primary channel for delivering a target gas sample through the converter to the detector, and at least two scrubbing channels for delivering a reference gas sample through the converter to the detector |
| 6761753 |
Methods using filters employing both acidic polymers and physical-adsorption media |
July 13, 2004 |
| A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fa |
| 6759254 |
System and method for determining and controlling contamination |
July 6, 2004 |
| A preferred embodiment includes a method for monitoring the performance of a filter positioned in an airstream in a semiconductor processing system. The method includes sampling the airstream at a location upstream of the filter to detect the molecular contaminants present in the airstre |
| 6740147 |
Filters employing both acidic polymers and physical-adsorption media |
May 25, 2004 |
| A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fa |
| 6620630 |
System and method for determining and controlling contamination |
September 16, 2003 |
| A system and method for determining and removing contamination recognizes the need to determine contamination caused by a plurality of contaminants which includes refractory compounds, high molecular weight compounds and low molecular compounds operating at different rates. The system in |
| 6610128 |
Filters employing porous strongly acidic polymers |
August 26, 2003 |
| A clean, high efficieny, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional |
| 6447584 |
Filters employing porous strongly acidic polymers |
September 10, 2002 |
| A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functiona |
| 6296806 |
Protection of semiconductor fabrication and similar sensitive processes |
October 2, 2001 |
| A detection system for detecting base contamination at low concentrations in gas, for instance to protect a sensitive process, characterized in that the detection system is constructed to examine multiple amines in gas to produce a reading stoichiometrically related to the proton bonding |
| 6207460 |
Detection of base contaminants in gas samples |
March 27, 2001 |
| A detection system for detecting contaminant gases includes a converter, a detector, a primary channel for delivering a target gas sample through the converter to the detector, and at least two scrubbing channels for delivering a reference gas sample through the converter to the detector |
| 6096267 |
System for detecting base contaminants in air |
August 1, 2000 |
| A system for detection of base contamination at low concentrations in air comprises a detector that provides a single reading that is stoichiometrically related to the aggregate proton-bonding characteristic of various base contaminants present in the air. The system can operate as a "to |
| 5856198 |
Performance monitoring of gas-phase air filters |
January 5, 1999 |
| A scheme for monitoring the performance of a gas-phase filter in which upstream and downstream detection surfaces are exposed to upstream and downstream air so that molecular contamination may respectively form non-volatile residue thereon, and the performance of the air filter is de |
| 5607647 |
Air filtering within clean environments |
March 4, 1997 |
| An air filtering system for filtering air streams for use in a clean environment to effectively remove a process-limiting molecular contaminant therefrom comprising sequentially arranged upstream and downstream air filtering beds. The upstream air filtering bed is positioned to receive a |
| 5582865 |
Non-woven filter composite |
December 10, 1996 |
| A method of making a high efficiency, low pressure drop, adsorptive, non-woven filter composite is disclosed, comprising a high surface area chemically impregnated adsorbent, and a non-woven carrier material; and a method for forming said composite comprising dry application of the c |
| 5462485 |
Controlling air quality |
October 31, 1995 |
| Controlling quantity of outside air drawn into a building being based upon the rate of change in the concentration of pollutants in the air, whereby the quality of air inside the building is substantially controlled. An air system includes an intake port for coupling the air system to a |
