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Episil Technologies Inc. Patents
Assignee:
Episil Technologies Inc.
Address:
Hsinchu, TW
No. of patents:
12
Patents:




Patent Number Title Of Patent Date Issued
7411271 Complementary metal-oxide-semiconductor field effect transistor August 12, 2008
A complementary metal-oxide-semiconductor field effect transistor (CMOSFET) is provided. The CMOSFET includes a substrate of a first conductivity type, a first epitaxial layer, a well, a second epitaxial layer of a second conductivity type, a first sinker, a second sinker, a first bu
7391079 Metal oxide semiconductor device June 24, 2008
A method of fabricating an MOS device is described. A substrate doped a first type dopant is provided as a drain. A first type epitaxial layer is formed on the substrate and is patterned with a trench to form several islands. A gate dielectric layer is than formed on the surface of the
7338852 Method of forming a semiconductor device having a capacitor and a resistor March 4, 2008
A method of simultaneously forming at least: one capacitor two resistors and one metal-oxide semiconductor. A first doped polysilicon layer/patterned interpoly oxide film/second doped polysilicon layer is formed over an exposed oxide structure. The patterned interpoly oxide forms a c
7294550 Method of fabricating metal oxide semiconductor device November 13, 2007
A method of fabricating an MOS device is described. A substrate doped a first type dopant is provided as a drain. A first type epitaxial layer is formed on the substrate and is patterned with a trench to form several islands. A gate dielectric layer is than formed on the surface of the
7199009 Method for fabricating power mosfet April 3, 2007
A method for fabricating a power MOSFET, comprising an epitaxial layer, a gate dielectric layer and a gate layer formed on a substrate, the gate dielectric layer and the gate layer defined to form a gate structure, a stacked mask and the surface of the epitaxial layer partially exposed
7084033 Method for fabricating a trench power MOSFET August 1, 2006
A method for fabricating a trench power MOSFET, comprising an epitaxial layer and a mask layer formed over a substrate, a trench formed in the epitaxial layer and the mask layer, a gate oxide layer formed on the trench, then the mask layer removed, a body well region formed in the ep
7060567 Method for fabricating trench power MOSFET June 13, 2006
A method for fabricating trench power MOSFET is described. An epitaxial layer and a mask layer having a first opening are sequentially formed on a substrate. A pair of spacers is formed on the sidewalls of the first opening. A second opening exposing the surface of the epitaxial layer is
6815337 Method to improve borderless metal line process window for sub-micron designs November 9, 2004
A process for reducing the risk of removing metal from an underlying metal structure during a dry etch procedure used to define a borderless, overlying metal line structure, has been developed. After formation of a damascene type, underlying metal structure, deposition of an metal layer
6806136 Method of forming a semiconductor device having a capacitor and a resistor October 19, 2004
The present invention relates generally to semiconductor fabrication and more specifically to simultaneous formation of capacitors, resistors and metal oxide semiconductor.
6620663 Self-aligned copper plating/CMP process for RF lateral MOS device September 16, 2003
A method of fabricating an RF lateral MOS device, comprising the following steps. A substrate having a gate oxide layer formed thereover is provided. A first layer of polysilicon is formed over the gate oxide layer. A second layer of material is formed over the polysilicon layer. The pol
6489204 Save MOS device December 3, 2002
Using current technology, the only way to further increase device density is to decrease device pitch. The present invention achieves this by introducing a sidewall doping process that effectively reduces the source width, and hence the pitch. This sidewall doping process also eliminates
6255184 Fabrication process for a three dimensional trench emitter bipolar transistor July 3, 2001
A process for fabricating a bipolar junction transistor, featuring an N type, polysilicon emitter structure, located in an emitter trench, and featuring a narrow width. P type base region, located directly underlying an N type, emitter region, which is formed in the semiconductor substra

 
 
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